Installing The Unit; Overview Of Unit Installation - Advanced Energy FC-77 Series User Manual

®
Advanced Energy
• The MFC can be mounted in any position, but the zero point may shift if the MFC
is in a nonvertical position.
Adjust the zero point in the intended mounting position (see
on page 3-9
• AE recommends that you use a filter on the MFC primary side. A clogged MFC
can result in inaccurate control and measurement and subsequent process failures.
• AE recommends that you use a dedicated regulator on the MFC primary side.
Excessive service pressure can cause control errors and MFC failure. Unstable
pressure (or multiple MFCs below a single regulator) can cause unstable output.

INSTALLING THE UNIT

The following sections explain how to install the unit.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.

Overview of Unit Installation

To install the MFC, do the following:
1. "Confirming the MFC Model" on page
2. "Preparing the Installation Site" on page
3. "Unpacking the MFC" on page
4. "Positioning the MFC" on page
5. "Mounting the MFC" on page
6. "Making the Mechanical Connections" on page 3-4
7. "Making the Electrical Connection" on page
8. "Testing the System for Leaks" on page
3-2
for more information).
3-3.
3-3.
3-4.
Installation and Operation
"Zeroing the MFC"
3-3.
3-3.
3-5.
3-6.
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