Tms Heater; Tms Valve; Outlet Port Heater; Installation Of The Tms Unit - Edwards STP-XF803 Series Instruction Manual

Note: For the connection method of the TMS unit, refer to the STC-U eTMS unit Instruction Manual
for STP Turbomolecular Pump.
3
3.2

TMS heater

The TMS heater heats the base of the STP pump. It's fitted with the STP pump at the factory. The
overheat prevention device is set on the TMS heater.
3.3

TMS valve

The TMS valve controls the cooling water in order to maintain a constant temperature inside the STP
pump. The shape of the TMS valve varies according to specifications.
3.4

Outlet port heater

The outlet heater heats the outlet port. It's fitted with the STP pump at the factory. The overheat
prevention device is set on the outlet port heater.
3.5

Installation of the TMS unit

DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or other unstable
DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables
3.5.1

Connecting cables to the TMS unit

See the "TMS unit Instruction Manual".
MT-92E-101-C
Page 24
STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
CAUTION
environment.
CAUTION
excessively.