Gas Module Configuration; Ixh Single Mode And Single Mode; Multi Mode - Edwards iXH100 Instruction Manual

5.6

Gas module configuration

The gas module configuration may be adjusted to suit process demands.
5.6.1

iXH single mode and single mode+

The iXH Single Mode gas module has 2 manually-adjustable operational modes:
Medium

Harsh

In addition to this, the Single Mode + gas module has a further operational mode:
Harsh + Inlet

The factory default setting for all gas modules is Harsh, except for the iXH1220H and iXH1820H models which contain
the SM+96 gas module set to Medium.
Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for
process-specific recommendations.
Use the following procedure to change the gas module mode:
1. Remove the left hand side panel of the pumping system.
2. Identify the gas module (Contact Edwards for guidance).
3. Use a short flat-blade screwdriver to turn the adjustment screw on the front of the gas module by 1/4 turn.
4. If adjustment screw slot is vertical then turn clockwise for medium mode.
5. If adjustment screw slot is horizontal then turn anticlockwise for harsh mode.
6. Refit side panel.
7. Access the Config menu on the PDT (requires an access code, contact Edwards).
8. Scroll down to Gas Process - press ENTER.
9. Scroll through options Harsh / Med / Harsh + Inlet - use ENTER to select desired option.
10. Scroll down to Default N
11. PDT displays: Set Default Yes (Press Enter) - confirm default - Press ENTER.
5.6.2

Multi mode

The iXH and iXL Multi Mode gas modules have a number of electronically-adjustable operational modes:
Medium

Harsh

+Inlet purge

+Exhaust purge

Contact Edwards service personnel for instructions on how to access the configuration menu (via the PDT) and for
process-specific recommendations.
© Edwards Limited 2012. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Setup - press ENTER.
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M561-00-880 Issue C
Page 49