User Manuals: Edwards EXT555H Turbomolecular Pump

Manuals and User Guides for Edwards EXT555H Turbomolecular Pump. We have 2 Edwards EXT555H Turbomolecular Pump manuals available for free PDF download: Instruction Manual

Edwards EXT555H Instruction Manual (70 pages)

EXT Pump Accessories

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents
3
Introduction

7
BX Bakeout Band

13
- Description
  13
- Technical Data
  13
- Installation
  14
- Unpack and Inspect
  14
- Fit the BX Bakeout Band to the Pump
  14
- Electrical Connection to an EXC Controller
  14
- Electrical Connection to a TIC Relay Box
  14
- Electrical Connection to an Independent Electrical Supply
  14
- Operation
  15
ACX Air-Cooler

17
TAV Vent-Valve

39
- Description
  39
- Technical Data
  39
- Installation
  40
- Unpack and Inspect
  40
- TAV Vent-Valve Dimensions (MM)
  40
- Fit the TAV Vent-Valve to the Pump
  41
- Electrical Connection
  41
- Operation
  41
- TAV Vent-Valve Connections
  42
Vibration Isolator

43
- Description
  43
- Technical Data
  43
- Installation
  44
- Unpack and Inspect
  44
- Fit the Vibration Isolator
  44
- Vibration Isolator Installation
  45
Inlet Screens

47
- Description
  47
- Technical Data
  47
- Installation
  47
- Unpack and Inspect
  47
- Fit or Remove the Inlet-Screen
  48
- ISX Inlet-Screen
  48
- ISDX Inlet-Screen
  48
- ISHX Inlet-Screen
  49
PRX10 Purge-Restrictor

51
- Description
  51
- Technical Data
  51
- Installation
  51
- Unpack and Inspect
  51
- Fit the Purge-Restrictor
  52
- Operation
  52
- General
  52
- Calibration of the PRX10 for Different Purge Gases
  52
Pump-To-Controller Cable

55
- Description
  55
- Technical Data
  55
- Installation
  55
- Unpack and Inspect
  55
- Connect the Pump-To-Controller Cable
  55
Vent-Port Adaptor

57
- Description
  57
- Technical Data
  59
- Installation
  59
- Unpack and Inspect
  59
- Connect the Vent-Port Adaptor
  59
- Vent-Port Adaptor
  59
- Extended Vent-Port Adaptor
  59
VRX Vent - Restrictor

61
- VRX Vent-Restrictor
  61
- Description
  61
- Technical Data
  61
- Installation
  61
- Unpack and Inspect
  61
- VRX Vent-Restrictor Selection
  61
- Fit the Vent-Restrictor
  62
WCX Water-Cooler

63
- Description
  63
- Technical Data
  63
- Installation
  63
- Unpack and Inspect
  63
- WCX555 Water-Cooler Dimensions (MM)
  64
- WCX555 Water-Cooler Installation
  65
- Fit the Water-Cooler to the Pump
  66
- Operation
  66
Maintenance

67
Storage and Disposal

69
- Storage
  69
- Disposal
  69

Edwards EXT555H Instruction Manual (38 pages)

Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents
3
Introduction
7
Scope and Definitions
7
Technical Data
9
General
9
Pumping Media
9
General Information
9
Pumps Without Gas Purge
10
Pumps with Gas Purge
10
Vent Gas Specification and Vent Control Data
11
Purge Gas Specification
11
Water Cooling
11
Vent Gas and Vent Control Data
11
Cooling Water Specification
11
Materials Exposed to Gases Pumped
12
Technical Data
12
Installation
15
Unpack and Inspect
15
List of Items Supplied
15
Typical Pumping System
16
Typical Installation
17
Connection to the Vacuum System
17
Inlet Screens (Supplied Fitted)
17
Inlet Connection
19
Backing Connection
19
Interstage Connection (Hi Pump Variants Only)
19
Vent Options, Vent Valve Connection and Control
20
Do Not Remove Screws 'B' 12 3 Maximum Rate of Pressure Rise When Venting
20
Purge Gas Connection
21
Connect the Purge Gas
21
Recommended Purge Gas Flow
21
Electrical Installation
21
Vent Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet)
21
Dimensions and Features of EXT555H Pumps
22
Cooling
23
Introduction
23
Forced Air Cooling
23
Water Cooling
23
Magnetic Fields
24
Operation
25
Start up
25
Stand-By
25
Shut-Down
25
Safety Interlocks and Control System
26
Bakeout (Conflat Only)
26
Maintenance
27
Introduction
27
Bearing Maintenance
27
Clean the Pump
27
Fault Finding
28
Storage and Disposal
31
Storage
31
Disposal
31
Service, Spares and Accessories
33
Introduction
33
Service
33
Spares
33
ISX Inlet-Screen
33
Inlet-Strainer (Ext555Hi Pump Only)
34
Inlet-Flange Seals
34
Accessories
34
Installation
34
EXC Controller
34
Installation of EXT555H Optional Accessories and Spares
35
Pump-To-Controller Cable
36
EXDC Drive Modules
36
BX Bakeout Band (Conflat Only)
36
FL20K Foreline Trap
36
BX Bakeout Band
36
TAV Vent-Valve and Vent-Port Adaptor
37
ACX Air-Cooler
37
WCX Water-Cooler
37
Vibration Isolators
37
PRX Purge-Restrictor
38
VRX Vent-Restrictor
38

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More Edwards Manuals

User Manuals: Edwards EXT555H Turbomolecular Pump

Edwards EXT555H Instruction Manual (70 pages)

Table of Contents

Introduction

BX Bakeout Band

ACX Air-Cooler

TAV Vent-Valve

Vibration Isolator

Inlet Screens

PRX10 Purge-Restrictor

Pump-To-Controller Cable

Vent-Port Adaptor

VRX Vent - Restrictor

WCX Water-Cooler

Maintenance

Storage and Disposal

Edwards EXT555H Instruction Manual (38 pages)

Table of Contents

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