Specifications For Model Fc-7700 Mfcs; Table 6-22. Specifications For Fc-7700 Series Mfcs - Advanced Energy FC-77 Series User Manual

Specifications for Model FC-7700 MFCs

The following table lists specifications for the FC-7700 MFCs.

Table 6-22. Specifications for FC-7700 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
FC-7700
Normally
open
Maximum ±2% of full scale, within 2 seconds
SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
Specifications and Reference Information
FC-7700C FC-7700CD
10 sccm to 5000 sccm
Normally closed
Maximum ±1% of full scale
Maximum ±0.5% of full scale
Maximum at ±0.2% of full scale
-7 3
Maximum 1 x 10 [Pa*m
5% to 100%
49 to 275 kPa(D); 7 to 40 psi(D)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
1/4" VCR, 1/4" SW, 1/4" VCO
Any direction
0.9 kg (2.0 lb)
1/4" MCG fitting
FC-7700CU
/sec(He)]
2% to 100%
6-23