Edwards EXT75DX Turbo Pump Manuals

Manuals and User Guides for Edwards EXT75DX Turbo Pump. We have 3 Edwards EXT75DX Turbo Pump manuals available for free PDF download: Instruction Manual

Edwards EXT75DX Instruction Manual (76 pages)

Compound turbomolecular pumps

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
5
Introduction
9
Scope and Definitions
9
General Description
9
Drive Electronics
10
Operational Features
11
Power Limit Setting
11
Standby Speed
11
Timer
11
Analogue Output
12
Automatic Vent Options
12
Normal Speed Setting
12
Electronic Braking
13
Logic Interface
13
Parallel Control and Monitoring
13
Full Serial Control
14
Serial Control with Parallel Monitoring
14
Parallel Control with Occasional Serial Monitoring or Serial Setup
14
Podule Configuration (Serial Setup)
14
Technical Data
15
General
15
Pumping Media
15
EXT75DX Dimensions (MM)
19
EXT255DX Dimensions (MM)
20
Vent Gas Specification and Vent Control Data
21
Purge Gas Specification
22
Cooling Water
22
Materials Exposed to Gases Pumped
22
Electrical Data
23
Logic Interface Connector
23
Podule Connector Socket
24
Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed) 13 4 Podule Connector Plug
25
Indicator Leds
26
Operating and Storage Environment
26
Installation
27
Unpack and Inspect
27
Typical Installation
27
Connection to the Vacuum System
27
Typical Pumping System with a DX Pump
28
Inlet Screen (Supplied Fitted)
29
Correct Installation of the Inlet Screen (EXT75DX)
29
Correct Installation of the Inlet Screen (EXT255DX)
29
Mechanical Fixing
30
Inlet Connection and Orientation
30
Base Mounting
30
Backing Connection
31
Interstage Connection (IDX Variants Only)
31
Purge Gas Connection
31
Connect the Purge Gas
31
Recommended Purge Gas Flow
32
Electrical Installation
32
Introduction
32
Earth (Ground) Connections
32
Connect the Logic Interface to the TIC
32
Connect the Logic Interface to the Customer Control Equipment
32
Connect the Electrical Supply
33
Parallel Interface Mode
34
Logic Interface Connections - Parallel Mode
34
Serial Interface Mode
35
Connect the Serial Interface to the Customer Control Equipment
35
Logic Interface Connections - Serial Mode
35
Serial Enable
36
Serial Protocol
36
Message Structure
37
Conceptual Diagram for Multi-Drop Connection
37
Command Set
38
Simultaneous Parallel and Serial Operation
38
Multi-Drop Mode
41
Schematic Diagram of the Logic Interface Connections
41
Vent Options, Vent Valve Connection and Control
42
Manual Vent Valve
42
TAV5 or TAV6 Solenoid Vent Valve
42
Controlled Venting
42
Alternative Valve Connected to the Vacuum System
43
Cooling
44
Introduction
44
Forced Air Cooling
44
Water Cooling
44
Operation
47
Configuring the DX Pump Using Serial Commands
47
Power Limit Setting
47
Powering a Fan from the Podule
48
Controlled Venting Options
48
Standby Speed Setting
49
Normal Speed Setting
49
Timer Setting and Options
50
Analogue Signal Options
51
Electronic Braking Options
51
Factory Settings
52
Assigning a Multi-Drop Address
52
Configuring the DX Pump Using a TIC
53
Start-Up
53
Close the Vent Valve
53
Pre-Start Checks
54
Operation with Parallel Control and Monitoring
54
Start the Pump
54
Running at Standby Speed
54
Stop the Pump
54
Parallel Monitoring
55
Operation with Serial Control and Monitoring
55
Delayed Start
55
Start the Pump
55
Standby Speed
55
Stop the Pump
56
Temperature Readings
56
Link Parameter Readings
56
Measured Motor Speed
56
Simultaneous Parallel and Serial Operation
57
Operation with a TIC
57
Decelerating and Venting
57
Operation at Extreme Conditions
57
Operation with High Inlet Pressure
57
Operation at High Temperatures
58
Operation at Over-Speed
58
Electrical Supply Failure
58
Bakeout
59
Maintenance
61
Introduction
61
Bearing Maintenance
61
Rotor Life
61
Clean the External Surfaces of the Pump
61
Fault Finding
62
Flashing Error Codes
64
Decoding System Status Words
64
Useful Service Information
67
Storage and Disposal
69
Storage
69
Disposal
69
Service, Spares and Accessories
71
Introduction
71
Service
71
Returning a Pump for Service
71
Spares
71
ISX Inlet Screen
71
Inlet Strainer
72
Inlet Flange Seals
72
Accessories
72
Installation
72
ACX Air Cooler
72
WCX Water Cooler
72
BX Bakeout Band
73
TAV Vent Valve and Vent Port Adaptor
73
VRX Vent Restrictor
73
Vent Port Adaptor
73
PRX Purge Restrictor
74
Vibration Isolators
74
FL20K Foreline Trap
74
Podule Connector Plug
74
TIC Turbo and Instrument Controllers
74
TIC PC Program
75
Installation of Optional Accessories and Spares
75

Edwards EXT75DX Instruction Manual (72 pages)

EXT Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
5
1 Introduction

9
- Scope and Definitions
  9
- General Description
  10
- Drive Electronics
  10
- Operational Features
  11
- Power Limit Setting
  11
- Standby Speed
  11
- Timer
  11
- Analogue Output
  12
- Automatic Vent Options
  12
- Normal Speed Setting
  12
- Electronic Braking
  13
- Logic Interface
  13
- Parallel Control and Monitoring
  13
- Full Serial Control
  14
- Serial Control with Parallel Monitoring
  14
- Parallel Control with Occasional Serial Monitoring or Serial Setup
  14
- Podule Configuration (Serial Setup)
  14
2 Technical Data

15
- General
  15
- Pumping Media
  15
- Purge Gas Specification
  16
- Vent Gas Specification and Vent Control Data
  19
- Purge Gas Specification
  20
- Cooling Water
  20
- Materials Exposed to Gases Pumped
  20
- Electrical Data
  21
- Logic Interface Connector
  21
- Podule Connector Socket
  22
- Podule Technical Data
  23
- Indicator Leds
  24
- Operating and Storage Environment
  24
3 Installation

25
- Unpack and Inspect
  25
- Typical Installation
  25
- Connection to the Vacuum System
  25
- Inlet Screen (Supplied Fitted)
  27
- Mechanical Fixing
  27
- Inlet Connection and Orientation
  27
- Base Mounting
  28
- Backing Connection
  28
- Interstage Connection (IDX Variants Only)
  29
- Purge Gas Connection
  29
- Connect the Purge Gas
  29
- Recommended Purge Gas Flow
  29
- Electrical Installation
  29
- Introduction
  29
- Earth (Ground) Connections
  30
- Connect the Logic Interface to the TIC
  30
- Connect the Logic Interface to the Customer Control Equipment
  30
- Connect the Electrical Supply
  30
- Parallel Interface Mode
  31
- Serial Interface Mode
  32
- Connect the Serial Interface to the Customer Control Equipment
  32
- Serial Enable
  33
- Serial Protocol
  33
- Message Structure
  34
- Command Set
  35
- Simultaneous Parallel and Serial Operation
  35
- Multi-Drop Mode
  38
- Vent Options, Vent Valve Connection and Control
  39
- Manual Vent Valve
  39
- TAV5 or TAV6 Solenoid Vent Valve
  39
- Controlled Venting
  39
- Alternative Valve Connected to the Vacuum System
  40
- Cooling
  41
- Introduction
  41
- Forced Air Cooling
  41
- Water Cooling
  41
4 Operation

43
- Configuring the DX Pump Using Serial Commands
  43
- Power Limit Setting
  43
- Powering a Fan from the Podule
  44
- Controlled Venting Options
  44
- Standby Speed Setting
  45
- Normal Speed Setting
  45
- Timer Setting and Options
  46
- Analogue Signal Options
  47
- Electronic Braking Options
  47
- Factory Settings
  48
- Assigning a Multi-Drop Address
  48
- Configuring the DX Pump Using a TIC
  49
- Start-Up
  49
- Close the Vent Valve
  49
- Pre-Start Checks
  50
- Operation with Parallel Control and Monitoring
  50
- Start the Pump
  50
- Running at Standby Speed
  50
- Stop the Pump
  50
- Parallel Monitoring
  51
- Operation with Serial Control and Monitoring
  51
- Delayed Start
  51
- Start the Pump
  51
- Standby Speed
  51
- Stop the Pump
  52
- Temperature Readings
  52
- Link Parameter Readings
  52
- Measured Motor Speed
  52
- Simultaneous Parallel and Serial Operation
  53
- Operation with a TIC
  53
- Decelerating and Venting
  53
- Operation at Extreme Conditions
  53
- Operation with High Inlet Pressure
  53
- Operation at High Temperatures
  54
- Operation at Over-Speed
  54
- Electrical Supply Failure
  54
- Bakeout
  55
- Behaviour of a Pump When the Power Is Re-Instated after an Electrical Supply Failure
  56
5 Maintenance

57
- Introduction
  57
- Bearing Maintenance
  57
- Rotor Life
  57
- Clean the External Surfaces of the Pump
  57
- Fault Finding
  58
- Flashing Error Codes
  60
- Decoding System Status Words
  60
- Hexadecimal Conversion Table
  61
- Example Decoding of System Status Words
  62
- Useful Service Information
  63
6 Storage and Disposal

65
- Storage
  65
- Disposal
  65
7 Service, Spares and Accessories

67
- Introduction
  67
- Service
  67
- Returning a Pump for Service
  67
- Spares
  67
- ISX Inlet Screen
  67
- Inlet Strainer
  68
- Inlet Flange Seals
  68
- Accessories
  68
- Installation
  68
- ACX Air Cooler
  68
- WCX Water Cooler
  68
- BX Bakeout Band
  69
- TAV Vent Valve and Vent Port Adaptor
  69
- VRX Vent Restrictor
  69
- Vent Port Adaptor
  69
- PRX Purge Restrictor
  70
- Vibration Isolators
  70
- FL20K Foreline Trap
  70
- Podule Connector Plug
  70
- TIC Turbo and Instrument Controllers
  70
- TIC PC Program
  71

Edwards EXT75DX Instruction Manual (70 pages)

EXT Pump Accessories

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents
3
Introduction

7
BX Bakeout Band

13
- Description
  13
- Technical Data
  13
- Installation
  14
- Unpack and Inspect
  14
- Fit the BX Bakeout Band to the Pump
  14
- Electrical Connection to an EXC Controller
  14
- Electrical Connection to a TIC Relay Box
  14
- Electrical Connection to an Independent Electrical Supply
  14
- Operation
  15
ACX Air-Cooler

17
TAV Vent-Valve

39
- Description
  39
- Technical Data
  39
- Installation
  40
- Unpack and Inspect
  40
- TAV Vent-Valve Dimensions (MM)
  40
- Fit the TAV Vent-Valve to the Pump
  41
- Electrical Connection
  41
- Operation
  41
- TAV Vent-Valve Connections
  42
Vibration Isolator

43
- Description
  43
- Technical Data
  43
- Installation
  44
- Unpack and Inspect
  44
- Fit the Vibration Isolator
  44
- Vibration Isolator Installation
  45
Inlet Screens

47
- Description
  47
- Technical Data
  47
- Installation
  47
- Unpack and Inspect
  47
- Fit or Remove the Inlet-Screen
  48
- ISX Inlet-Screen
  48
- ISDX Inlet-Screen
  48
- ISHX Inlet-Screen
  49
PRX10 Purge-Restrictor

51
- Description
  51
- Technical Data
  51
- Installation
  51
- Unpack and Inspect
  51
- Fit the Purge-Restrictor
  52
- Operation
  52
- General
  52
- Calibration of the PRX10 for Different Purge Gases
  52
Pump-To-Controller Cable

55
- Description
  55
- Technical Data
  55
- Installation
  55
- Unpack and Inspect
  55
- Connect the Pump-To-Controller Cable
  55
Vent-Port Adaptor

57
- Description
  57
- Technical Data
  59
- Installation
  59
- Unpack and Inspect
  59
- Connect the Vent-Port Adaptor
  59
- Vent-Port Adaptor
  59
- Extended Vent-Port Adaptor
  59
VRX Vent - Restrictor

61
- VRX Vent-Restrictor
  61
- Description
  61
- Technical Data
  61
- Installation
  61
- Unpack and Inspect
  61
- VRX Vent-Restrictor Selection
  61
- Fit the Vent-Restrictor
  62
WCX Water-Cooler

63
- Description
  63
- Technical Data
  63
- Installation
  63
- Unpack and Inspect
  63
- WCX555 Water-Cooler Dimensions (MM)
  64
- WCX555 Water-Cooler Installation
  65
- Fit the Water-Cooler to the Pump
  66
- Operation
  66
Maintenance

67
Storage and Disposal

69
- Storage
  69
- Disposal
  69

Edwards Categories

Water Pump Control Unit Industrial Equipment Measuring Instruments Controller

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Edwards EXT75DX Turbo Pump Manuals

Edwards EXT75DX Instruction Manual (76 pages)

Table of Contents

Edwards EXT75DX Instruction Manual (72 pages)

Table of Contents

1 Introduction

2 Technical Data

3 Installation

4 Operation

5 Maintenance

6 Storage and Disposal

7 Service, Spares and Accessories

Edwards EXT75DX Instruction Manual (70 pages)

Table of Contents

Introduction

BX Bakeout Band

ACX Air-Cooler

TAV Vent-Valve

Vibration Isolator

Inlet Screens

PRX10 Purge-Restrictor

Pump-To-Controller Cable

Vent-Port Adaptor

VRX Vent - Restrictor

WCX Water-Cooler

Maintenance

Storage and Disposal

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