Edwards iXH100 Instruction Manual page 2

iXH and pXH Dry Pumping Systems
A C
Booster Size
Low Voltage High Voltage
0 = None A = None
1 = 600G B = 600G
2 = r C = r
3 = 1200 D = 1200
4 = 1800 E = 1800
5 = 3000 F = 3000
6 = 4500 G = 4500
7 = 6000 H = 6000
Dry Pump
Standard Harsh
0 = None (pXH) A = 100
1 = 100 B = 200
2 = 200 C = 300
3 = 300 D = 450
4 = r E = 500
5 = r
6 = r
7 = r
Where r = reserved for future use
X X X X
TMS System Exhaust
0 = Standard 0 = r
1 = T-Variant 1 = Standard
2 = T-Variant
+ heated
booster 2 = r
3 = r 3 = Standard with
4 = r
5 = r
Gas Module
0 = None (pXH) 6 = Single Mode +
1 = Loadlock
(4 slm flow)
2 = Single Mode 7 = Single Mode +
(44 slm flow)
3 = Single Mode 8 = Single Mode +
(96 slm flow)
4 = Single Mode 9 = Single Mode +
(133 slm flow)
5 = Single Mode A = Multi Mode
(204 slm flow)
B = Multi Mode
C = Multi Mode
D = Multi Mode
X X X X
Seals
0 = r
1 = r
without 2 =Standard
check valve.
check valve.
(44 slm flow)
(96 slm flow)
(133 slm flow)
(204 slm flow)
(44 slm flow)
(96 slm flow)
(133 slm flow)
(204 slm flow)
X 0
Pump
Motor
0 = None
1 = 4.5 kW
2 = 7.5 kW
3 = 11 kW
Booster
Motor
0 = None
1 = 1.9 kW
2 = 4.5 kW
3 = 7.5 kW
4 = r
Special
Features
0 = None
1 = Application Specific
2 = Application Specific
3 = Application Specific
4 = Application Specific
5 = Application Specific
6 = Application Specific
7 = Application Specific
8 = Application Specific
9 = Application Specific