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Edwards nEXT nEXT85 Instruction Manual

Turbomolecular pumps
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INSTRUCTION MANUAL
B8G000880_D
Original instructions

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  • Page 1 edwardsvacuum.com nEXT Turbomolecular pumps nEXT85 INSTRUCTION MANUAL B8G000880_D Original instructions...
  • Page 2 Vacuum pump and vacuum system safety P40040100 Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
  • Page 3 CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW The following product nEXT85 B 8G b - ccc - dd Configuration Variant Pump type c c c 1, A, B, C 0 - 9 Alpha - numeric...
  • Page 4 Additional Legislation and Compliance Information EU EMC Directive: Class A/B equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. EU RoHS Directive: Material Exemption Information This product is compliant with the following Annex III Exemptions: 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight •...
  • Page 5 材料成分声明 China Material Content Declaration 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 Aluminium alloys 铜管管件 Brass pipe fitting 铜接头 Brass connectors (PCA) 印刷电路组件...
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  • Page 7: Table Of Contents

    Contents 1. Safety and compliance........8 1.1 Definition of Warnings and Cautions.
  • Page 8 4.2.2 Mount the pump......... . 38 4.2.3 Backing port connection.
  • Page 9 6.2.1 Manual vent valve......... 68 6.2.2 TAV5 solenoid vent valve.
  • Page 10 8.5 The green Normal LED does not light or the pump does not rotate at full speed or the pump fails while in operation....... 87 8.6 Ultimate pressure cannot be reached.
  • Page 11 List of Figures Figure 1: Dimensions - nEXT85 ISO63......... . . 18 Figure 2: Dimensions - nEXT85 CF63.
  • Page 12 This page has been intentionally left blank.

  • Page 13: Safety And Compliance

    B8G000880_D - Safety and compliance 1. Safety and compliance 1.1 Definition of Warnings and Cautions NOTICE: This manual meets our obligation to provide you with information. For safe operation from the start, read these instructions carefully before you install or commission the equipment.
  • Page 14 B8G000880_D - Safety and compliance Warning/Caution A safety instruction which must be followed. Warning - Dangerous voltage Identifies possible hazards from dangerous voltages. Warning - Hot surfaces Identifies a potential hazard from a hot surface. Warning - Protective earth (ground) The equipment must be grounded.

  • Page 15: Introduction

    B8G000880_D - Introduction 2. Introduction 2.1 Overview WARNING: SAFE EQUIPMENT USE Risk of injury or damage to equipment. Improper use of the equipment could cause damage to it or injury to people. The user is responsible for the safe operation, installation and monitoring of the system.

  • Page 16: Motor Controller

    B8G000880_D - Introduction adapter and purge restrictor to the purge port to control the flow rate of the purge gas and to filter the gas supply. This can be used to optimise the performance of the pump, for example with low molecular mass gases. Refer to Accessories on page 101.

  • Page 17: Operational Features

    B8G000880_D - Introduction electrical supply to the controller, the vent valve or the fan attached to the controller connector until the pump speed decreases below 50% of the full rotational speed to make sure that the vent valve stay shut until below 50% of the full rotational speed and prevent the pump from venting at full speed.

  • Page 18: Analogue Output

    B8G000880_D - Introduction immediately when the rotational speed of the pump decreases below 50% of the full speed. If the rotational speed of the pump increases above 50% during the timeout period, the timer will reset. If the rotational speed of the pump does not recover by the end of the timeout period, the motor controller will trigger a fail condition and decelerate the pump to rest.

  • Page 19: Normal Speed Setting

    B8G000880_D - Introduction There is also a feature that allows a delayed start of the pump. With this feature, the vent valve can be closed before starting the pump. This allows the backing pump to decrease the pressure in the vacuum system before starting the pump. With a ‘Y’...

  • Page 20: Usb Interface

    B8G000880_D - Introduction Analogue output: Gives a 0 ‑ 10 V output for a number of pump parameters. ▪ The logic interface supports the serial control and the parallel control to monitor and control through one connector. For serial control, RS232 (default) or RS485 can be selected using the RS485 / RS232 slide switch which is given on the motor controller.

  • Page 21: Serial Control With Parallel Monitoring

    B8G000880_D - Introduction compatible interface by setting the position of the RS485 / RS232 slide switch. Refer to Connection for serial control and monitoring on page The serial enable signal must be linked to 0 V for the system to accept commands from the serial link.
  • Page 22 B8G000880_D - Introduction operation of the pump as per the application and the pump can be operated using a simple parallel interface system. To configure the nEXT pump, use a customer simple serial system through the serial link, or use manufacturer's TIC Turbo Controller, TIC Turbo Instrument Controller or TAG Controller.

  • Page 23: Technical Data

    B8G000880_D - Technical data 3. Technical data 3.1 General technical data Table 1 General technical data General items Reference data Refer to Figure: Dimensions - nEXT85 ISO63 on page Figure: Dimensions - nEXT85 Dimensions CF63 on page Figure: Dimensions - nEXT85 ISO100 on page 19 Figure: Dimensions - nEXT85 DN40 on page...

  • Page 24: Figure 2 Dimensions - Next85 Cf63

    B8G000880_D - Technical data Figure 2 Dimensions - nEXT85 CF63 All measurements shown are in mm (inches) Figure 3 Dimensions - nEXT85 ISO100 All measurements shown are in mm (inches) Figure 4 Dimensions - nEXT85 DN40 All measurements shown are in mm (inches) Page 19...

  • Page 25: Operating And Storage Conditions

    B8G000880_D - Technical data Figure 5 Typical base view 1. Body purge port 1/8” BSP 1. Body purge port 1/8” BSP 2. Envelope vent port 1/8” BSP 2. Envelope vent port 1/8” BSP 3. Alternative backing port position 3. Alternative backing port position 4.

  • Page 26: Purge Gas Specification

    B8G000880_D - Technical data Vent gas specification and control Reference data Maximum dew point at an atmospheric -22 °C pressure Maximum size of particulates 1 µm Maximum concentration of oil 0.1 parts per million Recommended time for the rotational > 15 seconds speed to reach 50% Refer to Figure: Maximum allowed rate...

  • Page 27: Cooling Water

    B8G000880_D - Technical data Purge gas specification Reference data Maximum permitted supply pressure of 1 bar (gauge), 14.5 psig, 2 x 10 the purge gas 3.5 Cooling water Table 5 Water cooling block supply requirements Parameter Reference data Quality Mechanically and optically clear with no deposits or turbidity pH value 6.0 to 8.0...

  • Page 28: Pumping Media

    B8G000880_D - Technical data power supply setting. If serial communication is available, the power limit setting of the pump can be selected. Refer to Table: Logic interface technical data on page 25 for the maximum power limit settings for the pumps. If the rapid cycling of the pump is necessary for an application, you can get faster rate of increase in the pump speed if the power supply supplies higher current, up to a maximum in accordance with Table: Logic interface technical data on...

  • Page 29: Materials Exposed To Gases Pumped

    B8G000880_D - Technical data CAUTION: OXYGEN CONTENT IN GASES Risk of damage to equipment. Do not use the pump to pump gases that contains more than 20% oxygen. This can cause the lubricant to polymerise and the pump can fail. Note: Concentrations of gases can be changed by the compression of the pump.

  • Page 30: Logic Interface Connector

    B8G000880_D - Technical data 3.9 Logic interface connector The pump has a 15‑way logic interface connector at the end of the logic interface cable. Use an applicable connector mating half (not supplied) to connect the nEXT pump to the customer equipment. Refer to the table that follows for the connector mating half type. Table 6 Logic interface technical data Logic interface item 15‑way D‑type male...
  • Page 31 B8G000880_D - Technical data Logic interface item Type Open collector transistor plus pull up resistor. Refer to Figure: Interface circuits for nEXT turbo pump controllers on page < Normal speed (default 80%) Off (2.2 kW pull up to 12 V d.c.) ³...

  • Page 32: Figure 8 Interface Circuits For Next Turbo Pump Controllers

    B8G000880_D - Technical data Signal Polarity Use Number ‑ Chassis / Screen Screen Chassis / Screen Logic low when the rotational speed of NORMAL status output the pump is at normal speed or above the normal speed 8, 13, 14 Electrical supply: 0 V 1, 6, 11 Electrical supply: 24 V -...

  • Page 33: Motor Controller Auxiliary Connector Socket

    B8G000880_D - Technical data 3.10 Motor controller auxiliary connector socket The pump has a 4-way auxiliary connector socket at the side of the motor controller. The mating plug for the connector is pre-installed to a number of accessories or available as an accessory. Refer to Accessories on page 101.

  • Page 34: Indicator Leds

    B8G000880_D - Technical data Figure 9 Valve connector Pin number Signal Polarity 0V return Negative Aux output 1 Positive Aux output 2 Positive Chassis Chassis 3.11 Indicator LEDs The pump has five indicator LEDs. Refer to Figure: Motor controller status information on page Table 9 Indicator LEDs Description...

  • Page 35: Pump Performance Data

    B8G000880_D - Technical data Note: If an external electrical load is connected to the Normal output line, the normal LED can come on. 3.12 Pump performance data Table 10 Pump performance data Parameter nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H nEXT85D nEXT85H Mass 3.0 Kg 3.0 Kg...

  • Page 36: Figure 10 Next85 Pumping Speed Versus Inlet Pressure Performance Graph

    B8G000880_D - Technical data Figure 10 nEXT85 pumping speed versus inlet pressure performance graph Figure 11 nEXT85 compression ratio versus backing pressure graph Table 11 Maximum transient backing pressure at zero inlet flow Parameter nEXT85D nEXT85H 19 mbar 21 mbar 19 mbar 21 mbar 30 mbar...
  • Page 37 B8G000880_D - Technical data Table 12 Maximum continuous backing pressure nEXT85D at zero inlet flow Gas Type: N Ambient Temperature Cooling method 20 ᵒC 30 ᵒC 40 ᵒC Backing Pressure (mbar) Natural convection Force air cooling 11.5 Water cooling Cooling water temperature of 15 ᵒC at a flow rate of 15 l hr Values for maximum continuous backing pressure are taken under no inlet gas flow conditions, at sea level, in negligible magnetic field, with 120 W power limit setting.
  • Page 38 B8G000880_D - Technical data Table 14 Maximum continuous inlet pressure/throughput nEXT85D - Helium Gas Type: He Ambient Temperature 20 ᵒC 30 ᵒC 40 ᵒC Cooling Throughput Inlet Throughput Inlet Throughput Inlet Pressure method (sccm) Pressure (sccm) Pressure (sccm) (mbar) (mbar) (mbar) Natural 3.50E-02...
  • Page 39 B8G000880_D - Technical data Parameter Value Operation attitude Vertical and upright to horizontal ± 2° Normal rotational speed 90,000 revolutions per minute Starting Time to 90% Speed (80 W) 130 seconds Starting Time to 90% Speed (120 W) 90 seconds Sound pressure level, at ultimate vacuum 34 dB(A) + 2.5 declared dual number noise measured at 1 m from the pump to...

  • Page 40: Installation

    B8G000880_D - Installation 4. Installation 4.1 Unpack and inspect The pump is supplied in a cardboard box and the lifting equipment is not necessary. WARNING: HEAVY OBJECT Risk of injury or damage to the equipment. Take necessary precaution when you lift and move the pump to prevent injury.

  • Page 41: Figure 12 Typical Pumping System With A Next Pump

    B8G000880_D - Installation Quantity Description Check ( ü ) Integral mesh centring ring O-ring seal (ISO variants only. ❏ Screen will be installed to CF pumps.) Figure 12 Typical pumping system with a nEXT pump 1. Vacuum system 1. Vacuum system 2.

  • Page 42: Connect To The Vacuum System

    B8G000880_D - Installation 4.2 Connect to the vacuum system WARNING: INSTALLATION SEQUENCE Risk of injury. Install the pump in the vacuum system before you connect the motor controller to the power supply so the pump cannot operate. WARNING: TRIP HAZARD Risk of injury and damage to equipment.

  • Page 43: Mount The Pump

    To mount the pump (base mount), use 4 x M5 bolts (Class 12.9) with 8 mm thread engagement. ▪ To mount the pump (flange mount), use 4 x Edwards Hooded Claw Clamps (C10007090) and tightened to 10 Nm. Base mounting The base of the pump can be fixed to a firm support using the tapped fixing holes.
  • Page 44 B8G000880_D - Installation CAUTION: PUMP ORIENTATION Risk of damage to equipment. The pump must be orientated only in a horizontal or vertical position. Incorrect orientation can cause failure of the pump. When you store the pump, the pump body has to be horizontally in line with or below the main inlet flange of the pump.

  • Page 45: Backing Port Connection

    B8G000880_D - Installation Figure 13 Allowable pump orientation 4.2.3 Backing port connection The pump is applicable to use with our rotary vane, scroll or diaphragm backing pumps. System performance can change with the type of pump used. Contact us to select an applicable backing pump for the application.

  • Page 46: Interstage Connection

    B8G000880_D - Installation Use applicable vacuum tubing and connectors to connect the NW25 flange of the backing port to the backing pump. If necessary, use flexible pipe or bellows to decrease the transmission of the vibration from the backing pump to the pump. 4.2.4 Interstage connection An interstage connection is only possible using an 'i' nEXT pump to back the other pump.

  • Page 47: Ground The Connections

    B8G000880_D - Installation You can operate the pump using the manufacturer's TIC Turbo Instrument Controller, TIC Turbo Controller, TAG Controller or by the customer supply and controlled using the customer system. Refer to Connect the logic interface to the control equipment on page for information about control.

  • Page 48: Connect The Parallel Control And Monitoring

    B8G000880_D - Installation Connect the electrical supply WARNING: POWER SUPPLY Risk of electric shock or damage to equipment. A separate power supply (not included) is necessary for the product. The power supply has to be protected against a hazardous live condition (for example, a short circuit). WARNING: EMERGENCY STOP SWITCH Risk of injury or damage to equipment.
  • Page 49 B8G000880_D - Installation CAUTION: BACK EMF SUPPRESSION DIODE Risk of damage to equipment. If the normal and fail lines are used to drive the coils of the d.c. relays, install a back EMF suppression diode in parallel with each relay coil to protect the pump.

  • Page 50: Connection For Serial Control And Monitoring

    B8G000880_D - Installation Figure 14 Logic interface connections - parallel control 1. 24 - 48 V d.c. electrical supply 1. 24 - 48 V d.c. electrical supply 2. Fuse 2. Fuse 3. Optional indicator - normal speed 3. Optional indicator - normal speed 4.

  • Page 51: Figure 15 Motor Controller Status Information

    B8G000880_D - Installation The software in the pump can operate with the other pumps connected to a single serial link master. This is a multi-drop mode. The RS485 option is recommended for the multi- drop mode. When the RS232 option is selected, more hardware is necessary to link number of pump units to a single serial link master.

  • Page 52: Serial Enable

    B8G000880_D - Installation Figure 17 Logic interface connections - RS485 serial control 2. 24 ‑ 48 V d.c. electrical supply 2. 24 ‑ 48 V d.c. electrical supply 1. RS485 interface on control equipment 1. RS485 interface on control equipment 3.

  • Page 53: Command Set

    B8G000880_D - Installation Refer to Multi-drop operation on page 52 for more information about how to operate the pump in a multi‑drop mode. 4.6.4 Command set Table 18 Summary of commands that can be sent to the pump Object name Comments Command Parameter Factory...
  • Page 54 B8G000880_D - Installation Object name Comments Command Parameter Factory Data type Units range setting Pump run ?V862 0..65535 decimal hours Hours run by pump hours Temperature ?V865 -200..200 decimal °C Measured motor readings 2 temperature -200..200 decimal °C Measured motor controller temperature -200..200 decimal...
  • Page 55 B8G000880_D - Installation Object name Comments Command Parameter Factory Data type Units range setting Close vent !C875 decimal Closes the vent valve for valve delayed start and overrides the current vent option. There is no open vent valve command but the stop command (!C852 0) will clear the override.
  • Page 56 B8G000880_D - Installation Object name Comments Command Parameter Factory Data type Units range setting Vent options 1 !S853 decimal Hard vent when < 50% speed if stop or fail ?S853 Controlled vent if > 50% speed then hard vent if <...

  • Page 57: Multi-Drop Operation

    B8G000880_D - Installation Object name Comments Command Parameter Factory Data type Units range setting Vent options 2 !864 decimal Hard vent when < 50% speed if stop or fail ?864 Controlled vent if > 50% speed then hard vent if < 50% speed if stop or fail If stop, hard vent If fail, hard vent when...

  • Page 58: Figure 18 Conceptual Diagram For Multi-Drop Connection Using Rs232 Interface

    B8G000880_D - Installation All multi‑drop commands, queries or replies have the first character as #. ▪ ▪ All commands, queries and replies have a header that has: ▪ the address of the node that the message is to ▪ the address of the node that the message is from ▪...

  • Page 59: Connection For Mixed Parallel And Serial Operation

    B8G000880_D - Installation Figure 19 RS485 multi-drop connection 1. RS485 interface on control equipment 1. RS485 interface on control equipment 2. nEXT pump logic interface 2. nEXT pump logic interface 4.7 Connection for mixed parallel and serial operation You can use the parallel interface control inputs to control the pump. At the same time you can use the serial interface or the USB service port (using the manufacturer's nST PC software) to monitor different pump parameters.

  • Page 60: Cooling

    B8G000880_D - Installation stop command has been received by the pump can any commands sent through the parallel interface be acted on. If you use the start switch on the parallel interface to start the pump, you cannot stop the pump by sending a stop command over the serial interface. To stop the pump, use the parallel stop switch.

  • Page 61: Forced Air Cooling

    B8G000880_D - Installation Note: During operation, if the temperature of the surface of the pump is higher than 60 °C, you have to increase the cooling. If you do not sufficiently cool the pump and motor controller, it will affect the performance of the pump. We recommend to cool the pump by forced air-cooling or water-cooling, when possible.
  • Page 62 B8G000880_D - Installation CAUTION: CONDENSATION IN PUMP Risk of damage to equipment. Condensation can occur if you use a water-cooling block in a high humidity environment. Protect the pump and other equipment by considering the design of the installation. Pipes in the water-cooling circuit can get blocked if the cooling water has too much calcium carbonate or large particles.

  • Page 63: Configuration

    B8G000880_D - Configuration 5. Configuration Before you operate the pump, configure the motor controller settings that are applicable for the application. If the system is designed to operate with parallel control and monitoring, you cannot change the motor controller settings when the pump is installed on the system. The pump is supplied with the settings at factory default values, as shown in Table: Summary of commands that can be sent to the pump on page...

  • Page 64: Command And Reply Table Definitions

    B8G000880_D - Configuration The message protocol in multi‑drop mode is different. Refer to Multi-drop operation on page 5.1.2 Command and reply table definitions Explanation of the command and reply characters. Table 20 Command abbreviations Meaning Abbreviation Carriage return character chars Characters Decimal ASCII character Hexadecimal ASCII character...

  • Page 65: Power Supply To The Fan From The Motor Controller

    B8G000880_D - Configuration Table 21 Power limit setting Maximum value setting Minimum value setting Default power setting 120 W 50 W 80 W Send the command as follows (the 'd' characters shows the value in Watts that will be set. For example, to set the limit to 90 W, type 90). Command The reply is as follows: Reply...

  • Page 66: Standby Speed Setting

    B8G000880_D - Configuration Command The reply is as follows: Reply The venting option is now stored in the memory of the pump. To check what venting option is set, send a query that follows: Command The reply is as follows: Reply To set the valve type on auxiliary output 1, send the command that follows (character 'd' refers to the option number shown in...

  • Page 67: Normal Speed Setting

    B8G000880_D - Configuration To check what Standby Speed is set, send a query as follow: Command The reply is as follows: Reply 5.1.7 Normal speed setting The normal speed is a user-configurable setting and can be set to the value between 50% and 100% full rotational speed.

  • Page 68: Analogue Signal Options

    B8G000880_D - Configuration The timer is permanently enabled during ramp‑up. However, it is optional to have the timer enabled at other times. When the pump is shipped, the Timer is enabled by default. To disable the timer, send the serial command that follows: Command The reply will be as follows: Reply...

  • Page 69: Electronic Braking Options

    B8G000880_D - Configuration The reply will be as follows: Reply 5.1.10 Electronic braking options Refer to Electronic braking on page 14 for a full description of the electronic braking feature. To enable Electronic Braking, send the serial command that follows: Command The reply will be as follows: Reply...

  • Page 70: Configure The Pump Using A Tic

    B8G000880_D - Configuration Command Note: The address can be a decimal number from 1 to 98. The address number 0 is used to ‑ drop mode. The address number 99 is reserved as a wild card and is used in disable multi the query set up detailed later.
  • Page 71 B8G000880_D - Configuration ▪ Normal speed setting ▪ Timer settings - to enable and disable the timer, setting the time‑out period ▪ Electronic braking options ▪ Factory default settings Refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals for information on how to do the settings.

  • Page 72: Operation

    B8G000880_D - Operation 6. Operation 6.1 Before starting the pump Before you start the pump: ▪ close the vent valve ▪ make sure that the pre-start sequence is completed. 6.1.1 Close the vent valve You can manually close the vent valve by using the customer control system or TAV5 solenoid valve.

  • Page 73: Vent Options, Vent Valve Connection And Control

    B8G000880_D - Operation Refer to Fault finding on page 86 ▪ LEDs do not illuminate ▪ Red or yellow LEDs flash in a repeated sequence ▪ Red LED is illuminated. 6.2 Vent options, vent valve connection and control Note: If manually venting the pump when it is at full rotational speed and the rate of increase in pressure is too high, the pump life can decrease.

  • Page 74: Vent Valve Control

    B8G000880_D - Operation applicable orifice size to be installed to the vent valve. Make sure that the rate of increase in pressure is in the limits shown in Vent gas specification and vent control data on page Note: If a vent restrictor is used, the time necessary to vent the vacuum system can be long. To decrease the time: - use vent valve without a vent restrictor.
  • Page 75 B8G000880_D - Operation Option Description of vent function number In a fail condition, vent valve fully opens. If a stop command is received, vent valve opens fully below 50% full rotational speed. In a fail condition, vent valve fully opens. If a stop command is received, controlled venting from 100% to 50% full rotational speed and then vent valve opens fully below 50%.

  • Page 76: Alternative Valve Connected To The Vacuum System

    B8G000880_D - Operation If the pump is controlled with a manufacturer's TIC Turbo and Instrument Controller or TIC Turbo Controller, the TAV solenoid valve can be operated from the TIC. Refer to the TIC Instruction Manuals for more information. Figure 21 Auxiliary interface connection 1.

  • Page 77: Operation With Parallel Control And Monitoring

    B8G000880_D - Operation 6.3 Operation with parallel control and monitoring 6.3.1 Start the pump WARNING: EXPOSED ROTOR Risk of injury. Do not operate the pump with its rotor exposed. Connect the pump to the vacuum system before you operate the pump. If the pump is operated with its rotor exposed, the pump rotor can cause injury as it rotates at high speeds and the rotating blades are not visible.

  • Page 78: Parallel Monitoring

    B8G000880_D - Operation WARNING: EXPOSURE TO BACK E.M.F Risk of injury or damage to equipment. Do not remove the controller from the pump until the pump stops completely. The exposed electrical pins may pose a potential hazard. The user could also be exposed to a back e.m.f. from the pump and potentially damage the controller.

  • Page 79: Run The Pump At Standby Speed

    B8G000880_D - Operation WARNING: AUTOMATIC RESTART Risk of injury. When the power is restored after a power cut, the pump will restart automatically. Keep the pump connected to the vacuum system to prevent risk of injury. CAUTION: PUMP MOVEMENT Risk of damage to equipment. Do not move the pump when it is in operation. The gyroscopic forces generated by this movement can cause more use of the back up bearing and can result in catastrophic failure of the pump.

  • Page 80: Monitor Temperature Readings

    B8G000880_D - Operation Reply 6.4.5 Monitor temperature readings It is possible to monitor the following parameters: ▪ temperatures of the pump motor ▪ rotor ▪ internal electronics of the pump. Send the query that follows: Command The reply is as follows: Reply Here: ▪...

  • Page 81: Mixed Parallel And Serial Operation

    B8G000880_D - Operation Reply sp d Note: ‑ bit system status word (set of 8 hexadecimal The second return number is a 32 characters) which is useful for fault finding. Refer to Fault finding on page 6.5 Mixed parallel and serial operation In mixed parallel and serial operation the pump can receive commands from serial and parallel interfaces.

  • Page 82: Operation With A Tic Or Tag

    B8G000880_D - Operation ▪ RS485/RS232 switch is in RS232 position and ▪ parallel standby line is active. In serial control mode, the state of the parallel Start line will be ignored but the serial enable line gives an interlock function as shown in Figure: Serial and parallel control flowchart on page 77.

  • Page 83: Operation At Extreme Conditions

    B8G000880_D - Operation The system can be vented in accordance with the advice given in Vent options, vent valve connection and control on page CAUTION: RATE OF INCREASE IN PRESSURE Risk of damage to equipment. Do not open a manual vent valve until the pump rotational speed decreases below 50%, otherwise the rate of increase in pressure can be too high, which can damage the pump.

  • Page 84: Protection Against Over-Speed

    B8G000880_D - Operation below 50% of the full rotational speed. Refer to Table: Operating and storage conditions on page 20 for pump operating ranges. Refer to Cooling on page 55 for advice on pump cooling. 6.8.3 Protection against over-speed Control software in the motor controller controls the pump rotational speed and prevents the operation of the pump more than its normal full rotational speed.

  • Page 85: Bakeout

    B8G000880_D - Operation When the power is restored after a power failure, the behavior of the pump depends on the control mode at the time of failure (parallel or serial) and the duration of time the pump was without power. Refer to Table: Behaviour of a pump when the power is re- instated after an electrical supply failure on page 80 for number of scenarios.

  • Page 86: Shut Down The Pump Manually

    B8G000880_D - Operation WARNING: HOT SURFACE Risk of burn. Do not touch the flange heater or surrounding surfaces during the bakeout process as they will be hot. CAUTION: BAKEOUT PROCESS Risk of damage to equipment. Pumps with ISO flanges are not suitable for bakeout, only pumps with CF flanges must be used.

  • Page 87: Maintenance

    B8G000880_D - Maintenance 7. Maintenance WARNING: PERSONAL PROTECTIVE EQUIPMENT Risk of injury. Use personal protective equipment when you remove the pump to prevent injury from failed components and possible accumulation of hazardous materials. Check that the pump is vented to atmosphere at a safe temperature. Be careful of possible spillages, sharp edges and debris.

  • Page 88: Decoding Service Status Words

    B8G000880_D - Maintenance If the inner side of the pump is contaminated, it is possible you will not get the necessary ultimate vacuum performance or the pump-down times can increase. Return the pump to our service centre for cleaning. Refer to Return the equipment or components for service on page You can use the organic solvent to clean the external surface of the pump.

  • Page 89: Controller Run Time

    B8G000880_D - Maintenance Bit number Status flag Active flag means 8 - 31 Reserved 7.5 Controller run time The run hours and recommended service time of the controller on the pump can be monitored. Send the query that follows: Command The reply is as follows (where, first number is the hours run by the controller and second is the number of hours until the service is recommended): Reply...

  • Page 90: Bearing Run Time

    B8G000880_D - Maintenance 7.8 Bearing run time The run hours and recommended service time of the bearing in the pump can be monitored. Send the query that follows: Command The reply is as follows (where, first number is the hours run by the bearing and second is the number of hours until service is recommended): Reply sp d...

  • Page 91: Fault Finding

    B8G000880_D - Fault finding 8. Fault finding Table 28 Fault finding Symptom The controller LEDs do not flash for 0.5 seconds when the system is set to on on page 86 The pump does not rotate after a parallel start command is sent on page 86 The pump does not rotate after a serial start command is sent on page 86 The pump does not respond in multi- drop mode on page 86 The green Normal LED does not light or the pump does not rotate at full speed or the pump fails while...

  • Page 92: The Green Normal Led Does Not Light Or The Pump Does Not Rotate At Full Speed Or The Pump Fails While In Operation

    B8G000880_D - Fault finding Remedy Make sure the pump has a multi-drop address. Make sure that the commands are sent using the multi‑drop protocol. Fault The green Normal LED does not light or the pump does not rotate at full speed or the pump fails while in operation Cause The inlet pressure is too high.

  • Page 93: The Pump Is Very Noisy Or There Is Excessive Vibration Or Both

    B8G000880_D - Fault finding • Remove the pump from the system and test the ultimate pressure of the pump Remedy only. • Check the pump for contamination. Do the leak test of the pump. If the leak rate more than 1x10 mbar l s (1x10...

  • Page 94: Yellow Service Led Is Flashing A Repeated Sequence

    B8G000880_D - Fault finding Remedy Left for RS485, right for RS232. Right for parallel control and monitoring. Fault Yellow service LED is flashing a repeated sequence Cause A service is necessary. Remedy Refer to Flashing service codes on page Fault The red alarm LED is on Cause The red alarm LED is on is normal during the software upgrade process.

  • Page 95: Flashing Service Codes

    B8G000880_D - Fault finding 8.2 Flashing service codes When a service is necessary, the standard once per revolution flash on the yellow status LED is changed to a service flash code. Table 30 Flashing service codes Service flash Comments Actions code We recommend you to replace the oil LED on 1sec...

  • Page 96: Decoding System Status Words

    B8G000880_D - Fault finding Error flash Error flash Comments Actions position code Restart the system. If the error Overspeed or overcurrent trip is sssLss code is not cleared, contact us or activated, or other hardware fault the supplier. Pump internal measurement Restart the system.
  • Page 97 B8G000880_D - Fault finding Hexadecimal Binary Decimal 0110 0111 1000 1001 1010 1011 1100 1101 1110 1111 Each binary digit (bit) represents a flag that is active (state 1) or not active (state 0). To help decode the System Status Word, each bit is numbered (starting with 0 for the least significant to 31 for the most significant) as shown below.

  • Page 98: Service Information

    B8G000880_D - Fault finding Bit number Status flag Active flags means Pump internal temperature measurement Thermistor error system disconnected or damaged Serial enable has become inactive Serial control mode interlock following a serial Start command Table 34 The system status word used in the example above was taken when the pump is not in operation.
  • Page 99 B8G000880_D - Fault finding Reply String 1 String 2 ; String 3 cr Send the query that follows to find out the PIC software version: Command The reply is as follows (where, String 1 is the PIC software version number): Reply String 1 Page 94...

  • Page 100: Storage

    B8G000880_D - Storage 9. Storage If possible, do not store the pump for long-term. When long-term storage is necessary, the pump should be set up and operated for a minimum of eight hours every six months. To store the pump: Put protective covers over all ports, the main inlet, inter-stage exhaust, purge and vent ports.

  • Page 101: Disposal

    B8G000880_D - Disposal 10. Disposal WARNING: PERSONAL PROTECTIVE EQUIPMENT Risk of exposure to harmful substances. If the pump rotor fails, there can be some dust created from the rotary components in the pump touching each other. Use correct personal protective equipment when handling and disposing the pump. Make sure that all pump inlets and outlets are capped off before disposal.

  • Page 102: Service

    B8G000880_D - Service 11. Service Note: Our policy is to give support for product after obsolescence through various options including maintenance, repair, enhancement and replacement. Support will be available for some years after the product obsolescence and in compliance with applicable legislation.

  • Page 103: Bearing And Oil Cartridge On-Site Maintenance

    B8G000880_D - Service Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the procedure in HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to us. NOTICE: If we do not receive a completed HS2 form, your equipment cannot be serviced. 11.2 Bearing and oil cartridge on-site maintenance The oil cartridge and bearing of the pump can be serviced on‑site by a service engineer trained by us.

  • Page 104: Spares

    B8G000880_D - Spares 12. Spares CAUTION: SUPPLIED SPARES Risk of damage to equipment. If you use spares that are not supplied by us, it will decrease the reliability and performance of the pump. This will also invalidate the product warranty. 12.1 Inlet screen Inlet screens are installed to the pumps as supplied to prevent damage from the entry of debris into the pump.

  • Page 105: Nw16 And Nw25 Ports

    B8G000880_D - Spares 12.4 NW16 and NW25 ports The pumps are supplied with a NW16 backing port and a NW16 or NW25 interstage port. Table 41 NW16 and NW25 ports Port Item Number NW25 B80000809 NW16 B80000806 Page 100...

  • Page 106: Accessories

    B8G000880_D - Accessories 13. Accessories Figure 23 Accessories 1. TAV Solenoid vent-valve 1. TAV Solenoid vent-valve 2. Manual vent-valve (fitted) 2. Manual vent-valve (fitted) 3. nEXT85 water cooler 3. nEXT85 water cooler 4. ACX85 Radial air cooler 4. ACX85 Radial air cooler 5.

  • Page 107: Flange Heater

    B8G000880_D - Accessories Table 43 Water cooler Water Cooler Item Number nEXT85 water cooler B8G200833 13.3 Flange heater A flange heater increases the degassing of the pump to enable it to achieve lower pressures. It can also be used to protect the pump from condensation of contaminants. The flange heaters are available in 110 V and 240 V versions.

  • Page 108: Vent Port Adaptor

    B8G000880_D - Accessories Table 46 VRX vent restrictor Vent restrictor Orifice diameter (mm) Item number VRX10 B58066021 VRX20 B58066022 VRX30 B58066023 VRX50 B58066024 VRX70 B58066025 13.6 Vent port adaptor The vent port adaptor has a 1/8 inch BSP male thread that can be screwed in the vent port and purge port which makes them applicable for NW10 fittings.

  • Page 109: Auxiliary Connector

    B8G000880_D - Accessories ▪ data log the pump ▪ view service status ▪ reset service intervals ▪ upgrade the software embedded in the motor controller. The software is available for download from the manufacturer's website: www.upgrades.edwardsvacuum.com A free license is necessary to use the nST software. To get a free license: ▪...

  • Page 110: Auxiliary 'Y' Cable Adaptor

    B8G000880_D - Accessories 13.12 Auxiliary 'Y' cable adaptor The auxiliary 'Y' cable adaptor enables: ▪ a TAV5 vent valve and a cooling fan or ▪ two cooling fans or ▪ 2 TAV5 vent valves to be operated at the same time. The two sockets of the Y-cable are wired in parallel so an applicable connector can be used in the same way as the auxiliary connector on the pump.
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