Purge Gas Specification; Water Cooling - Edwards nEXT730D Instruction Manual

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4.6 Purge gas specification

Table 8 Purge gas specification
Purge gas specification
Purge gas
Maximum dew point at atmospheric pres-
sure
Maximum size of particulates
Maximum concentration of oil
Allowable purge gas flow (when required) 20 to 50 sccm (0.33 to 0.84 mbar l s
Recommended purge gas flow
Maximum allowable purge gas supply
pressure

4.7 Water cooling

Table 9 Water cooling block supply requirements
Parameter
Quality
pH value
Maximum calcium carbonate concentra-
tion
Maximum chloride concentration
Minimum oxygen concentration
Minimum water‑cooling flow rate (at
15 °C)
Water temperature range
Maximum water pressure
Materials exposed to cooling water
B8J200880_D
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B8J200880_D - Technical data
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Reference data
Dry air, nitrogen, argon or other inert
gases
-22 °C
1 µm
0.1 parts per million
-1
33 to 84 Pa l s )
-1
25 sccm (0.42 mbar l s
1 bar (gauge); 14.5 psig, 2 x 10
Reference data
Mechanically and optically clear with no
deposits or turbidity
6.0 to 8.0
75 parts per million
100 parts per million
4 parts per million
-1
15 l hr
10 °C to 40 °C
5 bar (gauge), 72.5 psig, 5 x 10
Brass and nickel plated brass
08/2021 - ©Edwards Limited
-1
or
-1
, 42 Pa l s )
5
Pa
5
Pa gauge