Important Safety Information; Mechanical Hazards - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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2. Important safety information

2.1 Mechanical hazards

WARNING: EJECTION OF PARTS
If the mounting is not sturdy enough, pump blockage could cause the pump to break
loose; internal pump components could be thrown in all directions.
Mount the pump firmly to the vacuum chamber. Never operate the pump without
proper flanging to the vacuum chamber (in bench testing, for example). In case of
rotor destruction a sudden twisting of the entire pump is possible. The vacuum
chamber must be able to absorb the torque of max. 5 kNm (nEXT730/930D) and 9
kNm (nEXT1230H) around the rotor's axis of rotation in the event of sudden rotor
destruction.
CAUTION: CUTTING AND CRUSHING
When reaching into open flanges there is a risk of cutting and crushing your fingers.
Do not operate the vacuum pump with open flanges. Do not reach into the pump.
When installing the vacuum pump, first mechanically connect the inlets and outlets
and then make the electrical connections.
Disconnect the vacuum pump from the power supply before servicing. Only use
trained service personnel.
Before servicing, ensure that gas cannot flow through the pump. Only open the pump
system when it is under atmospheric pressure.
CAUTION: EJECTION OF PARTS
Ejection of parts through bursting of vacuum system as a result of excessive pressure.
When using the pump with purge gas, protect the purge gas supply such that in the
event of a malfunction no overpressure can occur within the system. The pressure in
the pump must not exceed 1.4 bar (absolute).
CAUTION: VACUUM
Pulling into the vacuum can cause injury to hands or fingers.
Do not operate the vacuum pump with open flanges.
CAUTION: FALLING PARTS
Errors during transport can cause the pump to fall down.
Transport the pump only in its transport packaging or at the eye-bolts provided for
this purpose.
B8J200880_D
300812671_002_C3
B8J200880_D - Important safety information
Page 10
08/2021 - ©Edwards Limited

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