Pumping Media - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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4.3 Pumping media

WARNING: HAZARDOUS SUBSTANCES
Pumped process gases may escape from the exhaust and leaks in the vacuum system.
During servicing, toxic deposits may be present in the pump. The gases, vapours and
substances may be hazardous to health.
The pumping of toxic / explosive / flammable / pyrophoric / radioactive / oxidizing /
corrosive gases or gas mixtures, as well as oxygen of more than atmospheric
concentration (21 %) is generally prohibited. The operator is responsible for assessing
the hazard potential of the process media or mixtures.
WARNING:
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.
If pumping hazardous gases or vapours, observe the safety recommendations of the
supplier of the gas/vapour.
WARNING:
Do not use the pump to pump mercury vapour and do not allow mercury (for
example, from a McLeod gauge) to come into contact with the pump. This may result
in corrosion and failure of the pump rotor.
CAUTION:
Do not use the pump to pump particulates or condensable media. Deposition may
occur within the pump which will degrade pump performance and reduce the pump
life.
Note:
Concentrations of gases may be modified by the compression of the pump.
The pump is designed to pump the gases listed below. To pump a gas not listed, contact
the supplier for advice. Failure to contact the supplier may invalidate the warranty of the
pump. The pump is not suitable for pumping aggressive or corrosive gases.
Refer to the Edwards Vacuum Pump and Vacuum Safety manual P40040100 for safety
information associated with the specification, design and operation of vacuum pumps
and vacuum systems.
Air
Carbon monoxide
Neon
Nitrogen
Krypton
Argon
Carbon dioxide
Helium
Hydrogen
B8J200880_D
300812671_002_C3
B8J200880_D - Technical data
Page 29
08/2021 - ©Edwards Limited

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