Mount The Pump - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
Table of Contents

Advertisement

5.2.3 Mount the pump

WARNING: EJECTION OF PARTS
If the mounting is not sturdy enough, pump blockage could cause the pump to break
loose; internal pump components could be thrown in all directions.
Mount the pump firmly to the vacuum chamber. Never operate the pump without
proper flanging to the vacuum chamber (in bench testing, for example). In case of
rotor destruction a sudden twisting of the entire pump is possible. The vacuum
chamber must be able to absorb the torque of max. 5 kNm for the nEXT730/930D
and of max. 9 kNm for the nEXT1230H around the rotor's axis of rotation in the event
of sudden rotor destruction.
If a pump fails it is likely to eject parts into the vacuum system onto which it is
mounted. The customer must ensure that a hazard is not created should this occur.
Make sure that the pump inlet and all components fitted to the pump inlet are clean and
dust- free. If the pump inlet is not kept clean, the pump-down time may be increased.
The inlet connections for the nEXT pumps are either ISO flange or CF flange.
If the pump has a CF flange, use the copper compression gasket supplied with the
pump and use a full complement of bolts to connect the inlet flange of the pump
to the vacuum system. Screws with a minimum Grade 8.8 or A2(A4)-70 are
necessary. Lubricate and tighten the screws stepwise to a torque of 15
If the pump has an ISO-K flange, use the Edwards combination inlet screen/
trapped O- ring supplied with the pump and use a minimum of
Alternatively, use a rotatable collar and the combined inlet screen and trapped O-
ring supplied with the pump to connect the inlet flange of the pump to the vacuum
system; use a full complement of minimum ISO class 8.8 bolts. Tighten the bolts
stepwise to a torque of 35
If the pump has an ISO-F flange, use the Edwards inlet screen supplied with the
pump, a centering ring with O-ring and use a minimum of 12 bolts M10 (Bolt
quality: 8.8 according to EN ISO 898-1 with coating, each torqued to 35
connect the inlet flange of the pump to the vacuum system.
All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure that
no torques or other forces are transmitted to the pump from the vacuum system or the
associated pipelines.
B8J200880_D
300812671_002_C3
B8J200880_D - Installation
12 claw clamps for the nEXT730/930D with a minimum yield strength of
2
380 N/mm
. Tighten the claw clamps with a torque of 20
18 claw clamps for the nEXT1230H with a minimum yield strength of
2
500 N/mm
. Tighten the claw clamps with a torque of 27
12 claws for the nEXT730/930D with bolts of a minimum ISO class 8.8.
Tighten the screws stepwise to a torque of 35
Mounting of the nEXT1230H with claws is not allowed.
+5
Nm.
Page 54
+2
Nm.
+3
Nm.
+3
Nm.
+5
Nm.
+5
Nm) to
08/2021 - ©Edwards Limited

Advertisement

Table of Contents
loading

This manual is also suitable for:

Next930dNext1230h

Table of Contents