Edwards EXT70 Series Manuals

Manuals and User Guides for Edwards EXT70 Series. We have 2 Edwards EXT70 Series manuals available for free PDF download: Instruction Manual

Edwards EXT70 Series Instruction Manual (70 pages)

EXT Pump Accessories

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents
3
Introduction

7
BX Bakeout Band

13
- Description
  13
- Technical Data
  13
- Installation
  14
- Unpack and Inspect
  14
- Fit the BX Bakeout Band to the Pump
  14
- Electrical Connection to an EXC Controller
  14
- Electrical Connection to a TIC Relay Box
  14
- Electrical Connection to an Independent Electrical Supply
  14
- Operation
  15
ACX Air-Cooler

17
TAV Vent-Valve

39
- Description
  39
- Technical Data
  39
- Installation
  40
- Unpack and Inspect
  40
- TAV Vent-Valve Dimensions (MM)
  40
- Fit the TAV Vent-Valve to the Pump
  41
- Electrical Connection
  41
- Operation
  41
- TAV Vent-Valve Connections
  42
Vibration Isolator

43
- Description
  43
- Technical Data
  43
- Installation
  44
- Unpack and Inspect
  44
- Fit the Vibration Isolator
  44
- Vibration Isolator Installation
  45
Inlet Screens

47
- Description
  47
- Technical Data
  47
- Installation
  47
- Unpack and Inspect
  47
- Fit or Remove the Inlet-Screen
  48
- ISX Inlet-Screen
  48
- ISDX Inlet-Screen
  48
- ISHX Inlet-Screen
  49
PRX10 Purge-Restrictor

51
- Description
  51
- Technical Data
  51
- Installation
  51
- Unpack and Inspect
  51
- Fit the Purge-Restrictor
  52
- Operation
  52
- General
  52
- Calibration of the PRX10 for Different Purge Gases
  52
Pump-To-Controller Cable

55
- Description
  55
- Technical Data
  55
- Installation
  55
- Unpack and Inspect
  55
- Connect the Pump-To-Controller Cable
  55
Vent-Port Adaptor

57
- Description
  57
- Technical Data
  59
- Installation
  59
- Unpack and Inspect
  59
- Connect the Vent-Port Adaptor
  59
- Vent-Port Adaptor
  59
- Extended Vent-Port Adaptor
  59
VRX Vent - Restrictor

61
- VRX Vent-Restrictor
  61
- Description
  61
- Technical Data
  61
- Installation
  61
- Unpack and Inspect
  61
- VRX Vent-Restrictor Selection
  61
- Fit the Vent-Restrictor
  62
WCX Water-Cooler

63
- Description
  63
- Technical Data
  63
- Installation
  63
- Unpack and Inspect
  63
- WCX555 Water-Cooler Dimensions (MM)
  64
- WCX555 Water-Cooler Installation
  65
- Fit the Water-Cooler to the Pump
  66
- Operation
  66
Maintenance

67
Storage and Disposal

69
- Storage
  69
- Disposal
  69

Edwards EXT70 Series Instruction Manual (42 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents
3
Introduction

7
Technical Data

13
Installation

21
- Unpack and Inspect
  21
- Typical Installation
  21
- Typical Pumping System
  22
- Connect to the Vacuum System
  23
- Inlet-Screen
  23
- Mechanical Fixing
  23
- Correct Installation of the Inlet-Screen
  23
- Base Mounting
  24
- Inlet Connection and Orientation
  24
- Backing Connection
  25
- Vent-Valve Connection and Control
  25
- Purge Gas Connection (EXT250 Only)
  26
- Connect the Purge Gas
  26
- Recommended Purge Gas Flow
  26
- Electrical Installation
  26
- Cooling
  26
- Cooling Methods
  27
- Forced-Air Cooling
  27
- Water-Cooling
  27
Operation

29
- Start-Up
  29
- Stand-By
  29
- Shut-Down
  30
- Safety Interlocks and Control System
  30
- Bakeout
  30
Maintenance

31
- Introduction
  31
- Bearing Life
  31
- Rotor Life
  31
- Clean the Pump
  31
- Fault Finding
  32
Storage and Disposal

35
- Storage
  35
- Disposal
  35
Service, Spares and Accessories

37
- Introduction
  37
- Service
  37
- Spares
  37
- ISX Inlet-Screen
  37
- WCX Water-Cooler
  37
- Inlet-Flange Seals
  38
- Accessories
  38
- Installation
  38
- EXC Controller
  38
- Pump-To-Controller Cable
  38
- Installation of Optional Accessories (and Spares)
  39
- BX Bakeout Band
  40
- FL20K Foreline Trap
  40
- TAV Vent Valve and Vent-Port Adaptor
  40
- ACX Air-Cooler
  40
- Vibration Isolators
  41
- PRX Purge Restrictor
  41
- VRX Vent-Restrictor
  41

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More Edwards Manuals

Edwards EXT70 Series Manuals

Edwards EXT70 Series Instruction Manual (70 pages)

Table of Contents

Introduction

BX Bakeout Band

ACX Air-Cooler

TAV Vent-Valve

Vibration Isolator

Inlet Screens

PRX10 Purge-Restrictor

Pump-To-Controller Cable

Vent-Port Adaptor

VRX Vent - Restrictor

WCX Water-Cooler

Maintenance

Storage and Disposal

Edwards EXT70 Series Instruction Manual (42 pages)

Table of Contents

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Service, Spares and Accessories

Related Products

Edwards Categories