Agilent Technologies 8510XF Operating And Service Manual page 23

Wafer Probe
Configuration
Figure 1-3
For on-wafer measurements, it is usually best to remove the network
analyzer from the instrument rack, and place it on a table adjacent to the
probe station. This makes it easy to see and operate the analyzer.
No wafer probe station is supplied with the system; the illustration below
simply shows how the 8510XF combines with a typical probe station to
create an on-wafer measurement system.
8510XF, Configured for Wafer-Probe Measurement
Introduction
System Description
8510XF Network Analyzer Systems 1-7