Edwards nEXT 240D Instruction Manual

Turbomolecular pumps

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nEXT240D

nEXT240T

nEXT300D

nEXT300T

nEXT400D

nEXT400T

Instruction Manual

nEXT Turbomolecular Pumps

nEXT240, nEXT300 and nEXT400

B800-00-880

Issue D Original

Item Number

B812XXXXX

B813XXXXX

B822XXXXX

B823XXXXX

B832XXXXX

B833XXXXX

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Summary of Contents for Edwards nEXT 240D

Page 1 B800-00-880 Issue D Original Instruction Manual nEXT Turbomolecular Pumps nEXT240, nEXT300 and nEXT400 Description Item Number nEXT240D B812XXXXX nEXT240T B813XXXXX nEXT300D B822XXXXX nEXT300T B823XXXXX nEXT400D B832XXXXX nEXT400T B833XXXXX...
Page 2 Crawley, West Sussex, RH10 9LW, UK declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)* B812 XXXXX nEXT 240D B813 XXXXX nEXT 240T B822 XXXXX nEXT 300D B823 XXXXX...
Page 3: Table Of Contents
Connect the electrical supply ..................34 Connection for parallel control and monitoring ..............36 Connection for serial control and monitoring ..............36 © Edwards Limited 2013. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 4 4.10 Bakeout ........................64 Maintenance ..................67 Introduction ......................67 Bearing and oil cartidge maintenance ................67 Rotor life ......................... 67 Page ii © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 5 Max allowed rate of pressure rise during venting: pressure against time (pump initially at full speed) .. 22 Interface circuits for nEXT turbo pump controllers ...............26 © Edwards Limited 2013. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 6 Inlet flange seals and integrated inlet screens ..............80 NW16 and NW25 ports ....................81 ACX air cooler ......................81 WCX water cooler .......................81 Page iv © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7 Vent restrictors ......................82 Vent port adaptor .......................83 PRX purge restrictor ....................83 C-clamp adaptor tool kit ....................83 C-clamp adaptor port kit ....................83 © Edwards Limited 2013. All rights reserved. Page v Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 9: Introduction
Introduction Scope and definitions This manual provides installation, operation and maintenance instructions for Edwards nEXT Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps. Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed.
Page 10: General Description
The controller controls the electrical supply to the pump with the exception of standby speed control. It has no manual controls and can only be operated through the logic interface. To operate the nEXT pump, connect it to the customer control equipment and power supply or, alternatively, use the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller.
Page 11: Pump Controller
Ensure that the power supply is capable of delivering sufficient power to the nEXT pump. By choosing a lower power limit setting, a smaller power supply may be used. For more information, refer to Section 2.7. © Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12: Standby Speed
1.4.5 Automatic vent options An Edwards TAV vent valve can be connected directly to the nEXT pump’s controller. The controller is capable of providing a number of different venting options. The drive electronics can control the rate of venting. Using this feature the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings.
Page 13: Normal Speed Setting
The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing 24 V Edwards Turbo Pumps. The controls that are available to use are start and standby. The system status can be monitored using the normal, fail and analogue output signals.
Page 14: Serial Control And Monitoring
To configure the nEXT pump, either use a customer simple serial system or use the Edwards TIC Turbo Controller or Turbo Instrument Controller. The TICs have a feature which allows storage of a nEXT pump’s configuration. The configuration can then be downloaded to another nEXT pump.
Page 15 3.7. The TIC PC program has a facility to save multiple nEXT pump configurations which can then be downloaded into other nEXT pumps. © Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17: Technical Data
Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor temperatures and will shorten the life of the pump. © Edwards Limited 2013. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 18: Next 240 Pumps Technical Data
3 x 10 1 x 10 1 x 10 1 x 10 1 x 10 1.5 x 10 1.5 x 10 Page 10 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19: Next 300 Pumps Technical Data
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump. Note: Pumping speeds quoted are without an inlet screen. © Edwards Limited 2013. All rights reserved. Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 20: Next 400 Pumps Technical Data
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump. Note: Pumping speeds quoted are without an inlet screen Page 12 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21: Next Pumps Technical Data
Above these pressures, rotational speed drops below nominal. † Cooling water temperature 15 C at a flow rate of 30 l hr © Edwards Limited 2013. All rights reserved. Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 22: Next240 Performance Curve
B800-00-880 Issue D Figure 1 - nEXT240 performance curve Figure 2 - nEXT300 performance curve Page 14 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23: Next400 Performance Curve
B800-00-880 Issue D Figure 3 - nEXT400 performance curve © Edwards Limited 2013. All rights reserved. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 24: Next 240 Dimensions (Mm)
B800-00-880 Issue D Figure 4 - nEXT 240 dimensions (mm) Page 16 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25 11. Electrical drive unit 5. Booster port B 12. Envelope vent port ⅛ inch BSP 6. Interstage port 13. Envelope vent © Edwards Limited 2013. All rights reserved. Page 17 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 26: Next 300 Dimensions (Mm)
B800-00-880 Issue D Figure 5 - nEXT 300 dimensions (mm) Page 18 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 27 11. Electrical drive unit 5. Booster port B 12. Envelope vent port ⅛ inch BSP 6. Interstage port 13. Envelope vent © Edwards Limited 2013. All rights reserved. Page 19 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 28: Next 400 Dimensions (Mm)
B800-00-880 Issue D Figure 6 - nEXT 400 dimensions (mm) Page 20 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 29 11. Electrical drive unit 5. Booster port B 12. Envelope vent port ⅛ inch BSP 6. Interstage port 13. Envelope vent © Edwards Limited 2013. All rights reserved. Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 30: Vent Gas Specification And Vent Control Data
Figure 7 Figure 7 - Max allowed rate of pressure rise during venting: pressure against time (pump initially at full speed) Page 22 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 31: Purge Gas Specification
O-rings, hydrocarbon lubricant, rare earth magnets, silicon nitride, carbon fibre reinforced epoxy resin, fire retardant polypropylene, polyamide, PVC, Titanium, Silicon, Torlon and Ceramic. © Edwards Limited 2013. All rights reserved. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 32: Electrical Data
B800-00-880 Issue D Electrical data nEXT pumps can be driven either by the customer system or by the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller. If using the customer system, the size of the power supply required depends on the application. The power limit setting determines how quickly the pump ramps up and dictates the size of the power supply required.
Page 33: Logic Interface Connector Pins
Logic low when pump rotational speed is at normal speed or above 8, 13, 14 Electrical supply: 0 V 1, 6, 11 Electrical supply: 24-48 V Positive © Edwards Limited 2013. All rights reserved. Page 25 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 34: Interface Circuits For Next Turbo Pump Controllers
B800-00-880 Issue D Figure 8 - Interface circuits for nEXT turbo pump controllers Page 26 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 35: Controller Connector Socket
Figure 9 - Controller connector showing pin numbers Pin number Signal Polarity 24 V d.c. Out Chassis 24 V d.c. Rtn © Edwards Limited 2013. All rights reserved. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 36: Indicator Led's
Ambient operating humidity range 10 to 90% RH (non-condensing) Maximum operating altitude 3000 m Ambient storage temperature range -30 °C to 70 °C Page 28 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 37: Installation
The accessories available for the nEXT pumps are detailed in Section 7.4; the accessories are shown in Figure 20 and 21. © Edwards Limited 2013. All rights reserved. Page 29 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 38: Connection To The Vacuum System
This will ensure that the pump cannot operate accidentally causing injury. Edwards recommends leak testing the system after installation has been completed. Figure 10 - Typical pumping system with a nEXT pump 1.
Page 39: Inlet Screen (Supplied Fitted On Cf Only)
Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust-free. If the pump inlet is not kept clean, the pump-down time may be increased. © Edwards Limited 2013. All rights reserved. Page 31 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 40: Base Mounting
 complement of bolts to connect the inlet flange of the pump to the vacuum system. If the pump has an ISO flange, use the Edwards combination inlet screen/trapped O-ring supplied with the  pump and use a minimum of four claw clamps (each torqued to 30 Nm) to connect the inlet flange of the pump to the vacuum system.
Page 41: Interstage Connection (Variants Only)
Earth the pump using the connection provided and refer to Section 3.5.2. The nEXT pump can be operated using the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller (refer to Section 3.5.3). The nEXT pump can also be controlled using the customer system. Refer to Section 3.5.4...
Page 42: Earth (Ground) Connections
Connect the logic interface to the TIC If an Edwards TIC Turbo Instrument Controller or a TIC Turbo Controller is used to power and control the pump, the nEXT pump logic interface cable connects directly into the back of the TIC. Refer to the TIC Instruction Manual for further information.
Page 44: Connection For Parallel Control And Monitoring
Sliding the switch to the right will enable RS232 serial interface and to the left will enable RS485 serial interface. The controller default setting is RS232 serial interface. Page 36 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 45: Controller Status Information
15. Conversely when the RS485 option is selected, connecting several nEXT pumps to a single master becomes a simple wiring exercise as shown in Figure © Edwards Limited 2013. All rights reserved. Page 37 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 46: Logic Interface Connections - Rs232 Serial Control
Figure 14 - Logic interface connections - RS485 serial control 1. RS485 interface on control equipment 3. Fuse 2. 24-48 V d.c. electrical supply 4. nEXT pump logic interface Page 38 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 47: Serial Enable
To send a serial message, first activate serial enable. This is achieved by linking the serial enable input signal (pin 5) to pin 2 of the customer logic interface mating half. Edwards recommends incorporating this link into the serial communications cable so that the serial enable is only activated when the serial cable is connected. When the cable is removed, serial enable will become inactive.
Page 48: Conceptual Diagram For Multi-Drop Connection Using Rs232 Interface
Figure 15 - Conceptual diagram for multi-drop connection using RS232 interface 1. RS232 interface on control equipment 3. nEXT pump 2. Buffer 4. OR gate Page 40 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 49: Message Structure
 The message protocol in multi-drop mode is marginally different, refer to Section 3.7.6. © Edwards Limited 2013. All rights reserved. Page 41 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 50: Command Set
Reset all configuration options and parameters to the factory settings PIC software ?S868 string chars Boot loader software version number version (D374796XXX) Page 42 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 51: Command Abbreviations
ASCII character Returned error code - refer to Table 16 space character string may have several ASCII characters © Edwards Limited 2013. All rights reserved. Page 43 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 52: Error Codes
Missing parameter Parameter out of range Invalid command in current state - e.g. serial command to start/stop when in parallel control mode Page 44 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 54: Multi-Drop Operation
7) or that the vent valve is only opened after the nEXT pump speed has fallen to 50% of full rotational speed. Page 46 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 55: Manual Vent Valve
A manual vent valve is supplied with the nEXT pump. It is not possible to accurately control the rate of pressure rise using the manual vent valve so take care not to open it too quickly. Edwards recommends that the manual vent valve is opened only after the pump speed has fallen to 50% of full rotational speed.
Page 56: Alternative Valve Connected To The Vacuum System
- this is known as a delayed start. If the nEXT pump is being controlled with an Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller, the TAV solenoid valve can be driven from the TIC. Refer to the TIC Instruction Manuals for more information.
Page 57: Cooling
(60 cfm). The air cooler can be powered by a customer external power supply, the Edwards TIC Turbo and Instrument Controller, the TIC Turbo Controller or the nEXT Controller. It cannot be powered by the controller if a TAV solenoid valve is already connected to the controller.
Page 58: Maximum Relative Humidity To Avoid Condensation With Water Cooling
Figure 16 for recommendations. Figure 18 - Maximum relative humidity to avoid condensation with water cooling Page 50 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 59: Operation
The nEXT pump can be configured using the customer serial system. Section 4.1 details the commands that will be needed to configure the controller. Alternatively, use the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Further information regarding this is detailed in Section 4.2.
Page 60: Powering A Fan From The Controller
To check the venting option that is set, send a query as follows: Command The reply will be in the following format: Reply Page 52 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 61: Standby Speed Setting
The normal speed is now stored in memory within the nEXT pump. To check what normal speed is set, send a query as follows: Command The reply will be as follows: Reply © Edwards Limited 2013. All rights reserved. Page 53 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 62: Timer Setting And Options
To check whether the timer is enabled or disabled, send the following query: Command The reply will be as follows (where d=0 means disabled and d=1 means enabled): Reply Page 54 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 63: Analogue Signal Options
Send the following command to assign a multi-drop address (where the 'd' characters represent the address): Command © Edwards Limited 2013. All rights reserved. Page 55 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 64: Configuring The Next Pump Using A Tic
Once multi-drop mode is disabled, the pump will no longer respond to multi-drop commands. Configuring the nEXT pump using a TIC The nEXT pump can be configured using the Edwards TIC Turbo and Instrument Controller or TIC Turbo Controller. Refer to Section 3.5.3.
Page 65: Before Starting The Pump
If the LEDs do not light up as expected, or if the red or yellow LED begins to flash a repeated sequence or if the red LED is lit, refer to Section 5.5. © Edwards Limited 2013. All rights reserved. Page 57 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 66: Operation With Parallel Control And Monitoring
This command overrides the current vent option and closes the vent valve. There is no open vent valve command but, when a stop command is sent to the pump, the override is cleared. Page 58 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 67: Start The Pump
The reply will be as follows, where the first number is the motor temperature and the second number the internal controller temperature, both measured in °C: © Edwards Limited 2013. All rights reserved. Page 59 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 68: Link Parameter Readings
Availability of the parallel standby and fail signals depends on the state of the serial enable line and the position of the RS485/RS232 switch as described in Table Page 60 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 69: Serial Enable Matrix
The parallel normal and analogue output signals provide valid pump status information at all times under mixed parallel and serial operation. The analogue output voltages are described in Table © Edwards Limited 2013. All rights reserved. Page 61 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 70: Operation With A Tic
Operation with a TIC For operation with an Edwards Turbo Instrument Controller or TIC Turbo Controller, the nEXT pump can be connected directly to this type of unit, which will provide the power necessary to drive the nEXT pump. Instructions on the setup and operation with the TIC or TIC Turbo Controller can be found on CD ROM part number D397-00-879 which is supplied with the TIC or TIC Turbo Controller.
Page 71: Operation At Extreme Conditions
The controller will signal a fail condition if over-speed has been detected. If the pump appears to be running at over-speed, switch it off and consult Edwards or the supplier. 4.9.4...
Page 72: Bakeout
Heating the pump will also prevent condensation of vapours inside the pump. The Edwards BX bakeout band may be used to heat the pump (refer to Section 7.4). Fit the appropriate band around the pump, just below the CF inlet flange.
Page 73 Any fail signals that were triggered during the regenerative power period are lost when the power is reinstated. © Edwards Limited 2013. All rights reserved. Page 65 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 75: Maintenance
The fatigue life of nEXT Turbomolecular pump rotors is typically 40,000 to 50,000 cycles. As a precautionary measure, Edwards recommends that pumps are returned for a major service (rotor replacement) after 20,000 cycles of acceleration to full speed and back to a stop, or after ten years of use, whichever occurs first.
Page 76: Fault Finding
If the nEXT pump is contaminated inside, it may not be possible to achieve the specified ultimate vacuum or pump- down time may increase. The pump should be returned to an Edwards Service Centre where the pump will be dismantled and cleaned.
Page 77 Is the noise irregular and getting If so, a bearing is defective. Contact progressively worse? the supplier or Edwards. © Edwards Limited 2013. All rights reserved. Page 69 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 78 Any other problems Contact the supplier or Edwards Contact the supplier or Edwards. Page 70 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 79: Flashing Service Codes
= 0 Controller service due Set when hours until controller service due = 0 Reserved Reserved Reserved © Edwards Limited 2013. All rights reserved. Page 71 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 80: Controller Run Time
The reply will be as follows, where the first number is the start-stop cycles completed by the pump and the second is the number of start-stop cycles until service is recommended: Reply Page 72 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 81: Bearing Run Time
In this case, try cycling the power. If cycling the power does not clear the indication, a software download will be required. Contact the supplier or Edwards. If the alarm LED is flashing, identify the error flash code and consult Table There is a sufficient off period between each subsequent cycle repetition to clearly mark the start of a new flash sequence.
Page 82: Decoding System Status Words
Table 29 - Hexadecimal conversion table Hexadecimal Binary Decimal 0000 0001 0010 0011 0100 0101 0110 0111 1000 1001 1010 1011 1100 Page 74 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 83: Status Flag
The system status word used in the example above was obtained with the pump at rest. By decoding the word, we can learn more about the state of the pump. Refer to Table © Edwards Limited 2013. All rights reserved. Page 75 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 84: Useful Service Information
Send the following query to find out the boot loader software version: Command The reply will be as follows, where string1 is the boot loader software version number: Reply String 1 Page 76 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 85: Storage And Disposal
B800-00-880 Issue D Storage and disposal CAUTION Use of non-Edwards spares may result in reduced reliability and performance and will invalidate your warranty. Storage Use the following procedure to store the pump. 1. Place protective covers over the inlet, outlet, interstage (for the ‘i’ nEXT only), purge, booster (for the ‘T’ nEXT only) and vent ports.
Page 87: Service, Spares And Accessories
7.2.2 Bearing and oil cartridge on-site maintenance The oil cartridge and bearing of the nEXT pump can be serviced on-site by any service engineer trained by Edwards. The following service tool kits and service parts are available, Table 32 - Service tool kits...
Page 88: Spares
ISO160 trapped O-ring C105-24-001 DN100CF 100CF copper compression gasket (pack of 5) C082-00-003 DN160CF 160CF copper compression gasket (pack of 5) C083-00-003 Page 80 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 89: Nw16 And Nw25 Ports
Table 39 - WCX water cooler Water Cooler Item Number WCX nEXT water cooling kit B800-00-815 © Edwards Limited 2013. All rights reserved. Page 81 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 90: Bx Bakeout Band
Table 42 - Vent restrictors Vent restrictor Orifice diameter (mm) Item number VRX10 B580-66-021 VRX20 B580-66-022 VRX30 B580-66-023 VRX50 B580-66-024 VRX70 B580-66-025 Page 82 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 91: Vent Port Adaptor
The TIC PC program is a piece of PC-based software that can be used fore retrieving and setting the user configurable parameters in the pump. It also enables monitoring and data logging of the pumping system. © Edwards Limited 2013. All rights reserved. Page 83 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 92: Next Exploded Accessories View
1. BX 250 bake out band (DN100CF envelope shown) 2. BX 250 bake out band position 3. WCX water cooling accessory Page 84 © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 93: Next Exploded Accessories View
8. ACX nEXT air cooler (radial) 4. TAV solenoid vent valve 9. ACX nEXT air cooler (axial) 5. Purge plug (fitted) © Edwards Limited 2013. All rights reserved. Page 85 Edwards and the Edwards logo are trademarks of Edwards Limited.

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Edwards nEXT 240D Instruction Manual

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Service, Spares and Accessories

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