Specifications For Model Fc-7810 Mfcs; Table 6-26. Specifications For Fc-7810 Series Mfcs - Advanced Energy FC-77 Series User Manual

Specifications for Model FC-7810 MFCs

The following table lists specifications for the FC-7810 MFCs.

Table 6-26. Specifications for FC-7810 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operat-
ing pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required, depending on the intended flow rate range
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
FC-7810
6 slm to 30 slm
Normally open
Maximum ±2% of full scale, within 2 seconds
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum of
Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
69 to
275 kPa(D); 10
to 40 psi(D)
≥ 20 slm: 147 to
275 kPa(D); 21to
40 psi(D)
Note 3
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene rubber
1/4" VCR
Specifications and Reference Information
FC-7810C
6 slm to 50 slm
Normally closed
±2% of full scale
of ±1% of full scale
Maximum at ±0.2% of full scale
-11
Maximum 1 x 10 [Pa*m
5% to 100%
69 to 69 to 275 kPa(D); 10 to 40
275 kPa(D); 10
≥20 slm: 98 to 275 kPa(D);14
to 40 psi(D
≥20 slm: 98 to
294 kPa(D); 14
to 43 psi(D)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
Equivalent to
1/4" VCR,
1/4" SW
Any direction
1.5 kg (3.3 lb)
FC-7810CD, FC-
7810CU
6 slm to 30 slm
3
/sec(He)]
psi(D
to 40 psi(D)
1/4" VCR
6-27