Edwards EXTPX Series Manuals

Edwards EXTPX Series Manuals

Manuals and User Guides for Edwards EXTPX Series. We have 1 Edwards EXTPX Series manual available for free PDF download: Instruction Manual

Edwards EXTPX Series Instruction Manual

Edwards EXTPX Series Instruction Manual (46 pages)

Split flow compound Turbomolecular Vacuum Pump

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents

Table of Contents
5
1 Introduction

9
- Scope and Definitions
  9
2 Technical Data

11
- General
  11
- Pumping Media
  13
- Vent Gas Specification and Vent Control Data
  15
- Purge Gas Specification and Data
  15
- Materials Exposed to Gases Pumped
  15
3 Installation

21
- Unpack and Inspect
  21
- Typical Installation
  22
- Connection to the Vacuum System
  24
- Mechanical Fixing
  24
- Inlet Screens
  24
- Inlet Connection and Pump Orientation
  25
- Backing-Port Connection
  28
- Booster Port Connection
  28
- Vent Options, Vent-Valve Connection and Control
  28
- Purge Gas Connection
  29
- Electrical Installation
  29
- EXDC Drive Module
  30
- TIC Controller
  30
- Cooling
  30
- Introduction
  30
- Forced-Air Cooling
  30
- Water-Cooling
  30
- Magnetic Fields
  31
4 Operation

33
- Start-Up
  33
- Shut-Down
  34
- Safety Interlocks and Control System
  34
- EXDC Drive Module
  34
- TIC Controller
  34
- Bakeout
  34
5 Maintenance

35
- Introduction
  35
- Bearing Maintenance
  35
- Rotor Life
  35
- Cleaning the Pump
  35
- Fault Finding
  36
6 Storage and Disposal

39
- Storage
  39
- Disposal
  39
7 Service, Spares and Accessories

41
- Introduction
  41
- Service
  41
- Spares Kits
  41
- Inlet Screens
  41
- Inlet Strainer
  41
- Inlet-Flange Seal
  41
- Accessories
  42
- Installation
  42
- EXDC Drive Module
  42
- TIC Controller
  42
- TAV Vent-Valve and Vent Port Adaptor
  42
- VRX Vent-Restrictor
  43
- PRX Purge-Restrictor
  43
- ACX Air-Cooler
  43
- WCX Water-Cooler
  43
- Index
  45

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