Edwards nEXT730D Instruction Manual page 7

Turbomolecular pumps
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List of Figures
Figure 1: nEXT Model overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Figure 2: Pumping speed curves for nEXT730D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Figure 3: Pumping speed curves for nEXT930D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 4: Pumping speed curves for nEXT1230H. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Figure 5: Dimensional drawing for nEXT730-930D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 6: Dimensional drawing for nEXT1230H. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Figure 9: Cooling requirements for nEXT730D/930D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Figure 10: Cooling requirements for nEXT1230H. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 11: Interface circuits for nEXT turbo pump controllers. . . . . . . . . . . . . . . . . . . . . . . 37
Figure 13: RS485 multi-drop connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Figure 14: Valve connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
Figure 15: Typical pumping system with a nEXT pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Figure 16: Connections and controls. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Figure 17: Mounting orientation for nEXT1230H. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Figure 18: Mounting orientation for nEXT1230H INV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Figure 19: Controller view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Figure 20: Power supply connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Figure 21: Logic interface connections - parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Figure 23: Logic interface connections - RS232 serial control. . . . . . . . . . . . . . . . . . . . . . . . 61
Figure 24: Logic interface connections - RS485 serial control. . . . . . . . . . . . . . . . . . . . . . . . 61
Figure 26: Attaching the water cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Figure 27: Serial and parallel control flowchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
B8J200880_D
300812671_002_C3
Page 7
08/2021 - ©Edwards Limited

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