Connect To The Vacuum System; Figure 15 Typical Pumping System With A Next Pump - Edwards nEXT730D Instruction Manual

Figure 15 Typical pumping system with a nEXT pump

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1. Vacuum system 1. Vacuum system
3. Inlet screen 3. Inlet screen
5. Backing valve 5. Backing valve
7. Flexible bellows 7. Flexible bellows
9. Backing pump 9. Backing pump
11. Vent valve 11. Vent valve
13. Radial air cooler 13. Radial air cooler
15. Regulated purge gas supply 15. Regulated purge gas supply
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for rotary pump
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for scroll pump

5.2 Connect to the vacuum system

CAUTION: CUTTING AND CRUSHING
When reaching into open flanges there is a risk of cutting and crushing your fingers.
Do not operate the vacuum pump with open flanges. Do not reach into the pump.
When installing the vacuum pump, first mechanically connect the inlets and outlets
and then make the electrical connections.
CAUTION: VACUUM
Pulling into the vacuum can cause injury to hands or fingers.
Do not operate the vacuum pump with open flanges.
B8J200880_D
300812671_002_C3
B8J200880_D - Installation
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Page 51
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2. High vacuum gauge 2. High vacuum gauge
4. nEXT pump 4. nEXT pump
6. Vacuum gauge 6. Vacuum gauge
8. Foreline trap 8. Foreline trap
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10. Mist filter 10. Mist filter / silencer / silencer
12. Alternative position for vent valve 12. Alternative position for vent valve
14. PRX purge restrictor 14. PRX purge restrictor
16. WCX water cooler and connections 16. WCX water cooler and connections
08/2021 - ©Edwards Limited
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