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Advanced Energy FC-77 Series User Manual

Mass flow controllers
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Mass Flow Controllers
Series FC-77X / 77XX, Series FC-78X / 78XX, and
Series FC-79X
June 2006
5700512-C
AERA PRODUCTS
User Manual

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Summary of Contents for Advanced Energy FC-77 Series

  • Page 1 Mass Flow Controllers Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X June 2006 5700512-C AERA PRODUCTS User Manual...
  • Page 3 User Manual Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs 5700512-C...
  • Page 4 Inc. All Rights Reserved. DISCLAIMER AND LIMITATION OF LIABILITY The information contained in this manual is subject to change by Advanced Energy Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no warranty of any kind whatsoever, either expressed or implied, with respect to the information contained herein.
  • Page 5 Advanced Energy Industries, Inc. CUSTOMER FEEDBACK Advanced Energy’s technical writing staff has carefully developed this manual using research-based document design principles. However, improvement is ongoing, and the writing staff welcomes and appreciates customer feedback. Please send any comments on the content, organization, or format of this user manual to: •...
  • Page 6 ® Advanced Energy 5700512-C...

  • Page 7: Table Of Contents

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table of Contents Chapter 1. Safety and Product Compliance Guidelines Important Safety Information ......... 1-1 Model Numbers for this Manual .
  • Page 8 ® Advanced Energy Maintenance ........... . 3-11 Storage .
  • Page 9 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-772 MFCs ......6-4 Specifications for Model FC-780HT MFCs .
  • Page 10 ® Advanced Energy Table of Contents 5700512-C...
  • Page 11 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs List of Figures Figure 2-1. MFC cutaway view ......... . . 2-1 Figure 2-2.
  • Page 12 ® Advanced Energy List of Figures 5700512-C...
  • Page 13 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs List of Tables Table 1-1. Standard MFC model numbers ........1-1 Table 1-2.
  • Page 14 ® Advanced Energy Table 6-33. Dimensions for standard models in mm (and inches) ....6-34 Table 6-34. Dimensions for block-type models in mm (and inches) ....6-37 Table 6-35.

  • Page 15: Chapter 1. Safety And Product Compliance Guidelines

    Guidelines IMPORTANT SAFETY INFORMATION ® To ensure safe installation and operation of the Advanced Energy MFC, read and understand this manual before attempting to install and operate this unit. At a minimum, read and follow the safety instructions and practices documented under “Safety Guidelines”...
  • Page 16 ® Advanced Energy Table 1-1. Standard MFC model numbers (Continued) Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC-772 Card edge FC-772C Card edge FC-780 Card edge FC-780C Card edge FC-781 Card edge FC-781C...

  • Page 17: Table 1-2. Block-Type Mfc Model Numbers

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table 1-1. Standard MFC model numbers (Continued) Model Control Valve External Seal Connector Number Type Normally Normally Metal Rubber closed Open FC-7800CU Card edge FC-7810 Card edge FC-7810C Card edge FC-7810CD Subminiature-D...

  • Page 18: Interpreting The Manual

    ® Advanced Energy Table 1-2. Block-type MFC model numbers (Continued) Model Control Valve Connector Position Number Normally Normally Vertical Lateral closed Open FC-795CT-B Note: All of these models use a Honda 20-pin connector, have metal external seals, and have a connection with a flange fitting.

  • Page 19: Danger, Warning, And Caution Boxes

    Danger, Warning, and Caution Boxes This symbol represents important notes concerning potential harm to people, this unit, ® or associated equipment. Advanced Energy includes this symbol in Danger, Warning, and Caution boxes to identify specific levels of hazard seriousness. DANGER indicates an imminently hazardous situation that, if not avoided, will result in death or serious injury.

  • Page 20: Safety Guidelines

    ® Advanced Energy SAFETY GUIDELINES Review the following information before attempting to install and operate the product. Do not attempt to install or operate this equipment if you have not first reviewed this manual. Hazardous voltages exist inside the mass flow controller (MFC). Do not remove the MFC cover.

  • Page 21: Product Certification

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs • When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion if system pressure rises. • Do not allow contaminants of any kind to enter the MFC before or during use. Contamination such as dust, dirt, lint, glass chips, metal chips, or any other particles may permanently damage the MFC.
  • Page 22 ® Advanced Energy Safety and Product Compliance Guidelines 5700512-C...

  • Page 23: Chapter 2. Product Overview

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter Chapter Product Overview PRODUCT DESCRIPTION AND THEORY OF OPERATION The MFC provides analog control, an array of possible mechanical and electrical connections, and a wide variety of flow ranges. As shown in Figure 2-1, the MFC (mass flow controller) is composed of a PC board that is integrated with the following...

  • Page 24: Mfc Components

    ® Advanced Energy When gas flows through the MFC it is split into two streams. A larger stream is routed through the bypass assembly, and a smaller stream that is proportional to the larger stream is routed through the flow sensor. The MFC is designed so that the ratio between these two streams remains constant over the entire measurable flow range of the instrument.

  • Page 25: Flow Sensor Assembly

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Figure 2-2. MFC functional block diagram Flow Sensor Assembly The flow sensor consists of a capillary tube wound by two self-heating resistance wires through which electrical current is passed. The resistance wires heat the sensor tube and when gas flows through the flow sensor a temperature differential is produced between the upstream and downstream wires.

  • Page 26: Bypass Assembly

    ® Advanced Energy As a result of the techniques of thermal mass flow measurement, gas flow can be measured independently of factors which affect volume and density, such as temperature and pressure. Bypass Assembly The bypass assembly diverts a small stream of incoming gas through the flow sensor and channels the rest through the bypass and toward the valve assembly of the MFC.

  • Page 27: Chapter 3. Installation And Operation

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter Chapter Installation and Operation PREPARING TO INSTALL THE UNIT The following sections provide information that you need to understand before installing the MFC. Installation Requirements Install the MFC according to the following requirements. Operating and maintenance personnel must receive proper training before installing, troubleshooting, or maintaining this equipment.

  • Page 28: Installing The Unit

    ® Advanced Energy • The MFC can be mounted in any position, but the zero point may shift if the MFC is in a nonvertical position. Adjust the zero point in the intended mounting position (see “Zeroing the MFC” on page 3-9 for more information).

  • Page 29: Confirming The Mfc Model

    If you do see signs of shipping damage, contact Aera, an Advanced Energy company, and the carrier immediately (see “AE Global Services” on page 5-6 for contact information).

  • Page 30: Mounting The Mfc

    ® Advanced Energy Mounting the MFC Look to the following information to correctly mount the MFC. Note: If you are using an MFC with IGS connections, you must make the mechanical connections before mounting the MFC. See “Making the Mechanical Connections”...

  • Page 31: Making The Electrical Connection

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs 3. Mount the MFC and tighten screws according to IGS torque specifications (see “Mounting the MFC” on page 3-4). Making the Electrical Connection Connect the system to the MFC using an appropriate mating connector and cable. For electrical connector pin and signal information, see Chapter 4, “I/O Connections and Communication.”...

  • Page 32: Testing The System For Leaks

    ® Advanced Energy Testing the System for Leaks Do not use liquid leak detectors to leak test connections. They may damage the MFC. After installing the MFC in your system, you should test the leak integrity of the gas connections with a helium leak detector.

  • Page 33: Figure 3-2. Connection To Peripheral Equipment Using A Dedicated Power Supply

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Figure 3-2. Connection to peripheral equipment using a dedicated power supply 5700512-C Installation and Operation...

  • Page 34: Operating The Unit

    ® Advanced Energy Figure 3-3. Example of connections using dedicated line code LC-OUT-N OPERATING THE UNIT The following sections explain how to operate the unit. Installation and Operation 5700512-C...

  • Page 35: First-Time Operation

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Hazardous voltages exist inside the mass flow controller (MFC). Do not remove the MFC cover. First-Time Operation The first time you operate the MFC: 1. Ensure that you have installed the MFC properly by following the procedures in “Installing the Unit”...

  • Page 36: Figure 3-4. Mfc Zero Point Adjustment

    ® Advanced Energy To Adjust the MFC Zero Point: 1. Make sure that the MFC has reached ambient temperature. 2. Energize the MFC, then wait at least 15 minutes. During this time, make sure that the ambient temperature remains constant and that the output stabilizes.

  • Page 37: Maintenance

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs MAINTENANCE Recalibration and repair should be performed by Advanced Energy. See “AE Global Services” on page 5-6 for contact information. Note: Removal of an MFC should be done only after adequate purging with a nonreactive gas such as nitrogen gas (N ).
  • Page 38 ® Advanced Energy 3-12 Installation and Operation 5700512-C...

  • Page 39: Chapter 4. I/O Connections And Communication

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter Chapter I/O Connections and Communication The following sections provide information on the MFC’s electrical connectors and communication interfaces for MFC control, read back, and alarm indications. 20-PIN CARD EDGE CONNECTOR AND 20- PIN HONDA CONNECTOR Card Edge Connector Figure 4-1...

  • Page 40: Honda Connector

    ® Advanced Energy Honda Connector Figure 4-2 shows the pin numbers on the 20-pin Honda connector. Figure 4-2. 20-pin Honda connector 20-Pin Connector Signal Descriptions Table 4-1 provides the pin and signal descriptions for the 20-pin card-edge connector and the 20-pin Honda connector.
  • Page 41 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table 4-1. 20-pin connector signal descriptions (Continued) Signal Name Signal Description OUTPUT Flow output terminal. Flow is represented by a signal scaled between 0 VDC and 5 VDC: •...
  • Page 42 ® Advanced Energy Table 4-1. 20-pin connector signal descriptions (Continued) Signal Name Signal Description A (card edge) SET POINT Analog flow control set point signal. The INPUT signal range is 0 VDC to 5 VDC: 11 (Honda) • 0 VDC = 0% •...

  • Page 43: 9-Pin Subminiature-D Connector

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs 9-PIN SUBMINIATURE-D CONNECTOR Connector Figure 4-3 shows the pin numbers on the 9-pin subminiature-D connector. Figure 4-3. 9-pin subminiature-D connector Pin and Signal Descriptions Table 4-2 provides the pin and signal descriptions for the 9-pin subminiature-D connector.
  • Page 44 ® Advanced Energy Table 4-2. 9-pin connector signal descriptions Signal Signal Description Name VALVE This signal controls the position of the control OPEN/ valve and allows you to use the purge function on CLOSED the MFC. • Open = Common or +15 VDC •...

  • Page 45: Special Function Signal Descriptions

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table 4-2. 9-pin connector signal descriptions Signal Signal Description Name SIGNAL See pin 7. COMMON VALVE Test point signal indicating the position of the TEST POINT control valve: •...

  • Page 46: Control Valve Purge Function Signals

    ® Advanced Energy As shown in Figure 4-4, ALARM H and ALARM L are connection terminals for the open collector that is isolated with the photocoupler. To use the terminals, apply appropriate power, as shown in the illustration. Use the ALARM ON/OFF signal to reset the signal.

  • Page 47: Card Edge Purge Function Signals

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs CARD EDGE PURGE FUNCTION SIGNALS For the card edge connector, MFCs with normally open and normally closed valves require inverse connections. Be sure to connect the signal properly. (To check whether an MFC is normally closed or normally open, see “Model Numbers for this Manual”...

  • Page 48: Honda 20-Pin Purge Function Signals

    ® Advanced Energy Figure 4-7. Card edge normally closed internal circuitry for purge function HONDA 20-PIN PURGE FUNCTION SIGNALS For the Honda 20-pin connector, normally open and normally closed valves use the same connection. However, the internal MFC circuitry is different for normally open and normally closed MFCs.

  • Page 49: Subminiature-D Purge Function Signal

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Figure 4-9. Honda 20-pin normally open internal circuitry for purge function Figure 4-10. Honda 20-pin normally closed internal circuitry for purge function SUBMINIATURE-D PURGE FUNCTION SIGNAL For the 9-pin subminiature-D connector, Figure 4-11 shows the purge function connection.

  • Page 50: Figure 4-11. 9-Pin Subminiature-D Purge Function Connection

    ® Advanced Energy To disengage this function, disconnect the MFC terminal. Figure 4-11. 9-pin subminiature-D purge function connection Figure 4-12. 9-pin subminiature-D internal circuitry for purge function 4-12 I/O Connections and Communication 5700512-C...

  • Page 51: Chapter 5. Troubleshooting And Global Customer Support

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter Chapter Troubleshooting and Global Customer Support TROUBLESHOOTING The following sections provide information on troubleshooting the MFC as well as AE Global Services contact information. Hazardous voltages exist inside the mass flow controller (MFC). Do not remove the MFC cover.

  • Page 52: No Gas Is Being Supplied

    ® Advanced Energy NO GAS IS BEING SUPPLIED Use the following flow chart to troubleshoot if no gas is being supplied. If these procedures do not resolve the problem, contact AE Global Services (see “AE Global Services” on page 5-6).

  • Page 53: Set Point And Flow Output Do Not Match

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs SET POINT AND FLOW OUTPUT DO NOT MATCH Use the following procedure to troubleshoot if the set point and the flow output do not match. If these procedures do not resolve the problem, contact AE Global Services (see “AE Global Services”...

  • Page 54: Unstable Flow Or Insufficient Output Exists

    ® Advanced Energy UNSTABLE FLOW OR INSUFFICIENT OUTPUT EXISTS Use the following procedure to troubleshoot unstable flow or insufficient output. If these procedures do not resolve the problem, contact AE Global Services (see “AE Global Services” on page 5-6). Troubleshooting and Global Customer Support...

  • Page 55: Figure 5-3. Unstable Flow Or Insufficient Output Exists Troubleshooting Flow Chart

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Check for stable pressure Ensure that pressure is stable on on both the inlet and outlet Not OK inlet and outlet sides. sides of the MFC. Check that the pressure Adjust pressure to meet pressure differential between the differential specifications.

  • Page 56: Ae World Wide Web Site

    ® Advanced Energy AE WORLD WIDE WEB SITE For additional product information, consult Advanced Energy’s World Wide Web site: • http://www.advanced-energy.com AE GLOBAL SERVICES Please contact one of the following offices if you have questions. Note: When calling AE Global Services, make sure to have the unit serial number and part number.

  • Page 57: European Sales And Service Contacts

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table 5-1. AE Global Services locations (USA) (Continued) USA Offices Contact Information Dallas, Texas Phone: 972.231.9333 13490 Floyd Rd #108 FAX: 972.231.9446 Dallas, TX 75243 San Jose, California Phone: 408.281.7772 6389 San Ignacio Avenue FAX: 408.281.7797...

  • Page 58: Middle East Sales And Service Contacts

    ® Advanced Energy Table 5-3. European sales representative contacts European Offices Contact Information France Phone: 33(0) 476.99.22.60 Omicron Technologies FAX: 33(0) 476.99.22.66 ZA de Font Ratel 30 rue de l’Europe F-38640 Ireland Phone: 353.(0).6.60.3504 Valley Products and Service, Ltd. FAX: 353.(0)6.68.9657 Italy Phone/FAX: 39.039.322351...

  • Page 59: Asian Sales And Service Contacts

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Asian Sales and Service Contacts Table 5-5. Pacific Rim sales and service offices Pacific Rim Offices Contact Information AE China Phone: 86-21-58579011 469 Huaxia Dong Road FAX: 86-21-58579003 Zhang Jiang Town Shanghai, China 201203 AE Japan K.K.

  • Page 60: Returning Mfcs For Repair

    “Packing an MFC for Shipping” on page 5-10 for more information on packing the MFC for shipping. ® To ensure years of dependable service, Advanced Energy products are thoroughly tested and designed to be among the most reliable and highest quality systems available worldwide.

  • Page 61: Warranty

    All MFC warranties are void if the seal on the MFC cover is broken or removed. ® Advanced Energy (AE) products are warranted to be free from failures due to defects in material and workmanship for 12 months after they are shipped from the factory (please see warranty statement below for details).

  • Page 62: Warranty Statement

    ® Advanced Energy Warranty Statement Attention: All MFC warranties are void if the seal on the MFC cover is broken or removed. Aera warrants that for a period of one year after shipment, products manufactured by Aera shall be free from defects in material and workmanship when installed, serviced, and operated with the specifications for which they were designed.

  • Page 63: Chapter 6. Specifications And Reference Information

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter Chapter Specifications and Reference Information This chapter contains information on the specifications of models covered by this manual, the dimensions of each model, and reference information (including information about calibration and labeling).

  • Page 64: Specifications For Model Fc-770 Mfcs

    ® Advanced Energy Specifications for Model FC-770 MFCs The following table lists specifications for the FC-770 MFCs. Table 6-1. Specifications for FC-770 series MFCs Specification FC-770A FC-770AC Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 65: Specifications For Model Fc-771 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-771 MFCs The following table lists specifications for the FC-771 MFCs. Table 6-2. Specifications for FC-771 series MFCs Specification FC-771A FC-771AC Full-scale range (N equivalent) 6 slm to 20 slm 6 slm to 50 slm Valve type...

  • Page 66: Specifications For Model Fc-772 Mfcs

    ® Advanced Energy Specifications for Model FC-772 MFCs The following table lists specifications for the FC-772 MFCs. Table 6-3. Specifications for FC-772 series MFCs Specification FC-772 FC-772C Full-scale range (N equivalent) 35 slm to 150 slm Valve type Normally open...

  • Page 67: Specifications For Model Fc-780Ht Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC- MFCs 780HT The following table lists specifications for the FC-780HT MFCs. Table 6-4. Specifications for FC-780HT series MFCs Specification FC-780HT FC-780CHT Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type...

  • Page 68: Specifications For Model Fc-780 Mfcs

    ® Advanced Energy Specifications for Model FC-780 MFCs The following table lists specifications for the FC-780 MFCs. Table 6-5. Specifications for FC-780 series MFCs Specification FC-780 FC-780C Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 69: Specifications For Model Fc-780X Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-780X MFCs The following table lists specifications for the FC-780X MFCs. Table 6-6. Specifications for FC-780X series MFCs Specification FC-780X FC-780XC Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 70: Specifications For Model Fc-781Ht Mfcs

    ® Advanced Energy Specifications for Model FC-781HT MFCs The following table lists specifications for the FC-781HT MFCs. Table 6-7. Specifications for FC-781HT series MFCs Specification FC-781HT FC-781CHT Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 20 slm...

  • Page 71: Specifications For Model Fc-781 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-781 MFCs The following table lists specifications for the FC-781 MFCs. Table 6-8. Specifications for FC-781 series MFCs Specification FC-781 FC-781C Full-scale range (N equivalent) 6 slm to 20 slm 6 slm to 50 slm Valve type...

  • Page 72: Specifications For Model Fc-782 Mfcs

    ® Advanced Energy Specifications for Model FC-782 MFCs The following table lists specifications for the FC-782 MFCs. Table 6-9. Specifications for FC-782 series MFCs Specification FC-782 FC-782C Full-scale range (N equivalent) 35 slm to 150 slm Valve type Normally open...

  • Page 73: Specifications For Model Fc-785 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-785 MFCs The following table lists specifications for the FC-785 MFCs. Table 6-10. Specifications for FC-785 series MFCs Specification FC-785 FC-785C Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 74: Specifications For Model Fc-785T-B Mfcs

    ® Advanced Energy Specifications for Model FC-785T-B MFCs The following table lists specifications for the FC-785T-B MFCs. Table 6-11. Specifications for FC-785T-B series MFCs Specification FC-785T-B FC-785CT-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 75: Specifications For Model Fc-785X-B Mfc

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-785X-B MFC The following table lists specifications for the FC-785X-B MFC. Table 6-12. Specifications for model FC-785X-B MFC Specification FC-785XC-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally closed Response time...

  • Page 76: Specifications For Model Fc-785Y-B Mfcs

    ® Advanced Energy Specifications for Model FC-785Y-B MFCs The following table lists specifications for the FC-785Y-B MFCs. Table 6-13. Specifications for FC-785Y-B series MFCs Specification FC-785Y-B FC-785CY-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 77: Specifications For Model Fc-786 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-786 MFCs The following table lists specifications for the FC-786 MFCs. Table 6-14. Specifications for FC-786 series MFCs Specification FC-786 FC-786C Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 50 slm Valve type...

  • Page 78: Specifications For Model Fc-786T-B Mfcs

    ® Advanced Energy Specifications for Model FC-786T-B MFCs The following table lists specifications for the FC-786T-B MFCs. Table 6-15. Specifications for FC-786T-B series MFCs Specification FC-786T-B FC-786CT-B Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 50 slm...

  • Page 79: Specifications For Model Fc-786Y-B Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-786Y-B MFCs The following table lists specifications for the FC-786Y-B MFCs. Table 6-16. Specifications for FC-786Y-B series MFCs Specification FC-786Y-B FC-786CY-B Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 50 slm Valve type...

  • Page 80: Specifications For Model Fc-790 Mfcs

    ® Advanced Energy Specifications for Model FC-790 MFCs The following table lists specifications for the FC-790 MFCs. Table 6-17. Specifications for FC-790 series MFCs Specification FC-790 FC-790C Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 81: Specifications For Model Fc-791 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-791 MFCs The following table lists specifications for the FC-791 MFCs. Table 6-18. Specifications for FC-791 series MFCs Specification FC-791 FC-791C Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 50 slm Valve type...

  • Page 82: Specifications For Model Fc-795 Mfcs

    ® Advanced Energy Specifications for Model FC-795 MFCs The following table lists specifications for the FC-795 MFCs. Table 6-19. Specifications for FC-795 series MFCs Specification FC-795 FC-795C Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 83: Specifications For Model Fc-795T-B Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-795T-B MFCs The following table lists specifications for the FC-795T-B MFCs. Table 6-20. Specifications for FC-795T-B series MFCs Specification FC-795T-B FC-795CT-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 84: Specifications For Model Fc-796 Mfcs

    ® Advanced Energy Specifications for Model FC-796 MFCs The following table lists specifications for the FC-796 MFCs. Table 6-21. Specifications for FC-796 series MFCs Specification FC-796 FC-796C Full-scale range (N equivalent) 6 slm to 30 slm 6 slm to 50 slm...

  • Page 85: Specifications For Model Fc-7700 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-7700 MFCs The following table lists specifications for the FC-7700 MFCs. Table 6-22. Specifications for FC-7700 series MFCs Specification FC-7700 FC-7700C FC-7700CD FC-7700CU Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type...

  • Page 86: Specifications For Model Fc-7710 Mfcs

    ® Advanced Energy Specifications for Model FC-7710 MFCs The following table lists specifications for the FC-7710 MFCs. Table 6-23. Specifications for FC-7710 series MFCs Specification FC-7710 FC-7710C FC-7710CD FC-7710CU Full-scale range (N equivalent) 6 slm to 6 slm to 6 slm to 30 slm...

  • Page 87: Specifications For Model Fc-7720 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-7720 MFCs The following table lists specifications for the FC-7720 MFCs. Table 6-24. Specifications for FC-7720 series MFCs Specification FC-7720 FC-7720C, FC-7720CD Full-scale range (N equivalent) 35 slm to 150 slm Valve type...

  • Page 88: Specifications For Model Fc-7800 Mfcs

    ® Advanced Energy Specifications for Model FC-7800 MFCs The following table lists specifications for the FC-7800 MFCs. Table 6-25. Specifications for FC-7800 series MFCs Specification FC-7800 FC-7800C FC-7800CD FC-7800CU Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type...

  • Page 89: Specifications For Model Fc-7810 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-7810 MFCs The following table lists specifications for the FC-7810 MFCs. Table 6-26. Specifications for FC-7810 series MFCs Specification FC-7810 FC-7810C FC-7810CD, FC- 7810CU 6 slm to 50 slm 6 slm to 30 slm Full-scale range (N equivalent)

  • Page 90: Specifications For Model Fc-7820 Mfcs

    ® Advanced Energy Specifications for Model FC-7820 MFCs The following table lists specifications for the FC-7820 MFCs. Table 6-27. Specifications for FC-7820 series MFCs Specification FC-7820 FC-7820C Full-scale range (N equivalent) 35 slm to 150 slm Valve type Normally open...

  • Page 91: Specifications For Model Fc-7850Y-B Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-7850Y-B MFCs The following table lists specifications for the FC-7850Y-B MFCs. Table 6-28. Specifications for FC-7850Y-B series MFCs Specification FC-7850Y-B FC-7850CY-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 92: Specifications For Model Fc-7810 Mfcs

    ® Advanced Energy Specifications for Model FC-7810 MFCs The following table lists specifications for the FC-7810 MFCs. Table 6-29. Specifications for FC-7810 series MFCs Specification FC-7810 FC-7810C FC-7810CD, FC- 7810CU 6 slm to 50 slm 6 slm to 30 slm...

  • Page 93: Specifications For Model Fc-7820 Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-7820 MFCs The following table lists specifications for the FC-7820 MFCs. Table 6-30. Specifications for FC-7820 series MFCs Specification FC-7820 FC-7820C Full-scale range (N equivalent) 35 slm to 150 slm Valve type Normally open...

  • Page 94: Specifications For Model Fc-7850Y-B Mfcs

    ® Advanced Energy Specifications for Model FC-7850Y-B MFCs The following table lists specifications for the FC-7850Y-B MFCs. Table 6-31. Specifications for FC-7850Y-B series MFCs Specification FC-7850Y-B FC-7850CY-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 95: Specifications For Model Fc-785Y-B Mfcs

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Specifications for Model FC-785Y-B MFCs The following table lists specifications for the FC-785Y-B MFCs. Table 6-32. Specifications for FC-785Y-B series MFCs Specification FC-785Y-B FC-785CY-B Full-scale range (N equivalent) 10 sccm to 5000 sccm Valve type Normally open...

  • Page 96: Dimensions For Standard Mfc Models

    ® Advanced Energy Dimensions for Standard MFC Models Figure 6-1 Table 6-33 provide physical dimensions for standard MFC model numbers. ″ Figure 6-1. Dimensions for standard MFC models with 1/4 VCR fitting Table 6-33. Dimensions for standard models in mm (and inches) Model 124 (4.88)
  • Page 97 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Table 6-33. Dimensions for standard models in mm (and inches) (Continued) Model FC-790 / 790C 124 (4.88) 12.7 18.6 38.2 (second numbers (0.50) (4.92) (1.50) (0.73) (1.50) under L1 and L2 refer to additional mount- (0.71) (2.72)
  • Page 98 ® Advanced Energy Table 6-33. Dimensions for standard models in mm (and inches) (Continued) Model FC-785 / 785C 106 (4.17) 12.7 123.8 (0.50) (4.87) (1.42) (0.63) (1.14) FC-786 / 786C 106 (4.17) 12.7 123.8 (0.50) (4.87) (1.42) (0.63) (1.14) 6-36...

  • Page 99: Dimensions For Block-Type Mfc Models

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Dimensions For Block-Type MFC Models Figure 6-2 Table 6-34 provide physical dimensions for block-type MFC model numbers. Figure 6-2. Dimensions of block-type MFC models Table 6-34. Dimensions for block-type models in mm (and inches) Model FC-7850Y-B 63.6...

  • Page 100: Dimensions For High Temperature Mfc Models

    ® Advanced Energy Dimensions for High Temperature MFC Models Figure 6-3, Table 6-35, and Table 6-36 provide physical dimensions for the high temperature MFC model numbers (for both the MFC unit and the PCB unit). Figure 6-3. Dimensions for high temperature MFC models Table 6-35.

  • Page 101: Reference Information

    Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs REFERENCE INFORMATION The following sections contain calibration references, as well as MFC label and model code information for the MFC. Calibration References In order to ensure MFC cleanliness, AE may use a surrogate calibration gas rather than the gas indicated on the label.

  • Page 102: Product Label

    ® Advanced Energy Product Label The MFC product label displays the following: model number, serial number, calibration gas, surface treatment, and full-scale flow. Figure 6-4 is an example of a MFC single-gas model label. Surface treatment designation Serial number Model number...
  • Page 103 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Index AE customer support 5-6 electrical connections 3-5 AE web site 5-6 electrical connector alarm output signal 4-7 9-pin subminiature-D 4-5 authorization return number 5-11 alarm output signal 4-7 authorized returns 5-11 control valve (purge) signal 4-8 signal descriptions 4-2...
  • Page 104 ® Advanced Energy preparing to install 3-1 power supply requirements 3-5 safety requirements 3-1 product site preparation 3-3 certification 1-7 unpack MFC 3-3 purge signal 4-8 label reference information MFC label 6-40 calibration references 6-39 labels on unit 1-5 flow indication 6-39...
  • Page 105 Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs set point and flow 5-3 unstable or insufficient flow 5-4 unit icons and symbols used 1-5 unit, see MFC unpacking the MFC 3-3 user manual interpreting 1-4 models covered by 1-1 symbols and icons used 1-5 type conventions 1-4 valve assembly 2-4...
  • Page 106 ® Advanced Energy Index 5700512-C...

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