Pumping Media; Performance Characteristics - Edwards XDS100B Instruction Manual

Suck‑back protection
Leak tightness
Sound pressure, measured at ultimate vacuum
1 metre from the end of the pump to ISO 3744
and ISO 4871
Vibration: measured at the inlet port (ISO 3744) Class 1C...< 4.5 mm s
* XDS100B used in combination with XDS35i backing pump.
Note:
If the pump is operated outside the specified limits, then the inverter may reduce the
motor speed, tip seal wear rate will be increased.

3.2.1 Pumping media

WARNING:
Risk of fire. Do not use this pump to pump pyrophoric materials or dust.
The pump is designed to pump the following gases:
▪ Air
▪ Carbon dioxide
▪ Helium
▪ Carbon monoxide
▪ Nitrogen
▪ Argon
▪ Oxygen (O
The pump can be used to pump water vapour. Caution must be taken to ensure that
vapour does not condense inside the pump. Refer to
how to prevent condensation of water vapour in the pump.
If pumping a vapour or gas not in the list above or if its temperature is higher than 40 °C,
contact us for advice.

3.3 Performance characteristics

A73201880_G
A73201880_G - Technical data
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2
Page 12
Provided by backing pump
-6 -1
< 1 x 10 mbar l s
52.1 ± 2.5 dB(A)
-1
Gas ballast control on page 10 on
05/2022 - ©Edwards Limited
(rms)