Specifications For Model Fc-796 Mfcs; Table 6-21. Specifications For Fc-796 Series Mfcs - Advanced Energy FC-77 Series User Manual

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Specifications for Model FC-796 MFCs

The following table lists specifications for the FC-796 MFCs.

Table 6-21. Specifications for FC-796 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure In
range
Out
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N
than 30 slm. 147 to 275 kPa(G) [21 to 40 psi(G)] when the full-scale (N
Note 4—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N
than 30 slm. 147 kPa(G) to 275 kPa(G)) when the full-scale (N
6-22
FC-796
6 slm to 30 slm
Normally open
Maximum ±2% of full scale, within 1 s
Maximum at ±0.2% of full scale
Maximum 1 x 10
69 to 275 kPa(G); 10 to
40 psi(G)
Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Current output (0 mA to 2.5 mA), error detection function,
Specifications and Reference Information
6 slm to 50 slm
Normally closed
Maximum ±1% of full scale
Maximum ±0.5% of full scale
-11 3
[Pa*m /sec(He)]
2% to 100%
69 to 275 kPa(G); 10 to
Note 3
40 psi(G)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Maximum 3.1 W
SUS316, SUS316L, PCTFE
Equivalent to 1/4" VCR
Any direction
1 kg (2.2 lb)
TC surface treatment
equivalent) is over 10 slm and less
2
equivalent) is 30 slm.
2
equivalent) is over 10 slm and less
2
equivalent) is from 30 slm to 50 slm.
2
FC-796C
Note 4
5700512-C