Edwards EXT75DX Manuals

Manuals and User Guides for Edwards EXT75DX. We have 2 Edwards EXT75DX manuals available for free PDF download: Instruction Manual

Edwards EXT75DX Instruction Manual (72 pages)

EXT Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 2.01 MB

Table of Contents
5
1 Introduction

9
- Scope and Definitions
  9
- General Description
  10
- Drive Electronics
  10
- Operational Features
  11
- Power Limit Setting
  11
- Standby Speed
  11
- Timer
  11
- Analogue Output
  12
- Automatic Vent Options
  12
- Normal Speed Setting
  12
- Electronic Braking
  13
- Logic Interface
  13
- Parallel Control and Monitoring
  13
- Full Serial Control
  14
- Serial Control with Parallel Monitoring
  14
- Parallel Control with Occasional Serial Monitoring or Serial Setup
  14
- Podule Configuration (Serial Setup)
  14
2 Technical Data

15
- General
  15
- Pumping Media
  15
- Purge Gas Specification
  16
- Vent Gas Specification and Vent Control Data
  19
- Purge Gas Specification
  20
- Cooling Water
  20
- Materials Exposed to Gases Pumped
  20
- Electrical Data
  21
- Logic Interface Connector
  21
- Podule Connector Socket
  22
- Podule Technical Data
  23
- Indicator Leds
  24
- Operating and Storage Environment
  24
3 Installation

25
- Unpack and Inspect
  25
- Typical Installation
  25
- Connection to the Vacuum System
  25
- Inlet Screen (Supplied Fitted)
  27
- Mechanical Fixing
  27
- Inlet Connection and Orientation
  27
- Base Mounting
  28
- Backing Connection
  28
- Interstage Connection (IDX Variants Only)
  29
- Purge Gas Connection
  29
- Connect the Purge Gas
  29
- Recommended Purge Gas Flow
  29
- Electrical Installation
  29
- Introduction
  29
- Earth (Ground) Connections
  30
- Connect the Logic Interface to the TIC
  30
- Connect the Logic Interface to the Customer Control Equipment
  30
- Connect the Electrical Supply
  30
- Parallel Interface Mode
  31
- Serial Interface Mode
  32
- Connect the Serial Interface to the Customer Control Equipment
  32
- Serial Enable
  33
- Serial Protocol
  33
- Message Structure
  34
- Command Set
  35
- Simultaneous Parallel and Serial Operation
  35
- Multi-Drop Mode
  38
- Vent Options, Vent Valve Connection and Control
  39
- Manual Vent Valve
  39
- TAV5 or TAV6 Solenoid Vent Valve
  39
- Controlled Venting
  39
- Alternative Valve Connected to the Vacuum System
  40
- Cooling
  41
- Introduction
  41
- Forced Air Cooling
  41
- Water Cooling
  41
4 Operation

43
- Configuring the DX Pump Using Serial Commands
  43
- Power Limit Setting
  43
- Powering a Fan from the Podule
  44
- Controlled Venting Options
  44
- Standby Speed Setting
  45
- Normal Speed Setting
  45
- Timer Setting and Options
  46
- Analogue Signal Options
  47
- Electronic Braking Options
  47
- Factory Settings
  48
- Assigning a Multi-Drop Address
  48
- Configuring the DX Pump Using a TIC
  49
- Start-Up
  49
- Close the Vent Valve
  49
- Pre-Start Checks
  50
- Operation with Parallel Control and Monitoring
  50
- Start the Pump
  50
- Running at Standby Speed
  50
- Stop the Pump
  50
- Parallel Monitoring
  51
- Operation with Serial Control and Monitoring
  51
- Delayed Start
  51
- Start the Pump
  51
- Standby Speed
  51
- Stop the Pump
  52
- Temperature Readings
  52
- Link Parameter Readings
  52
- Measured Motor Speed
  52
- Simultaneous Parallel and Serial Operation
  53
- Operation with a TIC
  53
- Decelerating and Venting
  53
- Operation at Extreme Conditions
  53
- Operation with High Inlet Pressure
  53
- Operation at High Temperatures
  54
- Operation at Over-Speed
  54
- Electrical Supply Failure
  54
- Bakeout
  55
- Behaviour of a Pump When the Power Is Re-Instated after an Electrical Supply Failure
  56
5 Maintenance

57
- Introduction
  57
- Bearing Maintenance
  57
- Rotor Life
  57
- Clean the External Surfaces of the Pump
  57
- Fault Finding
  58
- Flashing Error Codes
  60
- Decoding System Status Words
  60
- Hexadecimal Conversion Table
  61
- Example Decoding of System Status Words
  62
- Useful Service Information
  63
6 Storage and Disposal

65
- Storage
  65
- Disposal
  65
7 Service, Spares and Accessories

67
- Introduction
  67
- Service
  67
- Returning a Pump for Service
  67
- Spares
  67
- ISX Inlet Screen
  67
- Inlet Strainer
  68
- Inlet Flange Seals
  68
- Accessories
  68
- Installation
  68
- ACX Air Cooler
  68
- WCX Water Cooler
  68
- BX Bakeout Band
  69
- TAV Vent Valve and Vent Port Adaptor
  69
- VRX Vent Restrictor
  69
- Vent Port Adaptor
  69
- PRX Purge Restrictor
  70
- Vibration Isolators
  70
- FL20K Foreline Trap
  70
- Podule Connector Plug
  70
- TIC Turbo and Instrument Controllers
  70
- TIC PC Program
  71

Edwards EXT75DX Instruction Manual (70 pages)

EXT Pump Accessories

Brand: Edwards | Category: Water Pump | Size: 3.39 MB

Table of Contents
3
Introduction

7
BX Bakeout Band

13
- Description
  13
- Technical Data
  13
- Installation
  14
- Unpack and Inspect
  14
- Fit the BX Bakeout Band to the Pump
  14
- Electrical Connection to an EXC Controller
  14
- Electrical Connection to a TIC Relay Box
  14
- Electrical Connection to an Independent Electrical Supply
  14
- Operation
  15
ACX Air-Cooler

17
TAV Vent-Valve

39
- Description
  39
- Technical Data
  39
- Installation
  40
- Unpack and Inspect
  40
- TAV Vent-Valve Dimensions (MM)
  40
- Fit the TAV Vent-Valve to the Pump
  41
- Electrical Connection
  41
- Operation
  41
- TAV Vent-Valve Connections
  42
Vibration Isolator

43
- Description
  43
- Technical Data
  43
- Installation
  44
- Unpack and Inspect
  44
- Fit the Vibration Isolator
  44
- Vibration Isolator Installation
  45
Inlet Screens

47
- Description
  47
- Technical Data
  47
- Installation
  47
- Unpack and Inspect
  47
- Fit or Remove the Inlet-Screen
  48
- ISX Inlet-Screen
  48
- ISDX Inlet-Screen
  48
- ISHX Inlet-Screen
  49
PRX10 Purge-Restrictor

51
- Description
  51
- Technical Data
  51
- Installation
  51
- Unpack and Inspect
  51
- Fit the Purge-Restrictor
  52
- Operation
  52
- General
  52
- Calibration of the PRX10 for Different Purge Gases
  52
Pump-To-Controller Cable

55
- Description
  55
- Technical Data
  55
- Installation
  55
- Unpack and Inspect
  55
- Connect the Pump-To-Controller Cable
  55
Vent-Port Adaptor

57
- Description
  57
- Technical Data
  59
- Installation
  59
- Unpack and Inspect
  59
- Connect the Vent-Port Adaptor
  59
- Vent-Port Adaptor
  59
- Extended Vent-Port Adaptor
  59
VRX Vent - Restrictor

61
- VRX Vent-Restrictor
  61
- Description
  61
- Technical Data
  61
- Installation
  61
- Unpack and Inspect
  61
- VRX Vent-Restrictor Selection
  61
- Fit the Vent-Restrictor
  62
WCX Water-Cooler

63
- Description
  63
- Technical Data
  63
- Installation
  63
- Unpack and Inspect
  63
- WCX555 Water-Cooler Dimensions (MM)
  64
- WCX555 Water-Cooler Installation
  65
- Fit the Water-Cooler to the Pump
  66
- Operation
  66
Maintenance

67
Storage and Disposal

69
- Storage
  69
- Disposal
  69

Edwards Categories

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More Edwards Manuals

Edwards EXT75DX Manuals

Edwards EXT75DX Instruction Manual (72 pages)

Table of Contents

1 Introduction

2 Technical Data

3 Installation

4 Operation

5 Maintenance

6 Storage and Disposal

7 Service, Spares and Accessories

Edwards EXT75DX Instruction Manual (70 pages)

Table of Contents

Introduction

BX Bakeout Band

ACX Air-Cooler

TAV Vent-Valve

Vibration Isolator

Inlet Screens

PRX10 Purge-Restrictor

Pump-To-Controller Cable

Vent-Port Adaptor

VRX Vent - Restrictor

WCX Water-Cooler

Maintenance

Storage and Disposal

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Edwards Categories