Edwards EXT Series Manuals

Manuals and User Guides for Edwards EXT Series. We have 2 Edwards EXT Series manuals available for free PDF download: Instruction Manual

Edwards EXT Series Instruction Manual (44 pages)

Compound Molecular Pump

Brand: Edwards | Category: Water Pump | Size: 2 MB

Table of Contents
3
Introduction

7
Technical Data

13
Installation

21
- Unpack and Inspect
  21
- Typical Installation
  21
- Checklist of Items
  21
- Typical Pumping System with an EXT255H Pump
  22
- Typical Pumping System with an Ext255Hi/Ext255Hvi Pump
  23
- Connect to the Vacuum System
  24
- Inlet Screen
  24
- Mechanical Fixing
  24
- Correct Installation of the Inlet-Screen
  24
- Base Mounting
  25
- Inlet Connection and Orientation
  25
- Backing Connection
  26
- Interstage Connection (Ext255Hi/Ext255Hvi Only)
  26
- Vent-Valve Connection and Control
  26
- Vent-Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet of the Vent-Valve)
  26
- Purge Gas Connection
  27
- Connect the Purge Gas
  27
- Recommended Purge Gas Flow
  27
- Electrical Installation
  27
- Cooling
  27
- Introduction
  27
- Forced-Air Cooling
  28
- Water-Cooling
  28
Operation

29
- Start-Up
  29
- Stand-By
  29
- Shut-Down
  30
- Safety Interlocks and Control System
  30
- Bakeout
  30
Maintenance

33
- Introduction
  33
- Bearing Life
  33
- Rotor Life
  33
- Clean the Pump
  33
- Fault Finding
  34
Storage and Disposal

37
- Storage
  37
- Disposal
  37
Service, Spares and Accessories

39
- Introduction
  39
- Service
  39
- Spares
  39
- ISX Inlet-Screen
  39
- Inlet-Strainer (Ext255Hi Pump Only)
  39
- Interstage-Port Seal (Ext255Hvi Pump Only)
  40
- WCX Water-Cooler
  40
- Inlet-Flange Seals
  40
- Accessories
  40
- Installation
  40
- EXC Controller
  40
- Pump-To-Controller Cable
  40
- EXDC Drive Modules
  41
- BX Bakeout Band
  41
- FL20K Foreline Trap
  41
- Installation of Optional Accessories (and Spares): Ext255Hi Shown
  42
- TAV Vent-Valve and Vent-Port Adaptor
  43
- ACX Air-Cooler
  43
- Vibration Isolators
  43
- PRX Purge-Restrictor
  43
- VRX Vent-Restrictor
  43

Edwards EXT Series Instruction Manual (40 pages)

Compound Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 1 MB

Table of Contents
3
Introduction

7
- Scope and Definitions
  7
Technical Data

9
- General
  9
- Pumping Media
  9
- Pumps Without Gas Purge
  10
- Pumps with Gas Purge
  10
- Vent Gas Specification and Vent Control Data
  11
- Purge Gas Specification
  11
- Water Cooling
  11
- Materials Exposed to Gases Pumped
  12
- Mounting Attitude of the EXT556H Pump
  15
Installation

17
- Unpack and Inspect
  17
- Typical Installation
  17
- Connection to the Vacuum System
  17
- Typical Pumping System
  18
- The Inlet Screen (Supplied Fitted)
  19
- Inlet Connection
  19
- Do Not Remove Screws 'B
  20
- Backing Connection
  21
- Vent Options, Vent Valve Connection and Control
  21
- Maximum Rate of Pressure Rise When Venting
  22
- Purge Gas Connection
  23
- Connect the Purge Gas
  23
- Recommended Purge Gas Flow
  23
- Electrical Installation
  23
- Dimensions and Features of EXT556H Pumps
  24
- Cooling
  25
- Introduction
  25
- Forced Air Cooling
  25
- Water Cooling
  25
- Magnetic Fields
  26
Operation

27
- Start up
  27
- Stand-By
  27
- Shut-Down
  27
- Safety Interlocks and Control System
  28
- Bakeout (Conflat Only)
  28
Maintenance

29
- Introduction
  29
- Bearing Maintenance
  29
- Rotor Life
  29
- Clean the Pump
  29
- Fault Finding
  30
Storage and Disposal

33
- Storage
  33
- Disposal
  33
Service, Spares and Accessories

35
- Introduction
  35
- Service
  35
- Spares
  35
- ISX Inlet-Screen
  35
- Inlet-Flange Seals
  35
- Accessories
  36
- Installation
  36
- EXC Controller
  36
- Pump-To-Controller Cable
  36
- EXDC Drive Modules
  36
- Installation of EXT556H Optional Accessories and Spares
  37
- BX Bakeout Band (Conflat Only)
  38
- FL20K Foreline Trap
  38
- TAV Vent-Valve and Vent-Port Adaptor
  38
- ACX Air-Cooler
  38
- WCX Water-Cooler
  39
- Vibration Isolators
  39
- PRX Purge-Restrictor
  39
- VRX Vent-Restrictor
  39

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More Edwards Manuals

Edwards EXT Series Manuals

Edwards EXT Series Instruction Manual (44 pages)

Table of Contents

Introduction

Technical Data

Installation

Operation

Maintenance

Storage and Disposal

Service, Spares and Accessories