Level 1
Level 2
Level 3
S N 0 1 -
P R S T
E d I T
S N 1 6
S N 0 1 -
P R S T
E d I T
S N 1 6
S N 0 1 -
P R S T
E d I T
S N 1 6
S N 0 1 -
P R S T
E d I T
S N 1 6
(Continued)
Table 3.1: Menu Map
Level 4
Level 5
• L 1 -
L T 1
L 6
• L F 1 -
L F 6
• L R 1 -
L R 6
• S C 1 -
S C 8
• b W 1 -
b W 8
• b A 1 -
b A 8
L T R 1
•
L T R 1
d 0 0
0 -
d 3 5
8
• F 0 0 0 -
F 2 5
5
• R 0 0 0 -
R 2 5
5
• S 0 0 0 -
S 2 5
5
• N 0 0 0
-
N 2 5
5
• W F 0 1
-
W F 9
9 /
W R 0
1 -
W R 9
9
L T C 2
Description
•
litho selection (indexed
modes)
•
litho selection (forward rotate
modes)
•
litho selection (reverse rotate
modes)
•
litho selection (scan modes)
•
litho selection (blink wheel
modes)
•
litho selection (blink aperture
modes)
litho wheel 1 rotation
• litho position (indexed modes)
• forward spin rotation speed
stop to fastest (forward rotate
modes)
• reverse spin rotation speed
stop to fastest (reverse rotate
modes)
• fast scan speed stop to fastest
• random speed stop to fastest
(random modes)
• litho wheel spin speed forward
slowest to fastest and litho
wheel spin speed reverse
slowest to fastest
litho wheel 2 function menu (refer
to L T C 1 )
Chapter 3 Menu System 3-11
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