Figure 3 Pumping Speed Curves For Next930D; Figure 4 Pumping Speed Curves For Next1230H - Edwards nEXT730D Instruction Manual

Turbomolecular pumps
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Figure 3 Pumping speed curves for nEXT930D

1.000
800
600
400
200
0
-6
10

Figure 4 Pumping speed curves for nEXT1230H

1.600
1.400
1.200
1.000
800
600
400
200
0
-6
10
B8J200880_D
300812671_002_C3
B8J200880_D - Technical data
Nitrogen
Helium
Hydrogen
Argon
-5
-4
10
10
Inlet pressure in mbar
Helium
Nitrogen
Argon
Hydrogen
-5
-4
10
10
Page 26
-3
-2
10
10
-3
-2
10
10
Inlet pressure in mbar
08/2021 - ©Edwards Limited
nEXT930D
-1
1
10
nEXT1230H
-1
1
10

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