Pumping Speed Curves; Figure 2 Pumping Speed Curves For Next730D - Edwards nEXT730D Instruction Manual

nEXT
Purge gas flow
Purge gas connection
Venting connection
* Depending on the ambient temperature, the gas throughput and the type of gas,
forced air cooling or water cooling may be necessary.

4.2.1 Pumping speed curves

Figure 2 Pumping speed curves for nEXT730D

1.000
800
600
400
200
0
-6
10
B8J200880_D
300812671_002_C3
B8J200880_D - Technical data
-1
mbar · I · s
sccm
Nitrogen
Helium
Hydrogen
Argon
-5 -4
10 10
Inlet pressure in mbar
Page 25
1230H
G 1/8"
G 1/8"
nEXT730D
-3 -2
10 10
08/2021 - ©Edwards Limited
0.4
24
1
-1
10