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On-Wafer Calibration
NOTE
Operation
Operation Using a Wafer Probe Station
•
In automatic and semi-automatic probe stations, the adjustments in the
X, Y, and Z axes are used to get the test probe into the proper positions
relative to one another; a positioner under the wafer itself then moves the
wafer so that the probe tips are brought into contact with each on-wafer
device.
The measurement calibration process of the 8510XF must be adapted to the
particular wafer test probes and on-wafer calibration standards that are in
use.
You will need to develop or purchase a calibration program that is
appropriate to the equipment and accessories you are using.
Cascade Microtech provides calibration substrates and calibration software
that are compatible with the 8510XF.
The calibration process described elsewhere in this manual applies
specifically to coaxial calibration kits; it is not applicable to on-wafer
calibration.
3-48 8510XF Network Analyzer Systems
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