First-Time Operation; Zeroing The Mfc - Advanced Energy FC-77 Series User Manual

Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.

First-Time Operation

The first time you operate the MFC:
1. Ensure that you have installed the MFC properly by following the procedures in
"Installing the Unit" on page
2. After energizing the MFC (turning on power) through the appropriate
communications interface, allow the MFC to warm up for at least 15 minutes
before supplying gas to the MFC.
If you observe deviation in the zero output, perform a zero-point adjustment (see
"Zeroing the MFC" on page
3. When using the MFC with vapors at room temperature, set the supply pressure at
the minimum value capable of securing the full-scale flow rate to avoid liquid
recondensation in the pipes. Be sure to maintain stable temperature for all pipes.

Zeroing the MFC

Look to the following information to adjust the MFC to the zero point.
Note: Contamination can negatively affect proper flow rate control and measurement,
despite zero point adjustment.
Before Zeroing the MFC, Review the Following:
• Make sure that your MFC has a zero-point adjustment hole. To identify this hole,
see Figure 3-4 on page
adjust the zero point. In this situation, contact AE Global Services (see
Global Services" on page
• The MFC can be mounted in any position. However, if the MFC is in a vertical
position, thermal siphoning can occur with a gas that has a molecular weight that
is 140 or less, which may cause the zero point to shift. Make sure to adjust the zero
point in the intended mounting position and with pressured service gas.
• Adjust the zero point at the service operating temperature. Temperature
deviations, even within the specified range of operating temperatures, may cause
the zero point to shift.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
3-2.
3-9).
3-10. If your model does not have this hole, you can not
5-6).
Installation and Operation
"AE
3-9