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EXT70H Series
User Manuals: Edwards EXT70H Series Vacuum Pump
Manuals and User Guides for Edwards EXT70H Series Vacuum Pump. We have
2
Edwards EXT70H Series Vacuum Pump manuals available for free PDF download: Instruction Manual
Edwards EXT70H Series Instruction Manual (70 pages)
EXT Pump Accessories
Brand:
Edwards
| Category:
Water Pump
| Size: 3 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Installation and Operation Safety
8
Accessories for EXT DX Pumps (Ext75Idx Pump Shown)
9
Accessories for Other EXT Pumps (EXT250M Pump Shown)
10
Accessories for EXT406PX Pumps
11
Accessories for EXTPX Split Flow Pumps
12
BX Bakeout Band
13
Description
13
Technical Data
13
Installation
14
Unpack and Inspect
14
Fit the BX Bakeout Band to the Pump
14
Electrical Connection to an EXC Controller
14
Electrical Connection to a TIC Relay Box
14
Electrical Connection to an Independent Electrical Supply
14
Operation
15
ACX Air-Cooler
17
Description
17
Technical Data
17
ACX75 Air-Cooler Dimensions (MM)
18
ACX75 Air-Cooler Installation (Shown Fitted to EXT75DX Pump)
19
ACX250 Air-Cooler Dimensions (MM)
20
ACX250 Air-Cooler Installation (Shown Fitted to EXT250M Pump)
21
ACX250 Air-Cooler Axial Installation (Shown Fitted to EXT250M Pump)
22
ACX250H Air-Cooler Dimensions (MM)
23
ACX250H Air-Cooler Installation (Shown Fitted to Ext255Hi Pump)
24
ACX400 Radial Air-Cooler Dimensions (MM)
25
ACX400 Radial Air-Cooler Installation
26
ACX400 Axial Air-Cooler Dimensions (MM)
27
ACX400 Axial Air-Cooler Installation
28
ACX400 Axial and Radial Air-Cooler Combination Installation
29
ACX500 Air-Cooler Dimensions (MM)
30
ACX500 Air-Cooler Installation (Shown Fitted to EXT501 Pump)
31
ACX555 Air-Cooler Dimensions (MM)
32
ACX555 Air-Cooler Installation (Shown Fitted to EXT555H Pump)
33
Installation
34
Unpack and Inspect
34
Side (or Radial) Mounting
34
Axial Mounting
35
Combined Radial and Axial Mounting
35
Electrical Connection
36
Operation
36
EXT DX Podule Connector Plug
37
TAV Vent-Valve
39
Description
39
Technical Data
39
Installation
40
Unpack and Inspect
40
TAV Vent-Valve Dimensions (MM)
40
Fit the TAV Vent-Valve to the Pump
41
Electrical Connection
41
Operation
41
TAV Vent-Valve Connections
42
Vibration Isolator
43
Description
43
Technical Data
43
Installation
44
Unpack and Inspect
44
Fit the Vibration Isolator
44
Vibration Isolator Installation
45
Inlet Screens
47
Description
47
Technical Data
47
Installation
47
Unpack and Inspect
47
Fit or Remove the Inlet-Screen
48
ISX Inlet-Screen
48
ISDX Inlet-Screen
48
ISHX Inlet-Screen
49
PRX10 Purge-Restrictor
51
Description
51
Technical Data
51
Installation
51
Unpack and Inspect
51
Fit the Purge-Restrictor
52
Operation
52
General
52
Calibration of the PRX10 for Different Purge Gases
52
Pump-To-Controller Cable
55
Description
55
Technical Data
55
Installation
55
Unpack and Inspect
55
Connect the Pump-To-Controller Cable
55
Vent-Port Adaptor
57
Description
57
Technical Data
59
Installation
59
Unpack and Inspect
59
Connect the Vent-Port Adaptor
59
Vent-Port Adaptor
59
Extended Vent-Port Adaptor
59
VRX Vent - Restrictor
61
VRX Vent-Restrictor
61
Description
61
Technical Data
61
Installation
61
Unpack and Inspect
61
VRX Vent-Restrictor Selection
61
Fit the Vent-Restrictor
62
WCX Water-Cooler
63
Description
63
Technical Data
63
Installation
63
Unpack and Inspect
63
WCX555 Water-Cooler Dimensions (MM)
64
WCX555 Water-Cooler Installation
65
Fit the Water-Cooler to the Pump
66
Operation
66
Maintenance
67
Storage and Disposal
69
Storage
69
Disposal
69
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Edwards EXT70H Series Instruction Manual (44 pages)
Low Voltage EXT Compound Molecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 3 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
General Description
8
Vent Options and Vent Control
8
Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with the Pump Initially at Full Rotational Speed)
9
Technical Data
11
General
11
Pumping Media
11
Pumps Without Gas Purge
12
Pumps with Gas Purge (EXT255H 24 V and Ext255Hi 24 V Only)
12
Vent Gas Specification and Vent Control Data
12
EXT70H 24 V Dimensions (MM)
13
Ext255H/Hi 24 V Dimensions (MM)
14
Purge Gas Specification (EXT255H 24 V and Ext255Hi 24 V Only)
15
Cooling-Water
15
Materials Exposed to Gases Pumped
15
EXT 70H 24 V / EXT 70Hi 24 V Technical Data
15
EXT255H 24 V / Ext255Hi 24 V Technical Data
17
Installation
21
Unpack and Inspect
21
Typical Installation
21
Checklist of Items
21
Typical Pumping System with an EXT70H or EXT255H Pump
22
Typical Pumping System with an Ext70Hi or Ext255Hi Pump
23
Connect to the Vacuum System
24
Inlet-Screen
24
Mechanical Fixing
24
Correct Installation of the Inlet-Screen
24
Base Mounting
25
Inlet Connection and Orientation
25
Backing Connection
26
Interstage Connection ((Ext70Hi 24 V and Ext255Hi 24 V Only)
26
Vent-Valve Connection and Control
26
Purge Gas Connection (EXT255H 24 V and Ext255Hi 24 V Only)
27
Connect the Purge Gas
27
Recommended Purge Gas Flow
27
Electrical Installation
27
EXDC Drive Module
27
Vent-Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet of the Vent-Valve)
27
Earth (Ground) Connections
28
Cooling
28
Introduction
28
Forced-Air Cooling
28
Water-Cooling
29
Operation
31
Start-Up
31
Shut-Down
31
Shut-Down Due to Pump under or Over-Speed
32
Bakeout
32
Maintenance
33
Introduction
33
Bearing Life
33
Rotor Life
33
Clean the Pump
33
Fault Finding
34
Storage and Disposal
37
Storage
37
Disposal
37
Service, Spares and Accessories
39
Introduction
39
Service
39
Spares
39
ISX Inlet-Screen
39
Inlet-Strainer (Ext255Hi 24V Pump Only)
39
WCX Water-Cooler
40
Inlet-Flange Seals
40
Accessories
40
Installation
40
EXDC Drive Modules
40
BX Bakeout Band
40
FL20K Foreline Trap
41
TAV Vent-Valve and Vent-Port Adaptor
41
ACX Air-Cooler
41
Vibration Isolators
41
PRX Purge-Restrictor
41
VRX Vent-Restrictor
42
EXT70H/ISO63 Interstage-Port Accessory Kit
42
Installation of Optional Accessories (and Spares): Ext255Hi Shown
43
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