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1.10 Vacuum system
Mass spectrometers use a vacuum to ensure that the ions produced in the source avoid
unwanted collisions before they reach the detector.
An external roughing pump and an internal split-flow turbomolecular pump combine to create the
instrument vacuum. The turbomolecular pump evacuates the analyzer and the source region.
Vacuum leaks and electrical or vacuum pump failures cause vacuum loss, which triggers the
protective interlocks to switch off the high voltage. The system monitors the turbomolecular pump
speed and continuously measures vacuum pressure with a built-in gauge. The gauge also serves
as an interlock, stopping operation if vacuum is lost.
1.11 Rear panel
The following figure shows the rear panel locations of the connectors used to operate the
instrument with external devices.
Figure 1–22: Mass spectrometer rear panel
Camera connection (not used)
Event inputs and outputs
Serial port
Shielded Ethernet
April 27, 2020, 715005564 Ver. 01 (previously released as Rev. A)
Page 34
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