Available Equipment; Device Connections; Types Of Probe Stations - Agilent Technologies 8510XF Operating And Service Manual

Available Equipment

Device Connections

Types of Probe
Stations
Agilent Technologies does not manufacture or supply a probe station for the
8510XF. The recommended supplier of probe stations is:
Cascade Microtech, Inc.
2430 NW 206th Ave., Beaverton, Oregon 97006, USA
Telephone: (503) 601-1000 Fax: (503) 601-1002
Japan: (03) 5478-6105 Europe: +44 (0) 1295-812828
E-mail: sales@cmicro.com
In addition to probe stations, Cascade offers a variety of accessories that are
compatible with the 8510XF (including positioners, wafer test probes,
calibration substrates, and calibration software).
Each test port of the 8510XF is connected to a wafer test probe (through a
1.0 mm coaxial cable, or through an adapter and another type of coaxial
cable). Contact the manufacturer of the wafer probe station and an Agilent
office for information on the cables and adapters needed to connect the test
heads to the wafer probe station (refer to
The probe tips make direct contact with the on-wafer devices to be
measured.
Positioners on the probe station adjust the position of the probe tips, in three
axes of movement: left-right motions along the X axis, forward-back
motions along the Y axis, and up-down motions along the Z axis. Motion in
the Z-axis is typically controlled by a micropositioner to which the wafer
probe (but not the test head) is attached.
In order to measure an on-wafer device, you will maneuver the probe tip into
a position directly above the device, and then bring the tip down to contact
the substrate. A microscope mounted on the probe station provides a
close-up view of this process.
Probe stations are classified as manual, semi-automatic, and fully automatic.
•
A manual probe station requires the operator to make all position
adjustments manually, using a microscope to watch the position of the
probe tips.
•
Semi-automatic probe stations can be programmed with a wafer map, so
that the system automatically locates and measures every device on the
wafer. (Or, in "indexing" mode, the system measures the first device,
and waits for the operator to push a button before it proceeds to the next
device.)
•
Fully automatic probe stations are able to load a series of wafers from a
cassette, automatically measuring each DUT on each wafer (using a
wafer map) before replacing the wafer in the cassette.
Operation Using a Wafer Probe Station
Web site: www.cascademicrotech.com
"Contacting Agilent" on page
8510XF Network Analyzer Systems 3-47
Operation
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