Edwards STP-iS1607S Manuals

Manuals and User Guides for Edwards STP-iS1607S. We have 1 Edwards STP-iS1607S manual available for free PDF download: Instruction Manual

Edwards STP-iS1607S Instruction Manual (173 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 3.58 MB

Table of Contents
7
Introduction
15
Scope and Definitions
15
Electromagnetic Compatibility
16
Limited Warranty
16
Item Warranted
16
Disclaimer
17
Spare Parts
17
Precautions for Safe Operation of the STP Pump
18
Usable Gases
18
STP Pump Installation Warning Label
19
Hot Surface Warning Label
19
Maintenance and Inspection Precautions
19
Labels
19
Heavy Product Caution Label
20
High Voltage Device Caution Label
20
Operation Principle of the STP Pump
21
STP Pump Specification
23
Technical Data
25
STP Pump Specifications
25
Maximum Gas Flow-Rate
27
Water Cooling Use Condition
28
Control Unit
29
External Appearance of STP-Is1607/Is1607C/Is1607B
31
External Appearance of the STP Pump
31
External Appearance of STP-Is1607S/Is1607Cs/Is1607Bs
32
Label Affixing Positions
33
Installation of the Stp Pump
35
Precautions before Installation
35
Operating Environment
35
Space Around the STP Pump
37
Installation Area
37
Bench
38
Insulation Test
38
Example of Lifting the STP Pump
39
- Eye Nut Size
  39
Unpacking and Installation
39
Example of Lifting the STP Pump (Horizontal Positioning)
40
STP Pump with Eyebolts
42
Configuration of the STP Pump
43
Control Unit (Front Panel)
43
- Pump Functions
  43
Name and Function of each Part
43
Name and Function of the Pump
43
Name and Function of the Control Unit
44
- Control Unit Front Panel Functions
  46
- Control Unit Front Panel Functions (Continued)
  47
Installation of the STP Pump to the Vacuum Equipment
48
How to Install the STP Pump
48
Cleaning the Seal
49
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
50
STP Pump Installation Positions
50
Secure the STP Pump
51
- Tightening Torque of Bolt
  51
- Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
  52
Screw Holes for Securing the Base
56
Legs for Securing the Base
56
Power Cable
57
How to Connect the Power Cable
59
Precautions of Vacuum Piping
61
Vacuum Piping Method
62
Height of Purge Port
63
Positions of the Cooling Water Port
64
Connecting the Water Cooling Pipe
64
Attaching a Baking Heater
65
Connecting to Semiconductor Equipment
66
Connecting to Power
66
Emergency off Circuit (EMO Circuit)
66
Operation
67
Gas Pumping, Cooling and Baking the STP Pump
67
Gas Pumping
67
How to Introduce a Purge Gas
68
Cooling the STP Pump
68
Water-Cooling Method
68
Baking the STP Pump
69
Before Starting the STP Pump
70
Confirmation before Starting
70
Confirmation of Vacuum System
70
Powering on
71
Pump Operation
71
Input Operation Port Setting
71
Starting/Stopping the STP Pump
72
Pump Operation Method
72
- Starting/Stopping the STP Pump (X2 REMOTE)
  72
How to Start/Stop the STP Pump
73
Starting the STP Pump after Stopping
73
Starting the STP Pump after a Safety Function Operates
73
Powering off
73
- Reset Operation (X2 REMOTE)
  73
Led
74
X2 REMOTE Connector
75
- X2 REMOTE Input Signal Pins
  76
Parallel Port Input/Output Signal
75
Input Signal Pins
75
X2 REMOTE Input Signal Pins (Contact Input)
77
Input Operation Port Setting
78
Second Speed Option
79
- Second Speed Function
  79
Output Signal Pins
80
- X2 REMOTE Output Signal Pins
  81
X2 REMOTE Output Signal Pins
82
Serial Communication Protocol
85
Introduction
85
Connection and Setting up
86
Signal Connection
86
- X3 Pin Position
  86
Connecting the RS485
88
Communication Parameter Setting
89
- Communication Parameters
  89
Serial Port
90
- Input Operation Port
  90
Input Operation Port Setting
90
Serial Communication Timeout Setting
91
- Serial Communication Time out Setting
  91
Grounding Example (both Ends Grounding)
92
Grounding Example (Single Point Grounding)
92
Recommended Items about Communication Cable Installation
92
Protocol Specifications
95
General Description
95
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
96
- (In the RS232/RS485 Single Point Connection)
  97
Query Command
98
- (In the RS232/RS485 Single Point Connection)
  98
Transmission Data Format
99
Frame Control (Checksum)
100
Error Control
100
Transmission Frame in the RS485 Multi-Point Connection
100
Control Command in the RS485 Multi-Point Connection
102
5.3.10 Query Command in the RS485 Multi-Point Connection
103
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection
104
- Pump Operation Commands
  104
5.3.12 Application Note
105
Example of Answer Resending Process
106
Example of Command Sending During Answer Data Reply
106
Command Specifications
109
Command List
109
Readmeas
110
Command
110
Readfailmess
111
- Pump Operation Commands
  111
- Error Message Values
  113
- Error Message Values (Continued)
  114
Readmodfonct
115
- Pump Operation Mode
  116
Readversion
117
Readcounters
118
Readsetpoint
119
Readmotortemp
119
5.4.10 Readstatus
120
5.4.11 Readevents
121
- Remote Mode
  121
5.4.12 Setspeedsetpoint
122
5.4.13 Readspeedsetpoint
123
5.4.14 Readmodfonctwithwarning
124
5.4.15 Readmeasvalue
127
5.4.16 Readoptionfunc
129
5.4.17 Setoptionfunc
132
5.4.18 Readcondition
134
5.4.19 Readeventswithtime
136
5.4.20 Setoptions
140
Second Speed Option Setting
140
- Option Function Number and Parameter List
  140
Second Speed Selection
141
5.4.21 Readoptions
142
Second Speed Function Setting
142
Second Speed Select
143
Stp-Link and Display Unit
145
STP-Link
145
Display Unit
146
Safety Functions
147
Power Failure
147
Operation after a Power Recovery
148
- States of Leds and X2 REMOTE Output Signals at Power Failure
  148
Abnormal State of Magnetic Bearing (Disturbance)
149
Excessive Vibration (Disturbance)
149
Motor Driver Overload (DRV Overload)
149
Overheating Inside the STP Pump (MOTOR Overheat)
149
Overheating Inside the Control Unit (CNT Overheat)
149
Overspeed
150
WARNING" Function
150
- WARNING Function
  150
Contents of WARNING Function
152
First Damage Limit
152
Second Damage Limit
152
Pump Run Time over
152
Pump Overload
153
Imbalance
153
Other Warning
153
WARNING Function Setting
154
- Default Setting of WARNING Function
  154
- Factory Setting and Variable Range
  154
Troubleshooting Immediately after Failure Occurs
155
After Power Failure
155
After Other Abnormality/Error
155
Troubleshooting
156
Indication of "FAILURE" LED (Red)
156
Indication of "FAILURE" LED (Green)
162
No Indication of the "FAILURE" LED
162
Maintenance and Inspection
163
Cleaning
164
Inspecting the Deposit
164
Maintenance
165
Recommended Overhaul Intervals
165
Standard Replacement Parts
165
Recommended Maintenance Intervals for Main Parts
166
Transporting for Repair or Overhaul
167
Storage and Disposal
169
Storage of the STP Pump
169
Disposal
170
Service, Spares and Accessories
171
Introduction
171
Service
171
Spares
171
Accessories
172

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Edwards STP-iS1607S Instruction Manual (173 pages)

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