Reference Information; Calibration References; Flow Indication - Advanced Energy FC-77 Series User Manual

REFERENCE INFORMATION

The following sections contain calibration references, as well as MFC label and model
code information for the MFC.

Calibration References

In order to ensure MFC cleanliness, AE may use a surrogate calibration gas rather
than the gas indicated on the label. The calibration ambient temperature is 22ºC. (If
the MFC requires a different ambient calibration temperature, that temperature is
indicated on the MFC label.)
Note: The calibration gas and its conversion factors are subject to change due to
technological innovation or changes in environmental regulations.
Table 6-37. Calibration references
Description
Calibration method
Reference conditions
Traceablity

FLOW INDICATION

Flow rate is indicated by standard cubic centimeters per minute (sccm), cubic
centimeters per minute (ccm), standard liters per minute (slm), and liters per minute
(lm) as follows:
• For sccm and slm, gas flow rates at 0ºC, 101.3 kPa
• For ccm and lm, gas flow rate at customer-defined temperature, 101.3 kPa
Note: Unless otherwise noted, sccm and slm are used for calibration.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Primary, secondary, or rate of rise of N
surrogate gas)
0ºC / 760 Torr per SEMI E12-96
All calibrations are traceable to Japan standards
and/or United States standards (NIST)
Specifications and Reference Information
Specification
(or other
2
6-39