Worst Case Test Results - Edwards iXH100 Instruction Manual

Process Gas
Chlorine Cl
2
Ammonia NH
3
Arsine AsH
3
Boron BCl
3
Trichloride
Carbon CO
Monoxide
Chlorine ClF
3
Trifluoride
DCS SiCl H
2 2
Diborane B H
2 6
Fluorine F
2
Hydrogen H
2
Hydrogen HCl
Chloride
Hydrogen HF
Fluoride
Nitrogen NF
3
Trifluoride
Phosphine PH
3
Silane SiH
4
Sulphur SF
6
Hexafluoride
TEOS SiC H
8 20
Tungsten WF
6
Hexafluoride
* where Pass indicates acceptable enclosure (satisfies SEMI S2 criteria of less than 25.0% of the TLV)
The pumps tested represent the extremes of the full range of systems. The results in
considered representative across the full range of iXH and iXL systems. Extraction flow rates required for each system
are detailed in Table 18.
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 17 - Worst case test results
Maximum
TLV/LEL
Gas Flow
(ppm)
(slm)
1 0.5
10 25
0.1 0.05
1 5
1 25
0.5 0.1
2 5
0.05 0.1
4.5 1
150 4000
20 5
2 3
10 10
0.2 0.3
6 5
2 1000
O 2 10
4
1 3
SF
6
25% TLV/
Release
LEL (ppm)
rate (slm)
0.125 2
6.25 2
0.0125 2
1.25 2
6.25 2
0.025 2
1.25 2
0.025 2
0.25 2
1000 2
1.25 2
0.75 2
2.5 2
0.075 2
1.25 2
250 2
2.5 2
0.75 2
M561-00-880 Issue C
Max SF
6
Detected ERC
outside (ppm)
enclosure
0.079 0.04 Pass
0.079 0.40 Pass
0.079 0.00 Pass
0.079 0.04 Pass
0.079 0.04 Pass
0.079 0.02 Pass
0.079 0.08 Pass
0.079 0.00 Pass
0.079 0.18 Pass
0.079 5.93 Pass
0.079 0.79 Pass
0.079 0.08 Pass
0.079 0.4 Pass
0.079 0.01 Pass
0.079 0.24 Pass
0.079 0.08 Pass
0.079 0.08 Pass
0.079 0.04 Pass
Table 17 are therefore
Page 21
Pass/
Fail *