Figure 9 Cooling Requirements For Next730D/930D - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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Figure 9 Cooling requirements for nEXT730D/930D

nEXT 730D and 930D - for Nitrogen
14.0
12.0
10.0
8.0
6.0
4.0
2.0
0.0
0.6
0.0
nEXT 730D and 930D - for Argon
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0.0
0.5
0.0
Water cooling 15 °C, 100 l/h
Water cooling 35 °C, 50 l/h
Convection, ambient temperature 24 °C
B8J200880_D
300812671_002_C3
B8J200880_D - Technical data
1.5
3.0
4.5
6.0
7.5
Pressure in mbar
1.2
2.7
4.2
5.7
7.2
Pressure in mbar
Page 33
9.0
10.5
12.0
13.5
15.0
8.7
10.2
11.7
13.2
14.7
Air cooling, ambient temperature 24°C
Air cooling, ambient temperature 40°C
08/2021 - ©Edwards Limited
16.5 18.0
16.2 17.7

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