Shut Down The Pump Manually - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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CAUTION:
Do not touch the flange heater or surrounding surfaces during the bakeout process as
they will be hot.
NOTICE:
Pumps with ISO flanges are not suitable for bakeout, only pumps with CF flanges
must be used. When baking the pump to above 70 °C at the inlet flange, the pump
must be water cooled to prevent damage to the bearing lubricant.
The Edwards flange heater may be used to heat the pump (refer to Accessories). Fit the
appropriate band around the pump CF inlet flange. When baking the pump or the
system, make sure that the temperature of the inlet flange does not exceed the values
specified in .
When baking the vacuum system, if the temperature of the system exceeds 200 °C, put a
radiation shield between the system and the pump. This radiation shield will reduce the
heat radiated onto the pump rotor.
Typically, a bakeout of four hours is long enough to remove water condensation from the
pump. However, the bakeout time will depend on the amount of condensation in the
pump and the vacuum system, and the ultimate pressure desired.

7.10 Shut down the pump manually

Note:
In an emergency only, open the vent valve quickly to decelerate the pump rotor in the
shortest possible time.
Use this procedure to shut down a basic, manually-controlled pumping system with a
manual vent valve.
1.
Turn off the pump, but keep the backing-pump on and backing valve open.
2.
When speed has fallen to 50%, open the vent valve.
3.
When the pump reaches standstill, the vent valve and backing valve may be closed
and backing pump switched off.
B8J200880_D
300812671_002_C3
B8J200880_D - Operation
Page 88
08/2021 - ©Edwards Limited

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