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Controller
FC-77 Series
User manual
Subminiature-D Purge Function Signal; Figure 4-9. Honda 20-Pin Normally Open Internal Circuitry For Purge Function; Figure 4-10. Honda 20-Pin Normally Closed Internal Circuitry For Purge Function - Advanced Energy FC-77 Series User Manual
Mass flow controllers
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Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 4-9. Honda 20-pin normally open internal circuitry for purge function
Figure 4-10. Honda 20-pin normally closed internal circuitry for purge function
SUBMINIATURE-D PURGE FUNCTION SIGNAL
For the 9-pin subminiature-D connector,
Figure 4-11
shows the purge function
connection. This connector is only available on normally closed MFCs.
Figure 4-12
shows the internal circuitry for this connection.
5700512-C
I/O Connections and Communication
4-11
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Table of Contents
Troubleshooting
Chapter 5. Troubleshooting and Global Customer Support
51
No Gas Is Being Supplied
52
Set Point and Flow Output Do Not Match
53
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow chart
55
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This manual is also suitable for:
Fc-78 series
Fc-79 series
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