Edwards nEXT240 Instruction Manual
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Edwards nEXT240 Instruction Manual

Turbomolecular pumps
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Description
nEXT240D
nEXT240T
nEXT300D
nEXT300T
nEXT400D
nEXT400T
Instruction Manual
nEXT Turbomolecular Pumps
nEXT240, nEXT300 and nEXT400
B800-00-880
Issue A Original
Item Number
B812XXXXX
B813XXXXX
B822XXXXX
B823XXXXX
B832XXXXX
B833XXXXX

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Summary of Contents for Edwards nEXT240

  • Page 1 B800-00-880 Issue A Original Instruction Manual nEXT Turbomolecular Pumps nEXT240, nEXT300 and nEXT400 Description Item Number nEXT240D B812XXXXX nEXT240T B813XXXXX nEXT300D B822XXXXX nEXT300T B823XXXXX nEXT400D B832XXXXX nEXT400T B833XXXXX...

  • Page 3: Table Of Contents

    Connect the electrical supply ..................30 Connection for parallel control and monitoring ..............31 Connection for serial control and monitoring ..............32 © Edwards Limited 2009. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 4 4.10 Bakeout ........................56 Maintenance ..................59 Introduction ......................59 Bearing and oil cartidge maintenance ................59 Rotor life ......................... 59 Page ii © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 5 Maximum relative humidity to avoid condensation with water cooling ........43 nEXT exploded accessories view ..................73 nEXT exploded accessories view ..................74 © Edwards Limited 2009. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 6 Example decoding of system status words ................65 Inlet-flange seals and intergrated inlet screens ..............70 Vent restrictors ......................71 Trademark credits Windows™ is trademark of Microsoft Corporation. Page iv © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 7 B800-00-880 Issue A This page has been intentionally left blank. Page v © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 8: Introduction

    Introduction Scope and definitions This manual provides installation, operation, maintenance and storage instructions for the Edwards nEXT Turbomolecular Pumps. You must use the nEXT pumps as specified in this manual. If you do not, the protection provided by the nEXT pumps may be impaired.

  • Page 9: General Description

    To operate the nEXT pump you must connect it to your own control equipment and power supply or alternatively use the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller.

  • Page 10: Pump Controller

    70% of full speed. Note that in order for standby speed to be selected, the pump must also be in the start condition. © Edwards Limited 2009. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 11: Timer

    1.4.5 Automatic vent options An Edwards TAV vent valve can be connected directly to the nEXT pump’s controller. The controller is capable of providing a number of different venting options. The drive electronics can control the rate of venting. Using this feature the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings.

  • Page 12: Normal Speed Setting

    The simple parallel interface is a quick and easy way to control the pump; this is the same interface used on existing 24V Edwards Turbo Pumps. The controls that are available to use are Start and Standby. You can monitor the system status using the Normal, Fail and Analogue output signals.

  • Page 13: Serial Control With Parallel Monitoring

    To configure the nEXT pump, either use your own simple serial system or use the Edwards TIC Turbo Controller or Turbo Instrument Controller. The TICs have a feature which allows storage of a nEXT pump’s configuration. The configuration can then be downloaded to another nEXT pump.

  • Page 14: Technical Data

    Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor temperatures and will shorten the life of the pump. © Edwards Limited 2009. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 15 3 x 10 1 x 10 1 x 10 1 x 10 1 x 10 1.5 x 10 1.5 x 10 Page 8 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 16 Table 5 - nEXT 400 pumps technical data nEXT400D nEXT400D nEXT400T nEXT400T Parameter ISO160 CF160 ISO160 CF160 Mass 6.5kg 9.5kg 6.8kg 9.8kg Inlet Flange DN160ISO-K DN160CF DN160ISO-K DN160CF © Edwards Limited 2009. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 17 Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump. Note: Pumping speeds quoted are without an inlet screen Page 10 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 18 Table 6 - nEXT pumps technical data Parameter nEXT240D nEXT240T nEXT300D nEXT300T nEXT400D nEXT400T Critical Backing Pressure N 9.5 mbar 20 mbar 9.5 mbar 20 mbar 10 mbar 20 mbar Critical Backing Pressure He 7 mbar 8.5 mbar 7.5 mbar 8.5 mbar 8.5 mbar 8.5 mbar...

  • Page 19: Next240 Performance Curve

    B800-00-880 Issue A Figure 1 - nEXT240 Performance Curve Figure 2 - nEXT300 Performacne Curve Page 12 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 20 B800-00-880 Issue A Table 7 - nEXT400 Performance Curve © Edwards Limited 2009. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 21: Next 240D Dimensions (Mm)

    11. Electrical drive unit 5. Base mounting holes and fan mountings 12. Envelope vent port 1/8” BSP 6. Booster port B Page 14 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 22: Next 300D Dimensions (Mm)

    11. Electrical drive unit 5. Base mounting holes and fan mountings 12. Envelope vent port 1/8” BSP 6. Booster port B © Edwards Limited 2009. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 23: Next 400D Dimensions (Mm)

    5. Base mounting holes and fan mountings 11. Electrical drive unit 6. Booster port B 12. Envelope vent port 1/8” BSP Page 16 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 24: Vent Gas Specification And Vent Control Data

    Figure 6 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full rotational speed) © Edwards Limited 2009. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 25: Purge Gas Specification

    Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, rare earth magnets, silicon nitride, carbon-fibre reinforced epoxy resin, fire retardant polypropylene, polyamide, PVC, Titanium, Silicon, Torlon and Ceramic. Page 18 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 26: Electrical Data

    B800-00-880 Issue A Electrical data nEXT pumps can be driven either by your own system or by the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller. If you wish to use your own system, the size of the power supply required depends on your application. The power limit setting determines how quickly you can ramp up the pump and dictates the size of power supply you will need.

  • Page 27: Controller Connector Socket

    The connector is intended to drive a vent valve or fan connected to the three pins. The connector mating plug is shown in Figure 7, with the polarity of the pins marked when the vent valve/fan is energised. Page 20 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 28: Maximum Allowed Rate Of Pressure Rise During Venting: Pressure Against Time (With Pump Initially At Full Rotational Speed) 17 7 Controller Connector Showing Pin Numbers

    Current output 120 mA Figure 7 - Controller Connector showing pin numbers Pin Number Signal Polarity 24Vdc Out Chassis 24Vdc Rtn © Edwards Limited 2009. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 29: Interface Circuits For Next Turbo Pump Controllers

    B800-00-880 Issue A Figure 8 - Interface circuits for nEXT turbo pump controllers Page 22 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 30: Indicator Leds

    Ambient operating humidity range 10 to 90% RH (non-condensing) Maximum operating altitude 2000 m Ambient storage temperature range -30 °C to 70 °C © Edwards Limited 2009. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 31 B800-00-880 Issue A This page has been intentionally left blank. Page 24 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 32: Installation

    A typical pumping system with a nEXT pump is shown in Figure The accessories available for the nEXT pumps are detailed in Section 7.4; the accessories are shown in Figure 18 © Edwards Limited 2009. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 33: Connection To The Vacuum System

    7. Vacuum gauge 15. PRX purge restrictor 8. Flexible bellows 16. Regulated purge gas supply 9. Foreline trap 17. WCX water-cooler and connections Page 26 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 34: Inlet-Screen (Supplied Fitted On Cf Only)

    If they are not already in place, the tangs must be snapped into the locating groove in the inlet-flange using a suitable tool to press them into position. For ISO flanged pumps, Edwards supply a combined inlet screen / trapped O-ring. 3.3.2...

  • Page 35: Base Mounting

    B800-00-880 Issue A If the pump has an ISO flange, use the Edwards combined inlet screen and trapped O-ring supplied with the  pump and use a minimum of four claw clamps (each torqued to 30 Nm) to connect the inlet-flange of the pump to the vacuum system.

  • Page 36: Interstage Connection (Variants Only)

    Connect the logic interface to the TIC If you are using the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller to power and control your pump, the nEXT pump logic interface cable connects directly into the back of the TIC. Refer to the TIC Instruction Manual for further information.

  • Page 37: Connect The Logic Interface To Your Control Equipment

    Be aware that other electrical equipment connected to the system could introduce a connection between 0V and earth, for example a personal computer or measuring equipment. Page 30 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 38: Connection For Parallel Control And Monitoring

    2. To monitor Analogue Output, connect your control equipment to the pump Analogue Output (pin 9) and to pin 2 of your logic interface mating half. © Edwards Limited 2009. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 39: Connection For Serial Control And Monitoring

    Sliding the switch to the right will enable RS232 serial interface and to the left will enable RS485 serial interface. The controller default setting is RS232 serial interface. Page 32 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 40: Controller Status Information

    The software in the nEXT pump is capable of operating with several pumps connected to a single serial link master. This is referred to as multi-drop mode. The RS485 option is recommended for multidrop mode. With the RS232 option © Edwards Limited 2009. All rights reserved. Page 33 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 41: Serial Enable

    Serial Enable acts as an interlock for commands sent over the Serial Interface. If the pump is running (having been sent a Serial Start command) and the Serial Enable subsequently becomes inactive, the pump will trigger a fail Page 34 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 42: Serial Protocol

    Figure 14 - Conceptual diagram for multi-drop connection using RS232 interface RS232 interface on control equipment nEXT pump Buffer OR gate © Edwards Limited 2009. All rights reserved. Page 35 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 43: Message Structure

     The message protocol in multi-drop mode is marginally different, refer to Section 3.7.7. Page 36 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 44: Command Set

    Reset all configuration options and parameters to the factory settings PIC software ?S868 string chars Boot loader software version number version (D374796XXX) © Edwards Limited 2009. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 45 Missing parameter Parameter out of range Invalid command in current state - e.g. serial command to start/stop when in parallel control mode Page 38 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 46: Simultaneous Parallel And Serial Operation

    4. Optional LED indicator - system OK 11. Optional standby switch 5. Optional LED indicator - normal speed 12. Start switch 6. Current limit resistor for LED © Edwards Limited 2009. All rights reserved. Page 39 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 47: Multi-Drop Operation

    Use a TAV5 or TAV6 solenoid valve in place of the manual vent valve on the pump  Use a TAV5 or TAV6 solenoid valve connected to a convenient flange on your vacuum system  Page 40 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 48: Controlled Venting

    If you are controlling your nEXT pump with an Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller, you can drive your TAV solenoid valve from the TIC. Refer to the TIC Instruction Manuals for more information.

  • Page 49: Alternative Valve Connected To The Vacuum System

    (60 cfm). The air-cooler can be powered by your own external power supply, the Edwards TIC Turbo and Instrument Controller, the TIC Turbo Controller or by the nEXT Controller. It cannot be powered by the controller if a TAV solenoid valve is already connected to the Controller.

  • Page 50: Water-Cooling

    Figure 16 for recommendations. Figure 17 - Maximum relative humidity to avoid condensation with water cooling © Edwards Limited 2009. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 51 B800-00-880 Issue A This page has been intentionally left blank. Page 44 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 52: Operation

    To configure the nEXT pump you could use your own serial system. Section 4.1 details the commands that you will need to configure the Controller. Alternatively you could use the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Further information regarding this is detailed in Section 4.2.

  • Page 53: Powering A Fan From The Controller

    To check what Venting Option is set, you can send a query as follows: Command The reply you receive will be in the following format: Reply Page 46 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 54: Standby Speed Setting

    To check what Normal Speed is set, you can send a query as follows: Command The reply you receive will be as follows: Reply © Edwards Limited 2009. All rights reserved. Page 47 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 55: Timer Setting And Options

    To check whether the Timer is enabled or disabled, send the following query: Command The reply you receive will be as follows (where d=0 means disabled and d=1 means enabled): Reply Page 48 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 56: Analogue Signal Options

    Send the following command to assign a multi-drop address (where the 'd' characters represent the address): Command © Edwards Limited 2009. All rights reserved. Page 49 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 57: Configuring The Next Pump Using A Tic

    Configuring the nEXT pump using a TIC The nEXT pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. It is possible to set the following parameters of the nEXT pump using the TIC: Power limit setting ...

  • Page 58: Start-Up

    If the LEDs do not light up as expected, or if the red or yellow LED begins to flash a repeated sequence , refer to Section 5.5. © Edwards Limited 2009. All rights reserved. Page 51 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 59: Operation With Parallel Control And Monitoring

    This command overrides the current vent option and closes the vent valve. There is no open vent valve command but when you send a stop command to the pump the override is cleared. Page 52 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 60: Start The Pump

    The reply you receive will be as follows, where the first number is the motor temperature and the second number the internal Controller temperature, both measured in °C: © Edwards Limited 2009. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 61: Link Parameter Readings

    Operation with a TIC For operation with an Edwards Turbo Instrument Controller or TIC Turbo Controller, the nEXT pump can be connected directly to this type of unit, which will provide the power necessary to drive the nEXT pump. Instructions on the set up and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397-00-879 which is supplied with the TIC or TIC Turbo Controller.

  • Page 62: Operation At Extreme Conditions

    Controller automatically shuts down power to the pump-motor and slows it down to rest. The Controller will signal a Fail condition if over-speed has been detected. If you suspect that your pump may be running at over-speed you should switch it off and consult Edwards or your supplier.

  • Page 63: Bakeout

    If you heat the pump, this will also prevent condensation of vapours inside the pump. The Edwards BX bakeout band may be used to heat the pump (refer to Section 7.4). Fit the appropriate band around the pump, just below the CF inlet-flange.
  • Page 64 Any Fail signals that were triggered during the regenerative power period are lost when the power is reinstated. © Edwards Limited 2009. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 65 B800-00-880 Issue A This page has been intentionally left blank. Page 58 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 66: Maintenance

    Section 7.2) Rotor life The fatigue life of nEXT Turbo-pump rotors is typically 40,000 to 50,000 cycles. As a precautionary measure, Edwards recommends that pumps are returned for a major service (rotor replacement) after 20,000 cycles of acceleration to full speed and back to a stop, or after ten years of use, whichever occurs first.

  • Page 67: Clean The External Surfaces Of The Pump

    If the nEXT pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum or pump- down time may increase. The pump should be returned to an Edwards Service Centre where the pump will be dismantled and cleaned.
  • Page 68 Is the vibration being transmitted If so, fit flexible bellows or a from the rotary backing pump? vibration isolator in the backing line. © Edwards Limited 2009. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 69 Any other problems Contact your supplier or Edwards Contact your supplier or Edwards. Page 62 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 70: Flashing Service Codes

    Cycle the power to the pump and see disconnected or damaged. whether the error code appears again. If it does, contact your supplier or Edwards. © Edwards Limited 2009. All rights reserved. Page 63 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 71: Decoding System Status Words

    Table 28 - Hexadecimal conversion table Hexadecimal Binary Decimal 0000 0001 0010 0011 0100 0101 0110 0111 1000 1001 1010 1011 1100 1101 1110 1111 Page 64 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
  • Page 72 Bit number We can deduce (in example) The pump has not failed The pump is at rest Speed is below normal speed © Edwards Limited 2009. All rights reserved. Page 65 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 73: Useful Service Information

    Command The reply you will receive is as follows, where String1 is the Boot loader software version number: Reply String 1 Page 66 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 74: Storage And Disposal

    B800-00-880 Issue A Storage and disposal CAUTION Use of non-Edwards spares may result in reduced reliability and performance which will invalidate your warranty Storage Use the following procedure to store the pump. 1. Place protective covers over the inlet, outlet, interstage (for the “i” nEXT only), purge, booster (for the “T”...
  • Page 75 B800-00-880 Issue A This page has been intentionally left blank. Page 68 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 76: Service, Spares And Accessories

    7.2.2 Bearing and oil cartridge on-site maintenance The oil cartridge and bearing of the nEXT pump can be serviced on-site by any service engineer trained by Edwards. The following service tool kits and service parts are available, Service tool kit...

  • Page 77: Spares

    An ACX air-cooler can be fitted to the nEXT pump, refer to Section 3.9 to check the suitability of air-cooling in a particular application. Air-Cooler Item number Page 70 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 78: Wcx Water-Cooler

    Table 32 - Vent restrictors Vent-restrictor Orifice diameter (mm) Item number VRX10 B580-66-021 © Edwards Limited 2009. All rights reserved. Page 71 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 79: Vent-Port Adaptor

    25 sccm. You must fit a vent-port adaptor to the purge-port in order to connect a purge- restrictor to the pump. Item Item Number PRX10 purge restrictor B580-65-001 Page 72 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 80: Next Exploded Accessories View

    1. BX 250 Bake out band (DN100CF envelope shown) 2. BX 250 Bake out band position 3. WCX Water cooling accessory © Edwards Limited 2009. All rights reserved. Page 73 Edwards and the Edwards logo are trademarks of Edwards Limited.

  • Page 81: Next Exploded Accessories View

    8. ACX nEXT air cooler (Radial) 4. TAV Solenoid vent valve 9. ACX nEXT ait cooler (Axial) 5. Purge plug (fitted) Page 74 © Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.

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