Edwards nEXT930D Manuals

Manuals and User Guides for Edwards nEXT930D. We have 2 Edwards nEXT930D manuals available for free PDF download: Instruction Manual

Edwards nEXT930D Instruction Manual

Edwards nEXT930D Instruction Manual (137 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 6 MB

Table of Contents

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Edwards nEXT930D Instruction Manual

Edwards nEXT930D Instruction Manual (120 pages)

Turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents

Table of Contents

3
Configure the Pump Using a Tic

74
- Before Starting the Pump
  75
- Close the Vent Valve
  75
- Operation
  75
- Pre-Start Sequence
  75
- Manual Vent Valve
  76
- TAV5 or TAV6 Solenoid Vent Valve
  76
- Vent Options, Vent Valve Connection and Control
  76
- Vent Valve Control
  77
- Alternative Valve Connected to the Vacuum System
  79
- Operation with Parallel Control and Monitoring
  79
- Start the Pump with Parallel Control
  79
- Command
  80
- Delayed Start with Serial Control
  80
- Operation with Serial Control and Monitoring
  80
- Parallel Monitoring
  80
- Reply Sp Cr
  80
- Run the Pump at Standby Speed with Parallel Control
  80
- Stop the Pump with Parallel Monitoring
  80
- Run the Pump at Standby Speed with Serial Control
  81
- Start the Pump with Serial Control
  81
- Command Sp Cr
  82
- Monitor Link Parameter Readings with Serial Control
  82
- Monitor Measured Motor Speed with Serial Control
  82
- Monitor Temperature Readings with Serial Control
  82
- Reply
  82
- Reply Sp D Cr
  82
- Stop the Pump with Serial Control
  82
- Mixed Parallel and Serial Operation
  83
- Note
  83
- Decelerating and Venting
  84
- Figure 27 Serial and Parallel Control Flowchart
  84
- Operation with a TIC or TAG
  84
- Operation at Extreme Conditions
  85
- Operation at High Temperatures
  85
- Operation with High Inlet Pressure
  85
- Electrical Supply Failure
  86
- Protection against Over-Speed
  86
- Bakeout
  87
- Shut down the Pump Manually
  88
- Bearing Maintenance
  89
- Maintenance
  89
- Cleaning the Pump
  90
- Decoding Service Status Words
  90
- Rotor Life
  90
- Controller Run Time
  92
- Pump Cycles
  92
- Pump Run Time
  92
- Bearing Run Time
  93
- Storage
  94
- Disposal
  95
Fault Finding

96
- The Green Normal LED Does Not Light or the Pump Is Not Rotating at Full Speed or the Pump Fails Whilst Running
  97
- The Pump Does Not Respond in Multi- Drop Mode
  97
- Ultimate Pressure Cannot be Reached
  97
- Fail Signal or Standby Signal Not Working
  98
- No Serial Comms
  98
- The Pump Is very Noisy or There Is Excessive Vibration or both
  98
- Any Other Problems
  99
- Blue Bearing LED Is Flashing a Repeated Sequence
  99
- Blue Bearing LED Is Lit
  99
- Cause
  99
- Command Set Error Codes
  99
- Fault
  99
- Pump Is Not Accelerating to Full Speed
  99
- The Red Alarm LED Is Flashing
  99
- The Red Alarm LED Is on
  99
- Yellow Service LED Is Flashing a Repeated Sequence
  99
- Flashing Error Codes
  100
- Flashing Service Codes
  100
- Flashing Inactivity Service Codes (Blue Bearing LED)
  101
- Decoding System Status Words
  102
- Service Information
  104
- Return the Equipment or Components for Service
  105
- Service
  105
- Bearing Monitoring and Conditioning System
  106
- Bearing On-Site Maintenance
  106
- Bearing Run in Mode
  107
- Service Counter Reset
  107
- Inlet Flange Seals and Integrated Inlet Screens
  108
- Inlet Screen
  108
- Spares
  108
- Accessories
  109
- Air Cooler
  109
- Flange Heater
  110
- TAV5 and TAV6 Vent Valves
  110
- Water Cooler
  110
- PRX Purge Restrictor
  111
- Vent Port Adaptor
  111
- VRX Vent Restrictor
  111
- Auxiliary Connector
  112
- Auxiliary Extension Cable
  112
- Interface Cable
  112
- Nst2 PC Program
  112
- Auxiliary 'Y' Cable Adaptor
  113
- EPS 800 Power Supply
  113

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