Specifications For Model Fc-785 Mfcs; Table 6-10. Specifications For Fc-785 Series Mfcs - Advanced Energy FC-77 Series User Manual

Specifications for Model FC-785 MFCs

The following table lists specifications for the FC-785 MFCs.

Table 6-10. Specifications for FC-785 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the ser-
vice gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
FC-785
Normally open
Current output (0 mA to 2.5 mA), error detection function,
Specifications and Reference Information
10 sccm to 5000 sccm
Maximum ±2% of full scale, within 1 s
Maximum ±1% of full scale
Maximum ±0.5% of full scale
Maximum at ±0.2% of full scale
-11
Maximum 1 x 10 [Pa*m
2% to 100%
49 to 275 kPa(D); 7 to 40 psi(D)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
Equivalent to 1/4" VCR
Any direction
1.0 kg (2.2 lb)
electropolishing
FC-785C
Normally closed
3
/sec(He)]
6-11