Technical Data; General; Pumping Media - Edwards EXT70/70200 Instruction Manual

2

TECHNICAL DATA

2.1

General

Performance
Dimensions
Maximum inlet flange temperature
Maximum magnetic field
Installation category
Pollution degree
Ambient operating temperature range
Ambient operating humidity range
Maximum operating altitude
Ambient storage temperature range
2.2

Pumping media

Do not use the EXT70/70/200H to pump explosive gas mixtures as the pump is not suitable for this
purpose.
Do not use the EXT70/70/200H to pump gases containing more than 20% oxygen. If gases containing more than
20% oxygen are pumped, the pump lubricant will polymerise and the pump may fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The EXT70/70/200H is designed to pump the following residual gases normally used in high-vacuum systems:
Air

Carbon monoxide

Neon

Ethane

Methane

Nitrogen

Krypton

The pump can be used to pump oxygen and water vapour, subject to the following conditions:
Oxygen - The oxygen concentration must be less than 20% by volume.

Water vapour - Ensure that vapour does not condense inside the pump.

If there is a requirement to pump a gas not in the list above, contact the supplier for advice. If the supplier is not
contacted, the warranty on the pump may be invalidated. The pumps are not suitable for pumping aggressive or
corrosive gases.
© Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
See Table 1
See Figure 1
70 ºC
3.5 mT radial field
>7 mT axial field
EN61010 part 1, Category 1
EN61010 part 1, Category 2
5 ºC to 40 ºC
10 to 90% RH (non-condensing)
2000 m
-30 ºC to 70 ºC
WARNING
CAUTION
Argon

Propane

Carbon dioxide

Helium

Hydrogen

Butane

B756-50-880 Issue C
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