Compliance With Semi-F47 Standard - Mitsubishi Electric MR-J4-10B(-RJ) Instruction Manual

7. SPECIAL ADJUSTMENT FUNCTIONS

7.4 Compliance with SEMI-F47 standard

The following explains the compliance with "SEMI-F47 semiconductor process equipment voltage sag
immunity test" of MR-J4 series.
This function enables to avoid triggering [AL. 10 Undervoltage] using the electrical energy charged in the
capacitor in case that an instantaneous power failure occurs during operation.
(1) Parameter setting
Setting [Pr. PA20] and [Pr. PF25] as follows will enable SEMI-F47 function.
Parameter
PA20
PF25
Enabling SEMI-F47 function will change operation as follows.
(a) The voltage will drop in the control circuit power with "Rated voltage × 50% or less". 200 ms later,
[AL. 10.1 Voltage drop in the control circuit power] will occur.
(b) [AL. 10.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Table 7.1 Voltages which trigger [AL. 10.2 Voltage drop in the main circuit power]
(c) MBR (Electromagnetic brake interlock) will turn off when [AL. 10.1 Voltage drop in the control circuit
power] occurs.
POINT
The control circuit power supply of the servo amplifier can be possible to comply
with SEMI-F47 standard. However, a back-up capacitor may be necessary for
instantaneous power failure in the main circuit power supply depending on the
power supply impedance and operating situation.
Use a 3-phase for the input power supply of the servo amplifier. Using a 1-phase
100 V AC/200 V AC for the input power supply will not comply with SEMI-F47
standard.
The external dynamic brake cannot be used for compliance with SEMI-F47
standard. Do not assign DB (Dynamic brake interlock) in [Pr. PD07] to [Pr.
PD09]. Failure to do so will cause the servo amplifier to become servo-off when
an instantaneous power failure occurs.
Be sure to perform actual machine tests and detail checks for power supply
instantaneous power failure of SEMI-F47 standard with your equipment.
Setting
value
_ 1 _ _ Enable SEMI-F47 function selection.
Set the time [ms] of the [AL. 10.1 Voltage drop in the control circuit power]
200
occurrence.
Servo amplifier
MR-J4-10B(-RJ)
to
MR-J4-700B(-RJ)
MR-J4-11KB(-RJ)
to
MR-J4-22KB(-RJ)
MR-J4-60B4(-RJ)
to
MR-J4-22KB4(-RJ)
Description
Bus voltage which triggers alarm
158 V DC
200 V DC
380 V DC
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