Making The Electrical Connection; Power Supply Requirements; Ground Connections - Advanced Energy FC-77 Series User Manual

Mass flow controllers
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3. Mount the MFC and tighten screws according to IGS torque specifications (see
"Mounting the MFC" on page

Making the Electrical Connection

Connect the system to the MFC using an appropriate mating connector and cable. For
electrical connector pin and signal information, see
Communication."
Note: If possible, securely fasten the connector with jack-post screws to the MFC to
prevent the connector from vibrating loose. Signals at this I/O port can be
sensitive to electrical noise. Take standard preventative measures against
electromagnetic interference (EMI), including using shielded cable.

POWER SUPPLY REQUIREMENTS

For specific power supply requirements, see the specifications for your MFC model in
"Model Specifications" on page
Note: The power supply used with the MFC must be sufficient to handle the larger
current demand during operation. Additionally, the ripple voltage of the power
supply should be less than 20 mV.
If needed, Aera recommends using the following Aera power supplies for use with
Aera MFCs:
• PS94UA (For use with up to 4 MFCs)
• PS76DA (For use with up to 6 MFCs)
• PS74DA (For use with up to 4 MFCs)

GROUND CONNECTIONS

The MFC employs both signal and power commons. Proper grounding of these
common leads is essential for the MFC to operate accurately and safely. Improper
grounding practices may result in inaccurate actual and indicated flow. Follow all
appropriate industry and local practices and standards in making these connections.
Note: For electrical connector pin and signal information, see
Connections and Communication."
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
3-4).
6-1.
Installation and Operation
Chapter 4, "I/O Connections and
Chapter 4, "I/O
3-5

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