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Controller
FC-77 Series
User manual
Card Edge Purge Function Signals; Figure 4-5. Card Edge Purge Function Signals; Figure 4-6. Card Edge Normally Open Internal Circuitry For Purge Function - Advanced Energy FC-77 Series User Manual
Mass flow controllers
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Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
CARD EDGE PURGE FUNCTION SIGNALS
For the card edge connector, MFCs with normally open and normally closed valves
require inverse connections. Be sure to connect the signal properly. (To check whether
an MFC is normally closed or normally open, see
"Model Numbers for this Manual"
on page
1-1.)
Figure 4-5
shows the connections.
Figure 4-6
and
Figure 4-7
show the
internal circuitry for normally open and normally closed MFCs, respectively.
To disengage this function, disconnect the MFC terminal.
Figure 4-5. Card edge purge function signals
Figure 4-6. Card edge normally open internal circuitry for purge function
5700512-C
I/O Connections and Communication
4-9
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Table of Contents
Troubleshooting
Chapter 5. Troubleshooting and Global Customer Support
51
No Gas Is Being Supplied
52
Set Point and Flow Output Do Not Match
53
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow chart
55
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This manual is also suitable for:
Fc-78 series
Fc-79 series
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