Product Certification; Conditions Of Use - Advanced Energy FC-77 Series User Manual

Mass flow controllers
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• When operating from a pressurized gas source, install a suitable burst disc in the
vacuum system to prevent system explosion if system pressure rises.
• Do not allow contaminants of any kind to enter the MFC before or during use.
Contamination such as dust, dirt, lint, glass chips, metal chips, or any other
particles may permanently damage the MFC.

Product Certification

Certain options of this product are certified by:
• CE Marking – Self-declaration, assessed by AE Corporate Compliance
For more information, refer to the Certificate or Letter of Conformity (US) or
Declaration of Conformity (EU) accompanying the product.

Conditions of Use

To comply with the stated directives and standards, you must meet the following
conditions of use:
• Install and operate this device only in accordance with the listed safety guidelines
and all other applicable directives and standards specific to your process and
application.
• Dispose of this product as directed by applicable laws and regulations.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Safety and Product Compliance Guidelines
1-7

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Fc-78 seriesFc-79 series

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