Backing Port Connection; Purge Gas Connection; Recommended Purge Gas Flow; Connect The Purge Gas - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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5.2.4 Backing port connection

The pump is suitable for use with Edwards Rotary Vane, Scroll or diaphragm backing
pumps. System performance may depend upon which pump is used. Contact Edwards
when selecting an appropriate backing pump for the application.
WARNING:
Ensure safe ducting of the backing line if oil mist or hazardous substances are
present.
CAUTION:
The pump must not be operated or vented from a positive pressure gas supply when
the backing line is restricted or blocked.
NOTICE:
Do not use the pump with a backing pressure below 5 x 10
Lower backing pressures will increase the evaporation rate of the lubrication reducing
the bearing life.
Use suitable vacuum tubing and connectors to connect the flange of the backing port to
the backing pump. If necessary, use flexible pipe or bellows to reduce the transmission
of vibration from the backing pump to the pump.

5.3 Purge gas connection

5.3.1 Recommended purge gas flow

The recommended purge gas flow for typical applications is 25 sccm (0.42 mbar l s
-1
42 Pa l s
The flow rate of the purge gas must be limited to the allowed range. To limit the flow
rate, use a flow controller or a pressure regulator and calibrated flow restrictor. The
PRX10 purge restrictor accessory (refer to Accessories) is suitable for this purpose.

5.3.2 Connect the purge gas

Connect a purge gas supply to protect the pump.
1.
To supply a purge gas to the pump, remove the plug fitted in the purge port.
2.
To fit a vent port adaptor (refer to Accessories).
3.
Connect the purge gas supply to the vent port adaptor.

5.4 Electrical installation

Always make the electrical connections to the pump after the pump has been installed
on the vacuum system.
Do not remove the motor controller from the pump. There are no user-serviceable
parts.
B8J200880_D
300812671_002_C3
B8J200880_D - Installation
).
Page 55
-4
-2
mbar (5 x 10
Pa).
-1
08/2021 - ©Edwards Limited
,

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