The Pump Is Very Noisy Or There Is Excessive Vibration Or Both; No Serial Comms; Fail Signal Or Standby Signal Not Working - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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Cause
The inlet pressure is poor.
▪ Remove the pump from the system and test the ultimate pressure of the
Remedy
pump alone (refer to ).
▪ If inlet pressure is poor, check the pump for contamination and refer to .
▪ Leak test the pump. If the leak rate > 1x10
contact the supplier or Edwards.
Fault

The pump is very noisy or there is excessive vibration or both

Cause
The pump rotational speed is the same as the resonant frequency of the attached
system.
Remedy
Change the natural frequency of the system or isolate the pump using flexible
bellows.
Cause
The vibration is being transmitted from the rotary backing pump.
Remedy
Fit flexible bellows or a vibration isolator in the backing line.
Cause
The noise is irregular and getting progressively worse.
Remedy
There is a defective bearing. Contact the supplier or us.
Cause
The pump is making a constant high pitched noise.
Remedy
The rotor is out of balance. Contact the supplier or us.
Fault

No serial comms

Cause
No electrical supply, loss of serial link.
Remedy
Check that the electrical supply is on, that the serial link is connected and that the
serial enable line is active.
Cause
Slide switch is not in the correct position for RS232 or RS485.
▪ Check that the electrical supply is on, that the serial link is connected and
Remedy
that the serial enable line is active.
▪ Left for RS485, right for RS232.
▪ Right for parallel control and monitoring.
Cause
Incorrect baud rate and node address.
Remedy
Check baud rate and, if operating in multi-drop mode, the node address matches
those of the pump.
Cause
Check that the red light is not on or flashing.
Remedy
If LED is on, perform the checks against the red alarm LED symptoms
Fault

Fail signal or standby signal not working

Cause
The serial enable line is inactive.
Remedy
Must be disconnected or driven high for use of standby and fail lines.
Cause
Slide switch is not in the correct position for RS232 or RS485.
Remedy
Left for RS485, right for RS232.
Right for parallel control and monitoring.
B8J200880_D
300812671_002_C3
B8J200880_D - Fault finding
Page 98
-7
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mbar l s
(1x10
Pa l s
08/2021 - ©Edwards Limited
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),

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