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nEXT200200
Edwards nEXT200200 Manuals
Manuals and User Guides for Edwards nEXT200200. We have
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Edwards nEXT200200 manual available for free PDF download: Instruction Manual
Edwards nEXT200200 Instruction Manual (100 pages)
Mechanical Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1.91 MB
Table of Contents
Table of Contents
7
1 Safety and Compliance
12
Definition of Warnings and Cautions
12
Safety Symbols
12
Trained Personnel
13
2 Introduction
14
Overview
14
Pump Controller
15
Operational Features
16
Power Limit Setting
16
Standby Speed
16
Timer
16
Analogue Output
17
Automatic Vent Options
17
Normal Speed Setting
18
Logic Interface
18
Parallel Control and Monitoring
18
Serial Control and Monitoring
19
Serial Control with Parallel Monitoring
19
Parallel Control with Serial Monitoring or Serial Configuration
19
Controller Configuration (Serial Configuration)
20
3 Technical Data
21
General Technical Data
21
Figure 1 Next200200 Main Inlet Performance Curve
23
Figure 2 Next200200 Side Inlet Performance Curve
23
Figure 3 Next 200200 NW25 Interstage Port Pumping Speed
24
Figure 4 Next200200 Dimensions (MM)
25
Operation and Storage Environment
26
Vent Gas Specification and Vent Control Data
26
Figure 5 Next200200D/T B85Xxx510 Dimensions (MM)
26
Purge Gas Specification
27
Figure 6 Max Allowed Rate of Pressure Rise During Venting: Pressure against Time
27
Cooling Water
28
Electrical Data
28
Pumping Media
29
Materials Exposed to Gases Pumped
30
Logic Interface Connector
31
Controller Connector Socket
33
Figure 7 Interface Circuits for Next Turbo Pump Controllers
33
Indicator Led's
34
Figure 8 Controller Connector Showing Pin Numbers
34
4 Installation
36
Unpack and Inspect
36
Typical Installation
37
Connect to the Vacuum System
37
Inlet Screen
38
Figure 9 Typical Pumping System with a Next Pump
38
Mechanical Fixing
39
Inlet Connection and Orientation
39
Base Mounting
39
Backing Port Connection
40
Interstage Connection (Variants Only)
41
Purge Gas Connection
41
Recommended Purge Gas Flow
41
Connect the Purge Gas
41
Electrical Installation
41
Ground the Connections
42
Connect the Logic Interface to the TIC
42
Connect the Logic Interface to the Customer Control Equipment
42
Connect the Electrical Supply
42
Connect the Parallel Control and Monitoring
44
Figure 10 Logic Interface Connections - Parallel Control
44
Connection for Serial Control and Monitoring
45
Connect the Serial Interface to the Customer Control Equipment
45
Figure 11 Controller Status Information
46
Serial Enable
47
Figure 12 Logic Interface Connections - RS232 Serial Control
47
Figure 13 Logic Interface Connections - RS485 Serial Control
47
Serial Protocol
48
Figure 14 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
49
Message Structure
50
Command Set
50
Figure 15 RS485 Multi-Drop Connection
50
Multi-Drop Operation
54
Connection for Mixed Parallel and Serial Operation
54
Figure 16 Logic Interface Connection - Mixed Parallel and Serial Operation
55
Vent Options, Vent Valve Connection and Control
56
Manual Vent Valve
56
TAV5 or TAV6 Solenoid Vent Valve
56
Vent Valve Control
57
Alternative Valve Connected to the Vacuum System
58
Cooling
58
Introduction
58
Forced Air Cooling
59
Water Cooling
59
Figure 17 Maximum Relative Humidity to Avoid Condensation with Water Cooling
60
5 Configuration
61
Configure the Pump Using Serial Commands
61
Power Limit Setting
61
Power Supply to the Fan from the Controller
62
Controlled Venting Options
62
Standby Speed Setting
63
Normal Speed Setting
63
Timer Setting and Options
64
Analogue Signal Options
65
Factory Settings
65
Assigning a Multi-Drop Address
65
Configuring the Next Pump Using a TIC
66
6 Operation
68
Before Starting the Pump
68
Close the Vent Valve
68
Pre-Start Sequence
68
Operation with Parallel Control and Monitoring
69
Start the Pump
69
Running at Standby Speed
69
Stop the Pump
69
Parallel Monitoring
69
Operation with Serial Control and Monitoring
69
Delayed Start
69
Start the Pump
70
Standby Speed
70
Stop the Pump
70
Temperature Readings
71
Link Parameter Readings
71
Measured Motor Speed
71
Mixed Parallel and Serial Operation
72
Operation with a TIC
73
Decelerating and Venting
73
Figure 18 Serial and Parallel Control Flowchart
73
Operation at Extreme Conditions
74
Operation with High Inlet Pressure
74
Operation at High Temperatures
74
Protection against Over-Speed
74
Electrical Supply Failure
75
Bakeout
77
7 Maintenance
78
Introduction
78
Bearing and Oil Cartridge Maintenance
78
Rotor Life
78
Clean the External Surfaces of the Pump
79
8 Fault Finding
80
The Pump Does Not Rotate after a Parallel Start Command Is Sent
80
The Pump Does Not Rotate after a Serial Start Command Is Sent
81
The Pump Does Not Respond in Multi- Drop Mode
81
The Green Normal LED Does Not Light or the Pump Does Not Rotate at Full Speed or the Pump Fails While in Operation
81
Ultimate Pressure Cannot be Reached
81
The Pump Is very Noisy or There Is Excessive Vibration or both
82
No Serial Comms
82
Fail Signal or Standby Signal Not Working
83
Yellow Service LED Is Flashing a Repeated Sequence
83
The Red Alarm LED Is on
83
The Red Alarm LED Is Flashing
83
Other Problems
83
Flashing Service Codes
83
Decoding Service Status Words
84
Controller Run Time
85
Pump Run Time
85
Pump Cycles
85
Bearing Run Time
86
Oil Cartridge Run Time
86
Flashing Error Codes
86
Decoding System Status Words
87
Useful Service Information
89
9 Storage
91
10 Disposal
92
11 Service
93
Return the Equipment or Components for Service
93
Bearing and Oil Cartridge On-Site Maintenance
94
12 Spares
95
ISX Inlet Screen
95
Inlet Strainer
95
Inlet-Flange Seals and Integrated Inlet Screens
95
NW16 and NW25 Ports
95
13 Accessories
96
Installation
96
ACX Air Cooler
96
Figure 19 Next Exploded Accessories View
96
WCX Water Cooler
97
BX Bakeout Band
97
TAV Vent Valve and Vent Port Adaptor
97
VRX Vent Restrictor
97
Vent Port Adaptor
98
PRX Purge Restrictor
98
C-Clamp Adaptor Kit
98
Interface Cable
98
TIC PC Program
99
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