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Summary of Contents for Edwards nEXT200200
- Page 1 Turbomolecular Pumps nEXT200200 INSTRUCTION MANUAL edwardsvacuum.com B85200880_D Original instructions...
- Page 2 Copyright notice ©Edwards Limited 2020. All rights reserved. Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
- Page 3 CE Declaration of Conformity Edwards Ltd Innovation Drive Burgess Hill West Sussex RH15 9TW The following products nEXT 200/200D B852 XXXXX nEXT 200/200T B853 XXXXX Is in conformity with the relevant requirements of European CE legislation: 2006/42/EC Machinery directive 2014/35/EU...
- Page 4 Additional Legislation and Compliance Information EU EMC Directive: Class A/B equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. EU RoHS Directive: Material Exemption Information This product is compliant with the following Annex III Exemptions: 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight •...
- Page 5 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 六价铬 多溴联苯 多溴二苯醚 Part name 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铸铝及铝合金制品 Aluminium alloys 铜管管件 Brass pipe fitting 铜接头...
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Page 7: Table Of Contents
Contents 1. Safety and compliance........8 1.1 Definition of Warnings and Cautions. - Page 8 4.3.3 Inlet connection and orientation......35 4.3.4 Base mounting......... . . 35 4.3.5 Backing port connection.
- Page 9 6. Operation..........64 6.1 Before starting the pump.
- Page 10 8.9 Fail signal or standby signal not working......79 8.10 Yellow service LED is flashing a repeated sequence....79 8.11 The red alarm LED is on.
- Page 11 Figure 1: nEXT200200 main inlet performance curve......19 Figure 2: nEXT200200 side inlet performance curve....... 19 Figure 3: nEXT 200200 NW25 interstage port pumping speed.
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Page 12: Safety And Compliance
B85200880_D - Safety and compliance 1. Safety and compliance 1.1 Definition of Warnings and Cautions NOTICE: This manual meets our obligation to provide you with information. For safe operation from the start, read these instructions carefully before you install or commission the equipment. -
Page 13: Trained Personnel
B85200880_D - Safety and compliance Warning/Caution A safety instruction which must be followed. Warning - Dangerous voltage Identifies possible hazards from dangerous voltages. Warning - Hot surfaces Identifies a potential hazard from a hot surface. Warning - Protective earth (ground) The equipment must be grounded. -
Page 14: Introduction
B85200880_D - Introduction 2. Introduction The units used in the manual conform to the SI international system of units of measurement where applicable US equivalent units of measurement are given. When flow rates are specified, the abbreviation 'sccm' is used to mean standard cubic centimetres per minute. -
Page 15: Pump Controller
B85200880_D - Introduction The nEXT pump is supplied with an inlet screen. The inlet screen is installed in the centering O‑ring. The nEXT pumps with NW25 interstage port is supplied with an inlet strainer. The inlet strainer is installed in the interstage port. The inlet screen and inlet strainer prevent the damage to the pump caused by debris entering the pump. -
Page 16: Operational Features
Table 1 Power limits Minimum value Pump Standard default setting Maximum value setting setting nEXT200200 160 W 200 W 50 W 2.3.2 Standby speed In standby mode, the pump rotational speed is lower than the full rotational speed. The default setting for standby speed is 70% of the full speed. -
Page 17: Analogue Output
B85200880_D - Introduction If the rotational speed of the pump decreases below 50% of the full speed, the pump time can be set to recover rather than trigger a fail condition. The timer starts immediately when the rotational speed of the pump decreases below 50% of the full speed. -
Page 18: Normal Speed Setting
B85200880_D - Introduction A feature is given that allows a delayed start of the nEXT pump. With this feature, the vent valve can be closed before starting the nEXT pump. This allows the backing pump to decrease the pressure in the vacuum system before starting the nEXT pump. If the controller is not used to control a TAV vent valve, it can be used to operate a fan. -
Page 19: Serial Control And Monitoring
B85200880_D - Introduction controlled venting options). In this case, all these features will be at factory default settings. You can manually adjust the standby speed if standby mode is selected, but the controller must be configured separately before the installation of the nEXT pump to the system. -
Page 20: Controller Configuration (Serial Configuration)
B85200880_D - Introduction 2.4.5 Controller configuration (serial configuration) All configuration settings stored in the motor controller are kept when the power to the pump is removed so that it is possible to use another system to configure the motor controller before the installation of the pump at the application. You can configure the operation of the pump as per the application and the pump can be operated using a simple parallel interface system. -
Page 21: Technical Data
Table 3 nEXT pumps technical data Parameter nEXT200200D nEXT200200iD nEXT200200T nEXT200200iT Mass 9.1 kg 9.1 kg 9.4 kg 9.4 kg Inlet flange Refer to Figure: nEXT200200 main inlet performance curve on page Outlet flange DN25NW DN25NW DN25NW DN25NW Vent port 1/8 inch BSPP Purge port... - Page 22 B85200880_D - Technical data Parameter nEXT200200D nEXT200200iD nEXT200200T nEXT200200iT • He 225 l s 225 l s 225 l s 225 l s • H 195 l s 195 l s 195 l s 195 l s Side to main inlet port compression ratio •...
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Page 23: Figure 1 Next200200 Main Inlet Performance Curve
B85200880_D - Technical data Figure 1 nEXT200200 main inlet performance curve Figure 2 nEXT200200 side inlet performance curve Page 19... -
Page 24: Figure 3 Next 200200 Nw25 Interstage Port Pumping Speed
B85200880_D - Technical data Figure 3 nEXT 200200 NW25 interstage port pumping speed Page 20... -
Page 25: Figure 4 Next200200 Dimensions (Mm)
B85200880_D - Technical data Figure 4 nEXT200200 dimensions (mm) Ø159.4 80.2 293.2 134.1 51.2 51.2 51.2 51.2 1. Envelope vent 1. Envelope vent 2. LED indicators on drive unit 2. LED indicators on drive unit 3. Booster port B 3. Booster port B 4. -
Page 26: Operation And Storage Environment
B85200880_D - Technical data Figure 5 nEXT200200D/T B85xxx510 dimensions (mm) Ø159.4 80.2 134.1 293.2 51.2 51.2 51.2 51.2 1. Envelope vent 1. Envelope vent 2. LED indicators on drive unit 2. LED indicators on drive unit 3. Booster port B 3. -
Page 27: Purge Gas Specification
B85200880_D - Technical data page 52 for the vent options and the vent valve connection. Refer to Controlled venting options on page 58 for configuring the venting options. Table 5 Vent gas specification and vent control Vent gas specification and control Reference data Vent gas Dry air, nitrogen, argon or other inert... -
Page 28: Cooling Water
B85200880_D - Technical data Purge gas specification Reference data Maximum concentration of oil 0.1 parts per million Permitted purge gas flow (when necessary) 20 to 50 sccm (0.33 to 0.84 mbar l s 33 to 84 Pa l s Recommended purge gas flow 25 sccm (0.42 mbar l s , 42 Pa l s Maximum permitted supply pressure of... -
Page 29: Pumping Media
B85200880_D - Technical data If the power limit setting is not adjustable, use a power supply capable to supply sufficient current to meet manufacturer's factory default power limit setting shown in Table: Logic interface technical data on page The manufacturer's TIC has variants. If the pump is operated using the manufacturer's TIC, contact us to select the applicable variant for the application. -
Page 30: Materials Exposed To Gases Pumped
B85200880_D - Technical data ▪ Methane ▪ Propane ▪ Butane ▪ Carbon monoxide ▪ Nitrogen ▪ Hydrogen ▪ Carbon dioxide ▪ Neon ▪ Krypton ▪ Helium ▪ Ethane ▪ Argon To pump a gas that is not listed, contact the supplier for an advice. Failure to contact the supplier can invalidate the warranty of the pump. -
Page 31: Logic Interface Connector
B85200880_D - Technical data 3.9 Logic interface connector The pump has 15‑way logic interface connector at the end of the logic interface cable. You can plug the logic interface connector into the manufacturer's TIC Turbo Instrument Controller or TIC Turbo Controller. Use applicable connector mating half (not supplied) to connect the pump to the customer equipment. - Page 32 B85200880_D - Technical data Logic interface item Normal status output: Open collector transistor plus pull up resistor. Type Refer to Figure: Interface circuits for nEXT turbo pump controllers on page < Normal speed (default 80%) Off (2.2 kW internal pull up to 12 V d.c.) ³...
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Page 33: Controller Connector Socket
B85200880_D - Technical data Signal Polarity Use Number 8, 13, 14 Electrical supply: 0 V 1, 6, 11 Electrical supply: 24 V - Positive 48 V d.c. Figure 7 Interface circuits for nEXT turbo pump controllers 3.10 Controller connector socket The pump has a 3‑way controller connector socket at the side of the controller. -
Page 34: Indicator Led's
B85200880_D - Technical data with the help of a screwdriver. The mating plug for the 3‑way controller connector is supplied with the pump. The connector supplies the power to the vent valve or fan connected to the 3‑pins. The connector mating plug is shown in Figure: Controller connector showing pin numbers on page 30, with the polarity of the pins marked, when the vent valve or fan is set to on. - Page 35 B85200880_D - Technical data Description The yellow LED flashes with a 50% duty cycle at the rotational frequency of the pump motor. At high speeds it is continuously on. The LED sets to off when the rotational speed is very low or stopped. Status LED If the next service is available, the LED flashes in a sequence to show which service operation is necessary.
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Page 36: Installation
B85200880_D - Installation 4. Installation 4.1 Unpack and inspect WARNING: HEAVY OBJECT Risk of injury and damage to equipment. Use applicable lifting equipment to move the pump. Failure to do so can cause injury to people and damage to the equipment. Refer to Pumping media on page 25 for the mass of the pump. -
Page 37: Typical Installation
B85200880_D - Installation Quantity Description Check ( ü ) Connector (24 V) (for driving accessories from the Controller socket) Inlet strainer (installed in the NW25 interstage and booster port only) 4.2 Typical installation A typical pumping system with a nEXT pump is shown in Figure: Typical pumping system with a nEXT pump on page The accessories available for the nEXT pumps are given in... -
Page 38: Inlet Screen
B85200880_D - Installation Figure 9 Typical pumping system with a nEXT pump 1. High-vacuum gauge 1. High-vacuum gauge 2. Vacuum system 2. Vacuum system 3. Differential aperture 3. Differential aperture 4. Foreline trap 4. Foreline trap 5. Backing pump 5. Backing pump 6. -
Page 39: Mechanical Fixing
4.3.4 Base mounting The base of the pump can be installed on a rigid support using the tapped fixing holes. Refer to Figure: nEXT200200 dimensions (mm) on page 21 for the installation hole details. Page 35... -
Page 40: Backing Port Connection
B85200880_D - Installation Note: Remove the four rubber feet from the four tapped fixing holes before you mount the base of the pump. Obey the requirements that follows to make sure that the pump stay secured if the pump seize: Support must withstand a destructive 6 KNm torque of:... -
Page 41: Interstage Connection (Variants Only)
B85200880_D - Installation 4.3.6 Interstage connection (variants only) Use applicable vacuum tube and connectors to connect the interstage port to the vacuum system or to the outlet flange of the other turbo or compound turbomolecular pump (if using an 'i' nEXT pump to back other pump). Keep the inlet strainer in the interstage port only if you are sure that debris cannot enter the interstage port. -
Page 42: Ground The Connections
B85200880_D - Installation equipment on page 38 for information about control. Refer to Connect the electrical supply on page 38 for instructions on how to connect the electrical supply. 4.5.1 Ground the connections We recommend you to install a separate ground conductor to ground the pump. Use the braided wire that is not insulated or a separate insulated green / yellow connector with a minimum 10 AWG (5.3 mm ) conductor (to comply with US and Canadian installation... - Page 43 B85200880_D - Installation WARNING: ELECTRICAL ISOLATION DEVICE Risk of damage to equipment. Install an applicable isolation device in the electrical supply. Make sure that the switch is easy to access and marked as disconnecting device for the pump. Failure to do so can cause failure to set the pump to off in an emergency.
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Page 44: Connect The Parallel Control And Monitoring
B85200880_D - Installation Figure 10 Logic interface connections - parallel control 1. 24 V d.c. electrical supply 1. 24 V d.c. electrical supply 2. Fuse 2. Fuse 3. Optional LED indicator ‑ system OK 3. Optional LED indicator ‑ system OK 4. -
Page 45: Connection For Serial Control And Monitoring
B85200880_D - Installation Note: Serial enable is also a control input, it is not necessary in a system that operates under parallel control. Make sure that there is no connection to the serial enable (pin 5). Note: To use the standby or fail parallel interface signals, make sure that the RS485 / RS232 slide switch is in the RS232 (default) position. -
Page 46: Figure 11 Controller Status Information
B85200880_D - Installation Figure 11 Controller status information 1. Standby speed increase button 1. Standby speed increase button 2. RS485 / RS232 switch 2. RS485 / RS232 switch 3. Controller connector socket 3. Controller connector socket 4. Standby speed reduce button 4. -
Page 47: Serial Enable
B85200880_D - Installation number of pumps to a single master. Refer to Figure: RS485 multi-drop connection on page Figure 12 Logic interface connections - RS232 serial control 2. 24 ‑ 48 V d.c. electrical supply 2. 24 ‑ 48 V d.c. electrical supply 1. -
Page 48: Serial Protocol
B85200880_D - Installation and will decelerate and stops. To clear the fail condition, activate the serial enable again and send a serial stop command. 4.7.3 Serial protocol The serial interface link is set to 9600 Baud, 8 bits, 1 stop, no parity with no handshaking. -
Page 49: Figure 14 Conceptual Diagram For Multi-Drop Connection Using Rs232 Interface
B85200880_D - Installation Figure 14 Conceptual diagram for multi-drop connection using RS232 interface 1. RS232 interface on control equipment 1. RS232 interface on control equipment 2. Buffer 2. Buffer 3. pump 3. pump 4. OR gate 4. OR gate Page 45... -
Page 50: Message Structure
B85200880_D - Installation Figure 15 RS485 multi-drop connection 1. RS485 interface on control equipment 1. RS485 interface on control equipment 2. pump logic interface 2. pump logic interface 4.7.4 Message structure The message structure and command set are the same for RS485 and RS232 options. To communicate a message to the pump, send the characters in a specific order. - Page 51 B85200880_D - Installation Refer to Table: Command abbreviations on page 49 for the abbreviations used to specify the commands in the sections that follows. Refer to Table: Error codes on page 49 for the error codes that can be returned. Table 13 Summary of commands that can be sent to the pump Parameter Factory...
- Page 52 B85200880_D - Installation Parameter Factory Comments Object name Command Data type Units range setting Standby !S857 55.100 decimal Standby speed as a percentage speed setting of full speed ?S857 Temperature ?V859 0.100 decimal °C Measured motor temperature readings 0.100 decimal °C Measured controller temperature...
- Page 53 B85200880_D - Installation Parameter Factory Comments Object name Command Data type Units range setting Pump cycles ?V884 0..65535 decimal cycles Cycles run by pump 0..65535 decimal cycles Cycles until pump service due Bearing run ?V885 0..999999 decimal hours Hours run by bearing time 0..999999 decimal...
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Page 54: Multi-Drop Operation
B85200880_D - Installation 4.7.6 Multi-drop operation With multi‑drop mode, a single computer system can communicate with more than one pump. Each pump must be assigned its own individual address before it can be installed in a multi‑drop system. The command to assign the multi‑drop address is sent in standard nEXT message format. -
Page 55: Figure 16 Logic Interface Connection - Mixed Parallel And Serial Operation
B85200880_D - Installation stop command has been received by the pump can any commands sent through the parallel interface be acted on. If you use the start switch on the parallel interface to start the pump, you cannot stop the pump by sending a stop command over the serial interface. To stop the pump, use the parallel stop switch. -
Page 56: Vent Options, Vent Valve Connection And Control
B85200880_D - Installation 4.9 Vent options, vent valve connection and control CAUTION: RATE OF INCREASE IN PRESSURE Risk of damage to equipment. If you vent the pump when it is at full rotational speed and the rate of increase in pressure is too high, the pump can get damaged and its life can decrease. -
Page 57: Vent Valve Control
B85200880_D - Installation ▪ the volume of the vacuum system is less than 10 litres (when using a TAV6 vent valve). Refer to Table: Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) on page 54 for an applicable orifice size to be installed to the vent valve for the given vacuum system volumes to limit the rate of increase in pressure. -
Page 58: Alternative Valve Connected To The Vacuum System
B85200880_D - Installation Description of the vent function Option number Vent valve fully opens immediately for the Stop command or Fail. When the pump is shipped, the controller is set to the factory default vent option 0, refer to Table: Vent options on page 53. -
Page 59: Forced Air Cooling
B85200880_D - Installation CAUTION: VENTILATION FOR PUMP Risk of damage to equipment. If the pump is in an enclosure, make sure that sufficient ventilation is available. The ambient temperature around the pump must not be more than 40 °C. ▪ Natural convection cooling: For the light pumping duties, with an ambient air temperature less than 30 °C, natural convection cooling can be sufficient to cool the pump. -
Page 60: Figure 17 Maximum Relative Humidity To Avoid Condensation With Water Cooling
B85200880_D - Installation A WCX water cooler accessory is available for the pump (refer to Accessories on page 92). Install the WCX water cooler accessory as given in the instruction manual supplied with it. The cooling water supply must be as per the specification given in Cooling water on page 24. -
Page 61: Configuration
B85200880_D - Configuration 5. Configuration WARNING: CONNECTION TO THE VACUUM SYSTEM Risk of injury and damage to equipment. Do not operate the pump if it is not connected to the vacuum system. The pump rotor rotates at high speeds and the rotating blades are not visible. -
Page 62: Power Supply To The Fan From The Controller
B85200880_D - Configuration Send the command as follows (the 'd' characters shows the value in Watts that will be set. For example, to set the limit to 90 W, type 90). Command The reply is as follows: Reply The power limit setting is now stored in memory of the pump. To check what power limit is set, send a query as follows: Command The reply is as follows:... -
Page 63: Standby Speed Setting
B85200880_D - Configuration The venting option is now stored in the memory of the pump. To check the venting option that is set, send a query as follows: Command The reply is as follows: Reply 5.1.4 Standby speed setting You can operate the pump at a standby speed rather than full rotational speed. The standby speed is a user-configurable option and can be set to the value between 55% and 100% full rotational speed. -
Page 64: Timer Setting And Options
B85200880_D - Configuration To check what normal speed is set, send a query as follows: Command The reply is as follows: Reply 5.1.6 Timer setting and options Refer to Timer on page 12 for a full description of timer functionality. The timeout period is a user‑configurable option and can be set to a value from 1 to 30 minutes. -
Page 65: Analogue Signal Options
B85200880_D - Configuration Reply 5.1.7 Analogue signal options The analogue output can be used to monitor one of the four different parameters. Refer Table: Analogue signal options on page Table 19 Analogue signal options Option number Description of analogue output number Measured pump rotational speed. -
Page 66: Configuring The Next Pump Using A Tic
B85200880_D - Configuration To assign a multi‑drop address, send the command that follows (where the 'd' characters represent the address): Command Note: The address can be a decimal number from 1 to 98. The address number 0 is used to ‑... - Page 67 B85200880_D - Configuration ▪ Controlled venting options, including operating a fan from the controller ▪ Standby speed setting ▪ Normal speed setting ▪ Timer settings: to enable and disable the timer, setting the timeout period ▪ Electronic braking options ▪ Factory default settings Refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals for information on how to do the settings.
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Page 68: Operation
B85200880_D - Operation 6. Operation 6.1 Before starting the pump Before you start the pump, obey the steps that follows. 6.1.1 Close the vent valve ▪ If you use a manual vent valve, turn it clockwise to close the vent valve. ▪... -
Page 69: Operation With Parallel Control And Monitoring
B85200880_D - Operation 6.2 Operation with parallel control and monitoring 6.2.1 Start the pump To start the pump, link the start/stop control input to the 0 V control reference on the logic interface connector. The pump will accelerate to full operating speed. The green indicator on the controller will illuminate when the pump reaches to normal speed. -
Page 70: Start The Pump
B85200880_D - Operation Note: This command overrides the current vent option and closes the vent valve. There is no command to open the vent valve but, when a stop command is sent to the pump, the override will be cleared. 6.3.2 Start the pump To start the pump, send the command (over the serial communications link) that follows:... -
Page 71: Temperature Readings
B85200880_D - Operation 6.3.5 Temperature readings The temperatures of the pump motor and the internal electronics of the pump can be monitored. Send the query that follows: Command The reply is as follows: Reply Here: ▪ first number is the motor temperature ▪... -
Page 72: Mixed Parallel And Serial Operation
B85200880_D - Operation 6.4 Mixed parallel and serial operation In mixed parallel and serial operation, the pump can receive commands from serial and parallel interfaces. Refer to Figure: Serial and parallel control flowchart on page 69 understand how the commands controls the pump. The pump will power up with 'None in Control'. -
Page 73: Operation With A Tic
B85200880_D - Operation The parallel normal and analogue output signals gives valid pump status information at all times under mixed parallel and serial operation. The analogue output voltages are given in Table: Logic interface technical data on page Figure 18 Serial and parallel control flowchart 6.5 Operation with a TIC For operation with the manufacturer's Turbo Instrument Controller or TIC Turbo Controller, the pump can be connected to this type of unit, which gives the... -
Page 74: Operation At Extreme Conditions
B85200880_D - Operation If you use the controller to control a TAV solenoid valve, there is a 2‑second delay between receiving a stop command (or detecting a fault condition) and opening the vent valve. The delay allows time for gauges, valves and other equipment to be switched off before venting occurs. -
Page 75: Electrical Supply Failure
B85200880_D - Operation 6.7.4 Electrical supply failure WARNING: POWER SUPPLY FAILURE Risk of injury. If the power supply fails when the pump is in operation, the rotor can spin for approximately 30 minutes. The control circuit can possibly not give indication that the rotor is spinning. - Page 76 B85200880_D - Operation Length of power failure Control mode Behaviour of pump Regenerative power keeps all output signals active during the power failure. As the timer is disabled, the controller will go into fail condition when the speed decreases below 50% and will display flashing error code 0.
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Page 77: Bakeout
B85200880_D - Operation 6.8 Bakeout nEXT200200 split flow pumps are not applicable for bakeout. Page 73... -
Page 78: Maintenance
B85200880_D - Maintenance 7. Maintenance WARNING: PERSONAL PROTECTIVE EQUIPMENTS Risk of injury. When you remove the pump, make sure to use the personal protective equipment to prevent the damage from failed components and possible accumulation of hazardous material. Check that the pump is vented to atmosphere at a safe temperature. -
Page 79: Clean The External Surfaces Of The Pump
B85200880_D - Maintenance 7.4 Clean the external surfaces of the pump CAUTION: CLEANING SOLUTIONS Risk of damage to equipment. Clean the external surfaces of the pump in a well- ventilated location. When using cleaning solutions and solvents to clean the pump, obey the precautions given by the manufacturer. -
Page 80: Fault Finding
B85200880_D - Fault finding 8. Fault finding CAUTION: CONTROLLER SAFETY Risk of damage to equipment. Do not remove the controller from the pump as the controller may be damaged. Refer to Table: Fault finding on page 76 for the possible causes of faults and the recommended actions to rectify faults. -
Page 81: The Pump Does Not Rotate After A Serial Start Command Is Sent
B85200880_D - Fault finding Fault The pump does not rotate after a serial start command is sent Cause Check if the pump returns a reply to the start command. Remedy If there is no reply, do the checks given in No serial comms on page 78 or do the checks given in... -
Page 82: The Pump Is Very Noisy Or There Is Excessive Vibration Or Both
B85200880_D - Fault finding Remedy Clean the high vacuum system. Cause Check the system for leaks and contamination. Remedy If a leak is found, repair it and clean the contamination. Cause The inlet pressure is less. • Remove the pump from the system and test the ultimate pressure of the pump Remedy only. -
Page 83: Fail Signal Or Standby Signal Not Working
B85200880_D - Fault finding Fault Fail signal or standby signal not working Cause The serial enable line is not active. Remedy Must be disconnected or driven high for use of standby and fail lines. Cause Slide switch is not in the correct position for RS232 or RS485. Remedy Left for RS485, right for RS232. -
Page 84: Decoding Service Status Words
B85200880_D - Fault finding Service flash Comments Actions code Bearing and oil We recommend you to replace the LED on 3sec cartridge service bearing and oil cartridge. Refer to Service LED off 1sec recommended on page The turbo impeller or controller has reached its expected life. -
Page 85: Controller Run Time
B85200880_D - Fault finding Bit number Status flag Active flag means Service is due. Specific operation necessary Service due should be determined by checking the bits above 8 - 31 Reserved 8.3 Controller run time The run hours and recommended service time of the controller on the pump can be monitored. -
Page 86: Bearing Run Time
B85200880_D - Fault finding 8.6 Bearing run time The run hours and recommended service time of the bearing in the pump can be monitored. Send the query that follows: Command The reply is as follows (where, first number is the hours run by the bearing and second is the number of hours until service is recommended): Reply 8.7 Oil cartridge run time... -
Page 87: Decoding System Status Words
B85200880_D - Fault finding Error flash Error flash Comments Actions position code Controller failed internal Restart the system. If the sLssss configuration and calibration error code is not cleared, operation contact us or the supplier. Failure to reach or maintain Check if the pump is too hot ssLsss half full speed in the timer... - Page 88 B85200880_D - Fault finding Hexadecimal Binary Decimal 0001 0010 0011 0100 0101 0110 0111 1000 1001 1010 1011 1100 1101 1110 1111 Each binary digit (bit) represents a flag that is either active (state 1) or not active (state 0). To help decode the system status word, each bit is numbered (starting with 0 for the least significant to 31 for the most significant) as shown below.
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Page 89: Useful Service Information
B85200880_D - Fault finding Bit number Status flag Active flags means Invalid Controller software Controller internal software mismatch Controller upload Controller failed internal configuration and incomplete calibration operation Failure to reach or maintain half full speed in Timer expired the timer setting value Hardware trip Overspeed or Overcurrent trip activated Pump internal temperature measurement... - Page 90 B85200880_D - Fault finding Command The reply is as follows (where, string 1 is the pump type, string 2 is the DSP software version number and string 3 is the designated full speed of the pump (in revolutions per second)): Reply sp String 1 String 2...
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Page 91: Storage
B85200880_D - Storage 9. Storage If possible, do not store the pump for long-term. When long-term storage is necessary, the pump should be set up and operated for minimum eight hours every six months. To store the pump: Put protective covers over the inlet, outlet, interstage (for the 'i' nEXT only), purge, booster (for the 'T' nEXT only) and vent ports. -
Page 92: Disposal
B85200880_D - Disposal 10. Disposal WARNING: PERSONAL PROTECTIVE EQUIPMENTS Risk of exposure to harmful substances. If the pump rotor fails, there can be some dust created from the rotary components in the pump touching each other. Use correct personal protective equipment when handling and disposing the pump. Make sure that all pump inlets and outlets are capped off before disposal. -
Page 93: Service
B85200880_D - Service 11. Service Our products, spares and accessories are available from our companies in Belgium, Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ service engineers who have undergone our comprehensive training courses. -
Page 94: Bearing And Oil Cartridge On-Site Maintenance
B85200880_D - Service 11.2 Bearing and oil cartridge on-site maintenance The oil cartridge and bearing of the pump can be serviced on‑site by service engineer trained by us. The service tool kits that follows and service parts are available. Table 29 Service tool kits Service tool kit Item number Oil cartridge tool kit... -
Page 95: Spares
This will also invalidate the product warranty. 12.1 ISX inlet screen Not applicable to nEXT200200 split‑flow pumps. 12.2 Inlet strainer The interstage pumps are supplied with an inlet strainer for the interstage port. The Item Number for a replacement inlet strainer is as follows. -
Page 96: Accessories
B85200880_D - Accessories 13. Accessories 13.1 Installation The accessories available for use with the pumps are given in the sections that follows. Figure: nEXT exploded accessories view on page 92 shows how the accessories are installed to the pump. Figure 19 nEXT exploded accessories view 1. -
Page 97: Wcx Water Cooler
WCX nEXT water cooling kit B80000815 13.4 BX bakeout band Not applicable to nEXT200200 split-flow pumps. 13.5 TAV vent valve and vent port adaptor Two solenoid‑operated vent valves are available for system venting. The valves are 24 V d.c., normally open and can be driven by the controller. The solenoid valve is installed in place of the manual valve or can be installed with an adaptor (supplied with the valve). -
Page 98: Vent Port Adaptor
B85200880_D - Accessories 13.7 Vent port adaptor The vent port adaptor has a 1/8 inch BSP male thread that can be screwed in the vent port and purge port which makes them applicable for NW10 fittings. Table 38 Vent port adaptor Vent port adaptor Item Number Vent port adaptor NW10 -... -
Page 99: Tic Pc Program
B85200880_D - Accessories 13.11 TIC PC program The TIC PC program is a PC‑based software that can be used to retrieve and set the user configurable parameters in the pump. TIC PC program enables monitoring and data logging of the pumping system. Page 95... - Page 100 edwardsvacuum.com...