Advanced Energy FC-77 Series User Manual page 41

Mass flow controllers
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Table 4-1. 20-pin connector signal descriptions (Continued)
Pin
3
4
5
6
Key (card
edge)
7 (Honda)
8
9
10
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Signal Name
OUTPUT
+15 VDC
UNASSIGNED
VALVE TEST
POINT
KEY
or
UNASSIGNED
ALARM H
ALARM L
ALARM OFF
I/O Connections and Communication
Signal Description
Flow output terminal. Flow is represented by
a signal scaled between 0 VDC and 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
For specifications on this signal, see the
supply power section of the specifications
table for the specific MFC model (see
Specifications" on page
This pin is unassigned and should not be
connected.
Terminal for monitoring the voltage of the
valve drive. The scale is 0 VDC to -13 VDC
(maximum valve voltage).
The key is a slot in the card-edge connector
that ensures the connector can not be
connected backwards.
For Honda connectors, this pin is unassigned
and should not be connected.
This pin provides an alarm output, which does
not need to be connected. For more
information see
"Alarm Output (Error
Detection) Signals" on page
This pin provides an alarm output, which does
not need to be connected. For more
information see
"Alarm Output (Error
Detection) Signals" on page
This pin resets the alarm signal on pins 8 and
9. It does not need to be connected. For more
information see
"Alarm Output (Error
Detection) Signals" on page
"Model
6-1).
4-7.
4-7.
4-7.
4-3

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